Skip to main content
SpringerLink
Log in

Features of Low-Energy He and Ar Ion Irradiation of Nanoporous Si/SiO2-Based Materials

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

Low-energy (50–200 eV) He and Ar ion irradiation of on Si/SiO2-based nanoporous materials is modeled with the use of the molecular dynamics method. The obtained results corroborate the experimentally observed effect of densification of near-surface layers of materials with small-size pores and low porosity due to the ion-induced pore collapse process. The differences in the He and Ar ion irradiation of nanoporous materials and the influence of ion energy on the intensity of structural changes are studied.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.

Similar content being viewed by others

REFERENCES

  1. O. V. Braginsky, A. S. Kovalev, D. V. Lopaev, E. M. Malykhin, Yu. A. Mankelevich, O. V. Proshina, T. V. Rakhimova, A. T. Rakhimov, D. G. Voloshin, A. N. Vasilieva, S. M. Zyryanov, E. A. Smirnov, and M. R. Baklanov, J. Appl. Phys. 109, 043303 (2011). https://doi.org/10.1063/1.3549733

    Article  ADS  Google Scholar 

  2. A. M. Urbanowicz, D. Shamiryan, A. Zaka, P. Verdonck, S. de Gendt, and M. R. Baklanov, J. Electrochem. Soc. 157, H565 (2010). https://doi.org/10.1149/1.3355881

    Article  Google Scholar 

  3. A. A. Sycheva, E. N. Voronina, T. V. Rakhimova, and A. T. Rakhimov, Appl. Surf. Sci. 475, 1021 (2019). https://doi.org/10.1016/j.apsusc.2019.01.078

    Article  ADS  Google Scholar 

  4. E. N. Voronina, A. A. Sycheva, D. V. Lopaev, T. V. Rakhimova, A. T. Rakhimov, O. V. Proshina, D. G. Voloshin, S. M. Zyryanov, A. I. Zotovich, Yu. A. Mankelevich, Plasma Process Polym 17, 1900165 (2020). https://doi.org/10.1002/ppap.201900165

    Article  Google Scholar 

  5. T. V. Rakhimova, D. V. Lopaev, Yu. A. Mankelevich, A. T. Rakhimov, S. M. Zyryanov, K. A. Kurchikov, N. N. Novikova, and M. R. Baklanov, J. Phys. D: Appl. Phys. 48, 175203 (2015). https://doi.org/10.1088/0022-3727/48/17/175203

    Article  ADS  Google Scholar 

  6. A. P. Palov, E. N. Voronina, T. V. Rakhimova, D. V. Lo-paev, S. M. Zyryanov, Yu. A. Mankelevich, M. B. Krishtab, and M. R. Baklanov, J. Vac. Sci. Technol. B 34, 041205 (2016). https://doi.org/10.1116/1.4946838

    Article  Google Scholar 

  7. F. H. Stillinger and T. A. Weber, Phys. Rev. B 31, 526 (1985). https://doi.org/10.1103/PhysRevB.31.5262

    Article  ADS  Google Scholar 

  8. S. Munetoh, T. Motooka, K. Moriguchi, and A. Shintani, Comp. Mater. Sci. 39, 334 (2007). https://doi.org/10.1016/j.commatsci.2006.06.010

    Article  Google Scholar 

  9. G. Molière, Z. Naturforsch., A: Phys. Sci. 2, 133 (1947). https://doi.org/10.1515/zna-1947-0302

    Article  Google Scholar 

  10. M. C. Moore, N. Kalyanasundaram, J. B. Freund, and H. T. Johnson, Nucl. Instrum. Meth. Phys. Res., Sect. B 225, 241 (2004). https://doi.org/10.1016/j.nimb.2004.04.175

    Article  Google Scholar 

  11. M. Timonova, B.-J. Lee, and B. J. Thijsse, Nucl. Instrum. Meth. Phys. Res., Sect. B 225, 195 (2007). https://doi.org/10.1016/j.nimb.2006.11.023

    Article  Google Scholar 

  12. S. Plimpton, J. Comp. Phys. 117, 1 (1995). https://doi.org/10.1006/jcph.1995.1039

    Article  ADS  Google Scholar 

Download references

Funding

This work was supported by the Russian Science Foundation, project no. 16-12-10361P.

Author information

Authors and Affiliations

  1. Skobeltsyn Nuclear Physics Institute, Moscow State University, 119991, Moscow, Russia

    A. A. Sycheva & E. N. Voronina

  2. Moscow State University, 119991, Moscow, Russia

    E. N. Voronina

Authors
  1. A. A. Sycheva
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. N. Voronina
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. A. Sycheva.

Ethics declarations

The authors declare that they have no conflict of interest.

Additional information

Translated by A. Nikol’skii

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Sycheva, A., Voronina, E. Features of Low-Energy He and Ar Ion Irradiation of Nanoporous Si/SiO2-Based Materials. Tech. Phys. Lett. 46, 532–535 (2020). https://doi.org/10.1134/S1063785020060140

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785020060140

Keywords:

Search

Navigation