Abstract
Phase equilibria in the Ni-Si-Zr ternary system have been investigated experimentally by means of x-ray diffraction and electron probe micro-analyzer on equilibrated ternary alloys. Four ternary phases were detected at 1023 and 1173 K. The Ni16Si7Zr6 phase tends to present in two different contrasts and has a wide homogeneity range. The reported Ni2Si9Zr14 phase is not detected in this work. It is proposed that the Ni2Si9Zr14 phase is unstable at these temperatures. As for the binary phases, Ni5Zr and Ni7Zr2 dissolve appreciable amounts of Si and γNi31Si12, βNi3Si, δNi2Si, NiSi2 exhibit a considerable solubility of Zr.
Similar content being viewed by others
References
H. Li, X.X. Zhong, and F. He, The Production Technology Research of Microwave Schottkey Silicide Barrier Diodes, Semicond. Technol., 1999, 24(6), p 24–28
S. Zaima, O. Nakatsuka, H. Kondo, M. Sakashita, A. Sakai, and M. Ogawa, Silicide and Germanide Technology for Contacts and Gates in MOSFET Applications, Thin Solid Films, 2008, 517(1), p 80–83
J. Kim, J. Yi, and W.A. Anderson, Metal Silicide-Templated Growth of Quality Si Films for Schottky-Diodes, Thin Solid Films, 2010, 518(22), p 6510–6513
E.G. Colgan, J.P. Gambinno, and B. Cunningham, Nickel Silicide Thermal Stability on Polycrystalline and Single Crystalline Silicon, Mater. Chem. Phys., 1996, 46(2–3), p 209–214
J.F. Liu, H.B. Chen, and J.Y. Feng, Enhanced Thermal Stability of NiSi Flims on Si(111) Substrates by a Thin Pt Interlayer, J. Cryst. Growth, 2000, 220(4), p 488–493
D.X. Xu, S.R. Das, C.J. Peters, and L.E. Erickson, Material Aspects of Nickel Silicide for UlSI, Application, This Solid Films, 1998, 326(1–2), p 143–150
S. Huang, Y. Tian, and F. Lu, Investigation on the Barrier Height and Phase Transformation of Nickel Silicide Schottky Contact, Appl. Surf. Sci., 2000, 220(4), p 488–493
H. Wei, Z. Lichun, and G. Yuzhi, The Improvement of Thermal Stability of Nickel Silicide by Adding a Thin Zr Interlayer, Microelectron. Eng., 2006, 83(2), p 345–350
L. Bsenko, The Hf-Ni and Zr-Ni Systems in the Region 65–80 at.% Ni, J. Less Common Met., 1979, 63, p 171–179
N. Saunders, Phase Diagram Calculations for Eight Glass Forming Alloy Systems, CALPHAD, 1985, 9, p 297–309
H.T. Takeshita, S. Kondo, H. Miyamura, N. Takeichi, N. Kuriyama, and T. Oishi, Re-Examination of Zr7Ni10 Single-Phase Region, J. Alloys Compd., 2004, 376(1–2), p 268–274
T. Tokunaga, S. Matsumoto, H. Ohtani, and M. Hasebe, Thermodynamic Analysis of the Phase Equilibria in the Nb-Ni-Zr System, Mater. Trans., 2007, 48, p 2263–2271
N. Wang, C.R. Li, Z.M. Du, and F.G. Wang, Experimental Study and Thermodynamic Re-assessment of Ni-Zr System, CALPHAD, 2007, 31, p 413–421
M.K. Datta, S.K. Pabi, and B.S. Murthy, Phase Fields of Nickel Silicides Obtained by Mechanical Alloying in the Nanocrystalline State, J. Appl. Phys., 2000, 87, p 8393–8400
T. Tokunaga, K. Nishio, H. Ohtani, and M. Hasebe, Thermodynamic Assessment of the Ni-Si System by Incorporating Ab Initio Energetic Calculations into the Calphad Approach, CALPHAD, 2003, 27, p 161–168
Y. Du and J.C. Schuster, Experimental Investigations and Thermodynamic Descriptions of the Ni-Si and C-Ni-Si Systems, Metall. Mater. Trans. A, 1999, 30(A), p 2409–2418
J. Miettinen, Thermodynamic Description of the Cu-Ni-Si System in the Copper-Rich Corner above 700 °C, CALPHAD, 2005, 29, p 212–221
H. Okamoto, The Si-Zr (Silicon-Zirconium) System, Bull. Alloy Phase Diagrams, 1990, 11(5), p 513–519
C. Gueneau, C. Servant, I. Ansara, and N. Dupin, Thermodynamic Assessment of the Si-Zr System, CALPHAD, 1994, 18(3), p 319–327
G. Tao, Experimental Investigation of Phase Equilibria in (Co, Cu, Ni)-Si-Zr Ternary Systems, Master’s Thesis (China, 2013).
