A miniaturized SIW circular cavity resonator for microfluidic sensing applications

https://doi.org/10.1016/j.sna.2020.112183Get rights and content

Highlights

  • A miniaturized SIW circular resonator is proposed which can be used for microfluidic sensing.

  • The cavity resonator is greatly miniaturized with slot loading technology.

  • The measured results show that the proposed sensor can possess high sensitivity and stable performance.

Abstract

This letter presents a miniaturized microfluidic sensor based on substrate integrated waveguide (SIW) cavity resonator. By choosing a circular cavity, a strong electric field is established in the center of the cavity, and the fluidic channel with sample under test is set up in the middle of the cavity for highly sensitive sensing. Several meander slots are loaded on the top of the cavity, which can extend the current flowing path and reduce the resonant frequency, thus the proposed structure is greatly miniaturized compared to the traditional resonators. The corresponding circuit model of the proposed sensor is derived and analyzed. Furthermore, the proposed sensor has been fabricated and tested. The water-ethanol mixture is used for verification. The measured results agree well with the simulated ones, and show that the sensor can distinguish different samples accurately. The resonant sensor works around 2.6 GHz, and shows very good sensitivity for permittivity change with miniaturized structure (0.31 × 0.29 × 0.0069 λ03). The sensor presents high sensitivity and excellent stability in a small size, which provide a novel solution to portable monitoring device.

Introduction

In recent years, microwave sensor systems have attracted tremendous attention [[1], [2], [3]], due to their stable sensing performance and applicability for various environments. The interaction between materials under test (MUT) and electromagnetic waves is used to manufacture various types of microwave sensors [[4], [5], [6], [7], [8]]. Some microwave sensors work with biological and chemical systems, dedicated to characterizing the electromagnetic properties of various materials [[9], [10], [11]]. Different from inspecting materials based on invasive technologies such as cell staining in traditional sensing systems (optical, electrochemical, etc.), microwave sensors allow non- destructive, which makes for the possibility of sample reusing. To this series of requirements, microwave sensors for characterizing microliter or nanoliter of liquid samples have been proposed, which results the concept of microwave microfluidic sensors.

Various types of resonators can be used as classic building blocks for microwave microfluidic sensors [[12], [13], [14], [15], [16]]. Among these topologies, cavity resonators are a most attractive type due to their high quality factor. To reduce the size of conventional waveguide cavity, substrate integrated waveguide (SIW) structures are widely used recently due to its low profile, ease of integration, and simple manufacturing, which providing a new solution for microwave microfluidic sensors [[17], [18], [19]]. However, the cavity resonator is larger in geometry compared with other planar microstrip resonators, which will increase the sample volume required for the sensor characterizing of liquid. The miniaturized structures of the microwave microfluidic sensors can reduce the amount of sample to be used for verification effectively, and facilitates the setting of portable monitoring points. An example of miniaturized SIW for liquid sensing is given in [20], which proposed a rectangular SIW cavity loaded with composite right/left-handed transmission line (CRLH TL).

This letter presents a novel miniaturized SIW circular resonator which can be used for microfluidic sensing. The transmission characteristic of the proposed sensor is influenced by samples introduced in the microfluidic channel. Different with the rectangular or other shaped cavities, circular cavities can help to concentrate the electric field in the center position, which will result a high quality factor (Q factor), and contribute a high sensitivity. Besides, a slot loading technology is employed to miniaturize the cavity, which will reduce the consumed volume of the samples in each test, and also improve the sensitivity. The operating mechanism is analyzed by studying the equivalent circuit model. The analyses of the field distribution shown that the slot loading structure will not change the original mode of the cavity. The manufacture and measurement of the sensor has been completed. The results show that the sensor can possess higher sensitivity than the same type of sensors while miniaturizing. The commercial electromagnetic simulation solver HFSS is used in the design.

Section snippets

Miniaturized SIW sensor

The circular SIW cavity has a more concentrated field distribution and its quality factor is relatively higher compared to SIW cavities with other geometric shapes, thus it is more suitable for sensor designs requiring higher sensitivity. Fig. 1 (a) shows a typical SIW circular cavity model. The surrounding vias are arranged at an appropriate distance to reduce energy leakage, which can be considered as the side wall of a circular waveguide. The top and bottom surfaces are completely metalized

Measurement and results

The proposed miniaturized SIW sensor has been manufactured and tested. Fig. 5 shows the sensor and test bench used to perform the measurements, and bottom of the hole is sealed to be able to inject fluid. Fig. 6 depicts the relevant measurement without any samples, which can be seen that the measured S parameters are basically consistent with the simulated results. Compared to the SIW cavity without slot loading, the resonant frequency of the cavity with slot is decreased from 4.93 GHz to

Conclusion

A miniaturized SIW circular cavity resonator is proposed for microfluidic sensing in this letter. The cavity works in the fundamental mode TM010 with the maximum electric field at the center. Slot-line loading technology is employed to reduce the resonant frequency of the cavity, which can reduce the volume of the liquid samples, and improve the sensitivity. The field distributions and the circuit model are analyzed to discuss the miniaturization mechanism of the SIW cavity. The measured

CRediT authorship contribution statement

Xinyue Song: Methodology, Software, Validation, Formal analysis, Investigation, Data curation, Writing - original draft, Visualization. Sen Yan: Conceptualization, Resources, Writing - review & editing, Supervision, Project administration, Funding acquisition.

