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Rapid chemical vapor deposition of graphene using methanol as a precursor

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Abstract

In this study, graphene was rapidly grown by chemical vapor deposition using a liquid cell for supplying methanol as a carbon source of graphene. To realize the rapid growth, methanol which is carbon-contained organic solvent was used instead of methane gas, a widely used carbon source for graphene growth. The graphene grown with the growth time as a variable was transferred to a SiO2/Si substrate with an oxide thickness of 300 nm to confirm whether it was grown with full coverage with an optical microscope. The results confirmed a full coverage in 0.5 min of growth. The Raman spectra also confirmed the G-peak position at 1585.0 cm−1 and an intensity ratio of 2D/G at 2.3 or higher. Concerning electrical transport characteristics, at an induced carrier density of 1 × 1012 cm−2, the hole (µh) and electron (µe) mobilities were 1524 cm2 V−1 s−1 and 1528 cm2 V−1 s−1, respectively. Thus, our study confirmed that high-quality, large-area graphene can be grown within 0.5 min.

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Acknowledgements

This research was supported by Korea Electric Power Corporation (Grant Number: R18XA06-34) and the Global Research and Development Center Program (Grant Number: 2018K1A4A3A01064272) of the NRF funded by the Ministry of Science and ICT.

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  1. Imbok Lee and Jungtae Nam contributed equally to this paper.

Authors and Affiliations

  1. Department of Physics and GRI-TPC International Research Center, Sejong University, Seoul, 05006, Republic of Korea

    Imbok Lee, Jungtae Nam, Sang Jun Park, Dong Jae Bae, Suklyun Hong & Keun Soo Kim

  2. Carbon Convergence Materials Research Center, Institute of Advanced Composites Materials, Korea Institute of Science and Technology, Wanju-gun, 55324, Republic of Korea

    Jungtae Nam

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  1. Imbok Lee
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Lee, I., Nam, J., Park, S.J. et al. Rapid chemical vapor deposition of graphene using methanol as a precursor. Carbon Lett. 31, 307–313 (2021). https://doi.org/10.1007/s42823-020-00166-6

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