Abstract
The effect of using a pulsed electric current to remove impurity iron from molten polysilicon was investigated. Using optical microscopy observation and area statistics of iron-rich content, it was found that iron tends to accumulate at the bottom of an ingot under the action of a pulsed electric current. A new separation mechanism is proposed, based on the decreased solubility of iron in polysilicon under conditions including a pulsed electric current. Thermodynamic calculations indicate the theoretical possibility of the formation of iron-rich Si clusters. These clusters sink to the bottom of an ingot under the effect of gravity and form iron-rich precipitates with silicon, thereby achieving the iron removal. This technique provides a new method for purification of polysilicon.
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Acknowledgements
This work was financially supported by National Natural Science Foundation of China (U1860206, 51874023), Fundamental Research Funds for the Central Universities, Recruitment Program of Global Experts.
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Ren, S., Yan, L., Zhang, X. et al. Separation of Impurity Iron from Polysilicon by Pulsed Electric Current. JOM 72, 4101–4108 (2020). https://doi.org/10.1007/s11837-020-04265-7
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DOI: https://doi.org/10.1007/s11837-020-04265-7