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Numerical Study of the Thresholds of Sputtering of Metals during Bombardment with Low-Energy Ions

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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The transfer of energy from bombarding \({{{\text{K}}}^{ + }}\) and \({\text{A}}{{{\text{r}}}^{ + }}\)ions ( = 10–100 eV) to vanadium atoms is studied via molecular dynamics using the Vs potential. The threshold energy of vanadium sputtering is determined, and a numerical way of determining the thresholds of sputtering for solids is proposed.

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Authors and Affiliations

  1. Penza State University, 440026, Penza, Russia

    V. V. Evstifeev & N. V. Kostina

Authors
  1. V. V. Evstifeev
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  2. N. V. Kostina
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Correspondence to N. V. Kostina.

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Translated by I. Obrezanova

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Evstifeev, V.V., Kostina, N.V. Numerical Study of the Thresholds of Sputtering of Metals during Bombardment with Low-Energy Ions. Bull. Russ. Acad. Sci. Phys. 84, 720–726 (2020). https://doi.org/10.3103/S1062873820060118

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  • DOI: https://doi.org/10.3103/S1062873820060118

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