Declaration of Competing Interest

The authors declare that there are no conflicts of interest.

Xinyue Song received her B.E. degree in Information and Communication Engineering from Beijing University of Chemical Technology, Beijing, China, in 2018. She is currently working toward the Ph.D. degree in electronic science and technology at Xi’an Jiaotong University (XJTU), Xi’an, China. Her current research interest is microwave-microfluidic devices design and fabrication.

References (30)

  • A. Mason et al.

    A resonant co-planar sensor at microwave frequencies for biomedical applications

    Sens. Actuators A: Phys.

    (2013)
  • S. Yan et al.

    Metamaterial inspired miniaturized SIW resonator for sensor applications

    Sens. Actuators A Phys.

    (2018)
  • H. Hamzah et al.

    Split ring resonator with optimised sensitivity for microfluidic sensing

    Sens. Actuators A Phys.

    (2018)
  • R. Melik et al.

    Metamaterial-based wireless RF-MEMS strain sensors

    Sensors

    (2010)
  • H. Lobato-Morales et al.

    Wireless sensing of complex dielectric permittivity of liquids based on the RFID

    IEEE Trans. Microw. Theory Tech.

    (2014)
  • A. Pourghorban Saghati et al.

    A metamaterial-inspired wideband microwave interferometry sensor for dielectric spectroscopy of liquid chemicals

    IEEE Trans. Microw. Theory Tech.

    (2017)
  • A.K. Horestani et al.

    Two-dimensional displacement and alignment sensor based on reflection coefficients of open microstrip lines loaded with split ring resonators

    Electron. Lett.

    (2014)
  • Z. Xie et al.

    Localised spoof surface plasmon-based sensor for omni-directional cracks detection in metal surfaces

    IET Microw. Antennas Propag.

    (2019)
  • M. Schüßler et al.

    Capacitive Level Monitoring of Layered Fillings in Vessels Using Composite right/left-handed Transmission Lines

    (2011)
  • A. Ebrahimi et al.

    Dual-mode resonator for simultaneous permittivity and thickness measurement of dielectrics

    IEEE Sens. J.

    (2020)
  • C. Mandel et al.

    Passive wireless temperature sensing with BST-based chipless transponder

  • H. Choi

    Design and in vitro interference test of microwave noninvasive blood glucose monitoring sensor

    IEEE Trans. Microw. Theory Tech.

    (2015)
  • H. Tao

    Metamaterials on paper as a sensing platform

    Adv. Mater.

    (2011)
  • K.T.M. Shafi et al.

    Dual band RF sensor for testing of magnetic properties of materials using meandered line SRR

    Sens. Actuators A Phys.

    (2018)
  • X. Bao

    A planar one-port microwave microfluidic sensor for microliter liquids characterization

    IEEE J. Electromagn. RF Microw. Med. Biol.

    (2018)
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    Xinyue Song received her B.E. degree in Information and Communication Engineering from Beijing University of Chemical Technology, Beijing, China, in 2018. She is currently working toward the Ph.D. degree in electronic science and technology at Xi’an Jiaotong University (XJTU), Xi’an, China. Her current research interest is microwave-microfluidic devices design and fabrication.

    Sen Yan received his Bachelor and Master degrees in Information and Communication Engineering from Xi’an Jiaotong University (XJTU), China, in 2007 and 2010, respectively, and the Ph.D. degree in Electrical Engineering from KU Leuven, Belgium in 2015. After that, he continued his research work in the same institute as a post-doctor. From 2016, he worked as a research fellow supported by Research Foundation - Flanders (FWO), Belgium. In February 2016, he worked as a visiting scholar in EPFL, Switzerland. In August and September 2016, he worked as a visiting researcher in the University of Texas at Austin, U.S. From 2017, he joined in Xi’an Jiaotong University, and currently a full professor there. From 2019, he served as the deputy director of the Engineering Training Center, XJTU. Prof. Yan’s current research is focused on metamaterials and metasurfaces, wearable devices and textile antennas, reconfigurable antennas, antenna diversity, and also biosensors. He has been invited to given 8 invited talks in the academic conferences in the recent 3 years, and authored 48 international journal papers and 50 conference contributions. He was successful in achieving the post-doctoral fellowship from KU Leuven and FWO in 2015 and 2016, respectively. In 2017, He obtained “Young Talent Support Plan” of Xi’an Jiaotong University. In 2019, he received the Young Scientist Award of International Union of Radio Science (URSI). He also received the best paper of 2019 Cross Strait Quad-Regional Radio Wireless Conference.

    This project is supported by the National Natural Science Foundation, China No. 61901351.

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