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The Effect of Annealing Temperature on the Plasma Edge in Reflectance Spectra of Al/Al2O3 Composites Synthesized by Thermal Oxidation of Aluminum Thin Films

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Abstract

In this study, the structural and optical properties of aluminum oxide thin films were investigated. Aluminum oxide thin films were prepared on silicon and glass substrate by DC magnetron sputtering of aluminum targets with subsequent thermal oxidation of the aluminum-deposited thin films. Important result obtained included the presence of a plasma edge for the individual aluminum atoms. In addition, the temperatures that resulted in the highest concentration of surface plasmons were determined. On other hand, the relationship between the plasma edge and the optical energy gap was investigated.

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References

  1. Lei D, Yu X, Song L, Gu X, Li G, Yang D (2011) Modulation of atomic-layer-deposited Al2O3 film passivation of silicon surface by rapid thermal processing. Appl Phys Lett 99:5–8

    Article  CAS  Google Scholar 

  2. Boratto MH, Scalvi LVA (2014) Deposition ofAl2O3 by resistive evaporation and thermal oxidation of Al to be applied as a transparent FET insulating layer. Ceram Int 40:3785–3791

    Article  CAS  Google Scholar 

  3. Mohammadi MR (2014) Semiconductor TiO2-Al2O3 thin film gas sensors derived from aqueous particulate sol-gel process. Mater Sci Semicond Process 27:711–718

    Article  CAS  Google Scholar 

  4. Liang Z, Bi Z, Gao K, Fu Y, Guan P, Feng X, Chai Z, Xu G, Xu X (2019) Interface modification via Al 2 O 3 with retarded charge recombinations for mesoscopic perovskite solar cells fabricated with spray deposition process in the air. Appl Surf Sci 463:939–946

    Article  CAS  Google Scholar 

  5. Baek Y, Lim S, Kim LH, Park S, Lee SW, Oh TH, Kim SH, Park CE (2016) Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors. Organic Electronics 28:139–146

    Article  CAS  Google Scholar 

  6. Han YC, Kim E, Kim W, Im HG, Bae BS, Choi KC (2013) A flexible moisture barrier comprised of a SiO2-embedded organic-inorganic hybrid nanocomposite and Al2O3 for thin-film encapsulation of OLEDs. Organic Electronics 14:1435–1440

    Article  CAS  Google Scholar 

  7. Ding X, Zhang J, Zhang H, Ding H, Huang C, Li J, Shi W, Jiang X, Zhang Z (2014) ZrO2 insulator modified by a thin Al2O3 film to enhance the performance of InGaZnO thin-film transistor. Microelectron Reliab 54:2401–2405

    Article  CAS  Google Scholar 

  8. Takhar K, Upadhyay BB, Yadav YK, Ganguly S, Saha D (2019) Al2O3 formed by post plasma oxidation of Al as a gate dielectric for AlGaN/GaN MIS-HEMTs. Appl Surf Sci 481:219–225

    Article  CAS  Google Scholar 

  9. Kayed K (2017) An innovative method for measuring the optical band gap of oxidized surface layer of aluminum tablets based on absorption spectra. IJNeaM 11:71–76

    Google Scholar 

  10. Meza-Arroyo J, Syamala Rao MG, Mejia I, Quevedo-López MA, Ramírez-Bon R (2019) Low temperature processing of Al2O3-GPTMS-PMMA hybrid films with applications to high-performance ZnO thin-film transistors. Appl Surf Sci 467–468:456–461

    Article  CAS  Google Scholar 

  11. Song X, Xu J, Liu L, Lai PT, Tang WM (2019) Improved interfacial and electrical properties of few-layered MoS 2 FETs with plasma-treated Al2O3 as gate dielectric. Appl Surf Sci 481:1028–1034

    Article  CAS  Google Scholar 

  12. Koda Y, Sugita H, Suwa T, Kuroda R, Goto T, Teramoto A, Sugawa S (2016) Low leakage current Al2O3 metal-insulator-metal capacitors formed by atomic layer deposition at optimized process temperature and O2 post deposition annealing. ECS Trans 72:91–100

    Article  CAS  Google Scholar 

  13. Yota J, Shen H, Ramanathan R (2013) Characterization of atomic layer deposition HfO2, Al2O3, and plasma-enhanced chemical vapor deposition Si3N4as metal–insulator–metal capacitor dielectric for GaAs HBT technology. J Vac Sci Technol A 31(1):01A134

