Skip to main content
SpringerLink
Log in

Residual Deformations and Mechanical Stresses in Macroporous and Nonporous Silicon Under Normal Etching Conditions

  • Topical Collection: 18th Conference on Defects (DRIP XVIII)
  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

Lattice changes of macroporous silicon were studied under variations in the etching conditions of macropores. It was established that under all the etching conditions, additional mechanical stresses and corresponding deformations arise up to the appearance of dislocations in the macroporous layer at elevated voltage or current.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. Birner, R.B. Wehrspohn, U.M. Gösele, and K. Busch, Adv. Mater. 13, 377 (2001). https://doi.org/10.1002/1521-4095(200103)13:6<377::AID-ADMA377>3.0.CO;2-X.

    Article  CAS  Google Scholar 

  2. L.A. Karachevtseva, Semicond. Phys. Quantum Electron. Optoelectron. 7, 430 (2004).

    Article  CAS  Google Scholar 

  3. D.V. Bru and Á.R. Martinez, New Research on Silicon—Structure, Properties, Technology, Chapter7 (Norderstedt: Books on Demand, 2017), pp. 155–182. https://doi.org/10.5772/67698.

    Book  Google Scholar 

  4. K.P. Konin, O.Y. Gudymenko, V.P. Kladko, O.O. Lytvynenko, and D.V. Morozovska, J. Electron. Mater. 47, 5113 (2018). https://doi.org/10.1007/s11664-018-6502-4.

    Article  CAS  Google Scholar 

  5. E.V. Astrova, V.V. Ratnikov, A.D. Remenyuk, and I.L. Shul’pina, Semiconductors 36, 1033 (2002). https://doi.org/10.1134/1.1507287.

    Article  CAS  Google Scholar 

  6. V. Lehmann, J. Electrochem. Soc. 140, 2836 (1993). https://doi.org/10.1149/1.2220919.

    Article  CAS  Google Scholar 

Download references

Acknowledgments

The authors thank Sci.Dr. L.A. Matveeva for profilometric measurements and E.Yo. Strons’ka for help in the article preparation.

Author information

Authors and Affiliations

  1. V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, Nauki Av. 41, Kiev, 03028, Ukraine

    K. P. Konin, O. Yo. Gudymenko, V. P. Klad’ko, O. O. Lytvynenko & D. V. Morozovs’ka

Authors
  1. K. P. Konin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. O. Yo. Gudymenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. P. Klad’ko
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. O. O. Lytvynenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. D. V. Morozovs’ka
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to K. P. Konin.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Konin, K.P., Gudymenko, O.Y., Klad’ko, V.P. et al. Residual Deformations and Mechanical Stresses in Macroporous and Nonporous Silicon Under Normal Etching Conditions. J. Electron. Mater. 49, 5240–5243 (2020). https://doi.org/10.1007/s11664-020-08319-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-020-08319-z

Keywords

Search

Navigation