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Structure and properties of ZrCoCe getter film with Pd protection layer

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Abstract

ZrCoCe getter films with thickness of ~ 2.3 μm were deposited on Si(100) wafers by direct current (DC) magnetron sputtering process. A 400-nm-thick Pd protection layer was then deposited on the as-deposited ZrCoCe film without exposure to atmosphere. Microstructure, surface morphology and surface chemical state of the films were analyzed. Moreover, hydrogen sorption properties were determined. The results show that the ZrCoCe film displays a cauliflower-like morphology and a porous columnar-like structure which is composed of nanocrystal grains. The Pd protection layer tightly adheres to the surface of the ZrCoCe film and efficiently prevents the oxidation of Zr under exposure to atmosphere. We find that the hydrogen sorption properties of the Pd-ZrCoCe film are significantly improved, in comparison with those of the as-deposited ZrCoCe film.

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Acknowledgements

This study was financially supported by the National Natural Science Foundation of China (No. 61874137).

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Authors and Affiliations

  1. Advanced Electronic Materials Institute, GRIMAT Engineering Institute Co., Ltd, Beijing, 101407, China

    Jian-Dong Cui, Hua-Ting Wu, Yan Zhang, Yao-Hua Xu & Zhi-Min Yang

  2. State Key Laboratory of Advanced Materials for Smart Sensing, General Research Institute for Nonferrous Metals, Beijing, 100088, China

    Yao-Hua Xu

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  1. Jian-Dong Cui
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  2. Hua-Ting Wu
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  3. Yan Zhang
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  4. Yao-Hua Xu
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Correspondence to Jian-Dong Cui.

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Cui, JD., Wu, HT., Zhang, Y. et al. Structure and properties of ZrCoCe getter film with Pd protection layer. Rare Met. 40, 2579–2583 (2021). https://doi.org/10.1007/s12598-020-01522-1

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  • DOI: https://doi.org/10.1007/s12598-020-01522-1

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