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Thermodynamic Modeling and Experimental Study on Interaction of Fe to P in Silicon Solution

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Abstract

The studies on the thermodynamics of P in silicon solution are significant for phosphorus removal in silicon purification technology. The activity interaction coefficient of Fe to P (\( \varepsilon_{\text{P}}^{\text{Fe}} \)) in a ternary system of Si-P-Fe at temperatures of 1623 K, 1673 K, and 1693 K was determined experimentally by the same activity method. The dissolution of P and Fe in the ternary Si-P-Fe alloy solution was investigated, and the possible phases in Si-P-Fe alloy were identified. Meanwhile, the activities of P and Fe (aFe and aP) and the activity interaction coefficient \( \varepsilon_{\text{P}}^{\text{Fe}} \) in Si solution at 1693 K to 1873 K were calculated by a molecular interaction volume model (MIVM). The relationship between the activity interaction coefficient and temperature was achieved. The experimental results demonstrate that the presence of Fe in Si solution can improve the solubility of phosphorous, which is consistent with the calculation results by MIVM. In theory, it is beneficial for the removal of P from silicon by reducing the Fe concentration in Si.

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Acknowledgments

This study was funded by the Natural Science Foundation of China (21563017 and 51574133), the major R&D project of Yunnan of China (2019ZE00701) and the Natural Science Foundation of Yunnan Province in China (2016FA022).

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The raw/processed data required to reproduce these findings cannot be shared at this time because of technical or time limitations.

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Correspondence to Jijun Wu or Wenhui Ma.

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Manuscript submitted March 21, 2020

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Yang, F., Wu, J. & Ma, W. Thermodynamic Modeling and Experimental Study on Interaction of Fe to P in Silicon Solution. Metall Mater Trans B 51, 2381–2390 (2020). https://doi.org/10.1007/s11663-020-01895-9

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