    Article  CAS  Google Scholar 

  14. Kwak HY, Kwon HM, Jung YJ, Kwon SK, Jang JH, Il Choi W, Ha ML, Il Lee J, Lee SJ, Lee HD (2013) Characterization of Al2O3-HfO2-Al 2O3 sandwiched MIM capacitor under DC and AC stresses. Solid State Electron 79:218–222

    Article  CAS  Google Scholar 

  15. Gakis GP, Vahlas C, Vergnes H, Dourdain S, Tison Y, Martinez H, Bour J, Ruch D, Boudouvis AG, Caussat B, Scheid E (2019) Investigation of the initial deposition steps and the interfacial layer of atomic layer deposited (ALD) Al2O3 on Si. Appl Surf Sci 492:245–254

    Article  CAS  Google Scholar 

  16. Murray J, Huebner W, O’Keefe MJ, Wilder K, Eatinger R, Kuhn W, Krueger DS, Wolf JA (2011) Sputter deposition of thin film MIM capacitors on LTCC substrates for RF bypass and filtering applications. IMAPS'03 2011:000747–000752

    Google Scholar 

  17. Mao S, Yang H, Huang F, Xie T, Song Z (2011) Corrosion behaviour of sintered NdFeB coated with Al/Al2O3 multilayers by magnetron sputtering. Appl Surf Sci 257:3980–3984

    Article  CAS  Google Scholar 

  18. Ben Rabha M, Salem M, El Khakani MA, Bessais B, Gaidi M (2013) Monocrystalline silicon surface passivation by Al2O3/porous silicon combined treatment. MSEB 178:695–697

    Article  CAS  Google Scholar 

  19. Adamopoulos G, Thomas S, Bradley DDC, McLachlan MA, Anthopoulos TD (2011) Low-voltage ZnO thin-film transistors based on Y2O3 and Al2O3 high-k dielectrics deposited by spray pyrolysis in air. Appl Phys Lett 98:98–101

    Article  CAS  Google Scholar 

  20. Dhonge BP, Mathews T, Sundari ST, Thinaharan C, Kamruddin M, Dash S, Tyagi AK (2011) Spray pyrolytic deposition of transparent aluminum oxide (Al2O3) films. Appl Surf Sci 258:1091–1096.040

    Article  CAS  Google Scholar 

  21. Nayak PK, Hedhili MN, Cha D, Alshareef HN (2013) High performance In2O3 thin film transistors using chemically derived aluminum oxide dielectric. Appl Phys Lett 103:1–5

    Article  CAS  Google Scholar 

  22. Born M, Wolf E (2005) Principles of optics, 6th edn. Cambridge University Press, Cambridge

    Google Scholar 

  23. Perkins JD, Teplin CW, van Hest MFAM, Alleman JL, Li X, Dabney MS, Keyes BM, Gedvilas LM, Ginley DS, Lin Y, Lu Y (2004) Optical analysis of thin film combinatorial libraries. Appl Surf Sci 223:124–132

    Article  CAS  Google Scholar 

  24. Kubelka P, Munk F (1931) Ein beitrag zur optik der farbanstriche. Z Tech Phys 12:593–601

    Google Scholar 

  25. Kubelka P (1948) New contributions to the optics of intensely light-scattering materials. Part I. J Opt Soc Am 38:448–457

    Article  CAS  PubMed  Google Scholar 

  26. Kayed K (2020) The optical properties of individual silver nanoparticles in Ag/Ag2O composites synthesized by oxygen plasma treatment of silver thin films. Plasmonics. https://doi.org/10.1007/s11468-020-01169-9

Download references

Acknowledgments

The authors would like to thank the Syrian Atomic Energy Commission and the University of Damascus for providing the facility to carry out this research. They would also like to thank Dr. B. Abdallah for the assistance during working on the DC magnetron sputtering system.

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Correspondence to Kamal Kayed.

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Kayed, K., Alberni, L. The Effect of Annealing Temperature on the Plasma Edge in Reflectance Spectra of Al/Al2O3 Composites Synthesized by Thermal Oxidation of Aluminum Thin Films. Plasmonics 15, 1959–1966 (2020). https://doi.org/10.1007/s11468-020-01225-4

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  • DOI: https://doi.org/10.1007/s11468-020-01225-4

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