Skip to main content
SpringerLink
Log in

The Influence of Magnetron Sputtering Conditions on the Structure of Zr–Pd Coatings

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

Using the method of DC magnetron sputtering, nonstructured amorphous metal coatings of Zr75Pd25 composition were obtained with an average deposition rate of 1.3 nm/s at a substrate temperature of 40°C, while crystalline coatings were formed at a higher substrate temperature. A crystalline coating with equilibrium phase composition was obtained at 350°C. Coatings deposited at intermediate temperatures contained predominantly a PdZr phase, in contrast to the equilibrium PdZr2 phase. The surface roughness of amorphous coatings was on a level of 0.2–0.5 nm, which was about ten times lower than the mean roughness of crystalline coatings with the same composition.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1.
Fig. 2.
Fig. 3.

Similar content being viewed by others

REFERENCES

  1. J. Ning, X. Zhang, J. Qin, L. Wang, D. Passerone, M. Ma, and R. Liu, Int. J. Hydrogen Energy 41, 1736 (2016).

    Article  Google Scholar 

  2. M. Matsuda, T. Nishiura, T. Yamamuro, and M. Nishida, Metals 8, 366 (2018).

    Article  Google Scholar 

  3. S. V. Ketov, X. Shi, G. Xie, R. Kumashiro, A. Y. Churyumov, A. I. Bazlov, N. Chen, Y. Ishikawa, N. Asao, H. Wu, and D. V. Louzguine-Luzgin, Sci. Rep. 5, 7799 (2015).

    Article  ADS  Google Scholar 

  4. A. Molnár, Appl. Surf. Sci. 257, 8151 (2011).

    Article  ADS  Google Scholar 

  5. A. S. Ivanov, A. F. Pal, A. N. Ryabinkin, A. O. Serov, E. A. Ekimov, A. V. Smirnov, and A. N. Starostin, Russ. J. Gen. Chem. 85, 1270 (2015).

    Article  Google Scholar 

  6. A. L. Greer and W.-N. Myung, MRS Proc. 644 (11), 4 (2000).

  7. H. Xu, H. Huang, J. Walker, C. Kong, N. G. Rice, M. P. Mauldin, J. D. Vocke, J. H. Bae, W. Sweet, F. H. Elsner, M. P. Farrell, Y. M. Wang, C. Alford, T. Cardenas, and E. Loomis, Fusion Sci. Technol. 73, 354 (2018).

    Article  Google Scholar 

  8. H. Yan, Y. Y. Tay, M. H. Liang, Z. Chen, C. M. Ng, J. S. Pan, H. Xu, C. Liu, and V. V. Silberschmidt, in Proceedings of the 11th Electronics Packaging Technology Conference (IEEE, 2009), p. 567.

  9. P. Yiu, W. Diyatmika, N. Bönninghoff, Y.-C. Lu, B.-Zh. Lai, and J. P. Chu, J. Appl. Phys. 127, 030901 (2020).

    Article  ADS  Google Scholar 

  10. A. Inoue, Acta Mater. 48, 279 (2000).

    Article  Google Scholar 

  11. Y. H. Liu, T. Fujita, A. Hirata, S. Li, H. W. Liu, W. Zhang, A. Inoue, and M. W. Chen, Intermetallics 21, 105 (2012).

    Article  Google Scholar 

  12. P. Sharma, N. Kaushik, H. Kimura, Y. Saotome, and A. Inoue, Nanotecnology 18, 035302 (2007).

    Article  ADS  Google Scholar 

  13. C. W. Chu, J. S. C. Jang, S. M. Chiu, and J. P. Chu, Thin Solid Films 517, 4930 (2009).

    Article  ADS  Google Scholar 

  14. Y. A. Mankelevich, A. V. Mitin, V. S. Mitin, A. F. Pal’, T. V. Rakhimova, A. N. Ryabinkin, A. O. Serov, and S. Y. Luchkin, Tech. Phys. Lett. 39, 39 (2013).

    Article  ADS  Google Scholar 

  15. L. A. Bendersky, J. K. Stalick, R. Portier, and R. M. Waterstrat, J. Alloys Compd. 236, 19 (1996).

    Article  Google Scholar 

  16. A. L. Greer, Y. Q. Cheng, and E. Ma, Mater. Sci. Eng. R 74 (4), 71 (2013).

    Article  Google Scholar 

  17. J. A. Thornton, J. Vac. Sci. Technol. 11, 666 (1974).

    Article  ADS  Google Scholar 

  18. J.-Q. Hu, M. Xie, Y. Pan, Y.-C. Yang, M.-M. Liu, and J.-M. Zhang, Comput. Mater. Sci. 51, 1 (2012).

    Article  Google Scholar 

Download references

ACKNOWLEDGMENTS

This work was performed using instrumentation of the Educational and Methodical Center of Lithography and Microscopy at the M.V. Lomonosov Moscow State University.

Funding

This work was supported by the Russian Foundation for Basic Research, project no. 19-08-01250.

Author information

Authors and Affiliations

  1. Skobeltsyn Institute of Nuclear Physics, Moscow State University, 119991, Moscow, Russia

    A. F. Pal, A. N. Ryabinkin & A. O. Serov

Authors
  1. A. F. Pal
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. N. Ryabinkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. O. Serov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. O. Serov.

Ethics declarations

The authors declare that they have no conflict of interest.

Additional information

Translated by P. Pozdeev

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Pal, A.F., Ryabinkin, A.N. & Serov, A.O. The Influence of Magnetron Sputtering Conditions on the Structure of Zr–Pd Coatings. Tech. Phys. Lett. 46, 725–728 (2020). https://doi.org/10.1134/S1063785020070238

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785020070238

Keywords:

Search

Navigation