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Fast Nondestructive Technique for Analyzing Deflection of Membranes Located on the Substrate

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Abstract

We describe a nondestructive technique for automated analysis of deflection of substrate-mounted membrane structures, which are a key element of devices based on microelectromechanical systems (MEMS devices). The technique includes analysis of substrates with an optical profiler operating in a specialized mode and mathematical processing of measurement results. The technique allows determining the magnitude and sign of deflection of membrane structures for each measurement area. The procedure results in grading the value of deflection and detecting the following types of the state of membrane structures, which are important for assessing the yield and reliability of MEMS devices based on these structures: separation or rupture of the structure, its significant deflection, its slight deflection, and lack of a deflection. All results are displayed in map format on the surface of a substrate with membrane structures with the ability to access more detailed data. The developed technique makes it possible to localize regions with a maximum, predetermined, and low yield of suitable crystals of MEMS devices, as well as flawed regions over the entire substrate surface. The use of the technique significantly increases the accuracy and reduces the measurement time for estimating the yield of suitable membrane structures, and also makes it possible to adjust the process route so as to increase the yield of suitable crystals of MEMS devices.

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ACKNOWLEDGMENTS

The authors are grateful to the leading engineer of the Shared Use Center for Microsystems and Electronic Component Base of MIET V.Yu. Kireev for discussing the materials presented in this article and useful comments made.

Funding

This work was performed using the equipment of MIET’s SUC “Microsystems and Electronic Component Base” with the support of the Ministry of Science and Higher Education of the Russian Federation, agreement 075-15-2019-1650, unique project no. RFMEFI59419X0018.

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  1. National Research University of Electronic Technology (MIET), 124498, Zelenograd, Moscow, Russia

    A. A. Dedkova, N. A. Dyuzhev, E. E. Gusev & M. Yu. Shtern

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  1. A. A. Dedkova
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  2. N. A. Dyuzhev
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Correspondence to A. A. Dedkova.

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Dedkova, A.A., Dyuzhev, N.A., Gusev, E.E. et al. Fast Nondestructive Technique for Analyzing Deflection of Membranes Located on the Substrate. Russ J Nondestruct Test 56, 452–459 (2020). https://doi.org/10.1134/S1061830920050046

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