Y.V. Voroshilov, V.Y. Markiv, and E.I. Gladyshevskii, The Zirconium-Nickel-Silicon System, Inorg. Mater., 1967, 3, p 1224–1228
L.G. Akselrud, L.A. Lysenko, J.P. Jarmoljuk, and E.I. Gladyshevskii, Crystalline Structures of UNi2Si3, UNi1.4Si3.6, ZrNi1.4Si3.6 and HfNi1.8Si3.2, Dopov. Akad. Nauk Ukr. RSR, Ser. A, 1977, 7, p 657–660
A. Chikdene, A. Baudry, P. Boyer, S. Miraglia, D. Fruchart, and J.L. Soubeyroux, Neutron Diffraction Studies of Zr2NiH(D)x Hydrides, Zeitschrift fur Physikalische Chemie (Muenchen), 1989, 163, p 219–224
M.E. Kirkpatrick, D.M. Bailey, and J.F. Smit, The Structures of NiZr2, NiZr and their Hafnium Analogs, Acta Crystallogr. A, 1962, 15, p 252–255
J.M. Joubert, R. Cerny, K. Yvon, M. Latroche, and A. Percheron-Guégan, Zirconium-Nickel, Zr7Ni10: Space Group Revision for the Stoichiometric Phase, Acta Crystallogr. C, 1997, 53, p 1536–1538
F.R. Eshelman and J.F. Smith, The Structure of Zr2Ni7, Acta Crystallogr. B, 1972, 28, p 1594–1600
Z. Blazina, A. Drasner, and Z. Ban, Study of Substitution in the Systems UNi5−xMx and ZrNi5−xMx (M = In, Sn, Zn), J. Nucl. Mater., 1981, 96, p 141–146
M.A. Hayward and M.J. Rosseinsky, Synthesis of the Infinite Layer Ni(I) Phase NdNiO2+x by Low Temperature Reduction of NdNiO3 with Sodium Hydride, Solid State Sci., 2003, 5, p 839–850
P.J. Ahlzén, Y. Andersson, S. Rundqvist, and R. Tellgren, A Neutron Diffraction Study of Zr3PD3−x, J. Less Common Met., 1990, 161, p 269–278
Y. Mishima, S. Ochiai, and T. Suzuki, Lattice Parameters of Ni(γ), Ni3Al(γ’) and Ni3Ga(γ’) Solid Solutions with Additions of Transition and B-Subgroup Elements, Acta Metall., 1985, 33, p 1161–1169
K. Frank and K. Schubert, Kristallstruktur von Ni31Si12, Acta Crystallogr. B, 1971, 7, p 916–920
F. Yuan, Y. Mozharivskyj, A.V. Morozkin, A.V. Knotko, V.O. Yapaskurt, M. Pani, A. Provino, and P. Manfrinetti, The Dy-Ni-Si System as a Representative of the Rare Earth-Ni-Si Family: Its Isothermal Section and New Rare-Earth Nickel Silicides, J. Solid State Chem., 2014, 219, p 247–258
G. Pilström, The Crystal Structure of Ni3Si2 with Some Notes on Ni5Si2, Acta Chem. Scand., 1961, 15, p 893–902
K. Toman, The Structure of NiSi, Acta Crystallogr. A, 1951, 4, p 462–464
Acknowledgments
Financial supports from National Natural Science Foundation of China (Grant Nos. 51820105001 and 51950410600) and Natural Science Foundation of Zhejiang Province (LQ20E010004) are greatly acknowledged.
Author information
Authors and Affiliations
Corresponding authors
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Xiao, M., Du, Y., Xu, K. et al. Experimental Investigations of the Isothermal Sections for the Ni-Si-Zr Ternary System at 1023 and 1173 K. J. Phase Equilib. Diffus. 41, 615–622 (2020). https://doi.org/10.1007/s11669-020-00826-0
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11669-020-00826-0