Abstract
MEMS-based piezoelectric vibration energy harvesters found suitable to power wireless sensor nodes, typically in a remote area of operation. In MEMS technology, piezoelectric type vibration energy harvesters are realized using fixed-fixed or fixed-free cantilever structures. These structures are spring mass damper systems that have a fixed resonance frequency which is to be matched with ambient vibration frequency. The low resonance frequency of the cantilever gives better output with the low-frequency mechanical vibrations. Parameters such as width, length and thickness must be critically controlled to achieve low-frequency response during device fabrication. This paper presents the optimized fabrication process for guided two-beam type piezoelectric vibration energy harvester device. The device thickness is critically controlled using tetramethylammonium hydroxide zig during wet bulk micromachining followed by beam thinning process using deep reactive ion etching on the back side of the silicon wafer. A highly c-axis oriented zinc oxide layer of 2.5 µm thickness is sandwiched between aluminum electrodes on the front side of the silicon wafer for harvesting electric potential. The laser Doppler vibrometer test gives the resonance frequency of the fabricated device around 466 Hz which is lowest reported so far for the guided two-beam device. The resonance frequency of the device reported has been reduced by 32.85% than the earlier reported guided two-beam device. The device when vibration shaker tested was found to be operational in the very low-frequency range up to 10 Hz giving a sensitivity of 1.648 mV/m/s2 near resonance frequency.
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References
Aminzahed I, Ghorbanzadeh L, Magana ME (2020) Design and optimization for a piezoelectric frame to harvest energy from structure vibrations. Int J Ambient Energy. https://doi.org/10.1080/01430750.2020.1723693
Chen LH, Xue JT, Chang LQ, Yang FH (2019) Optimization for cantilever piezoelectric energy harvester with a cavity. In: IOP conference series: materials science and engineering, vol 629, no 1. IOP Publishing, p 012027. https://doi.org/10.1088/1757-899X/629/1/012027
Chye W, Dahari Z, Sidek O, Miskam MA (2010) Electromagnetic micro power generator; a comprehensive survey. In: 2010 IEEE symposium on industrial electronics applications (ISIEA), Penang, Malaysia. IEEE, pp 376–382. https://doi.org/10.1109/ISIEA.2010.5679438
Glynne-Jones P, Beeby S, White N (2001) Towards a piezoelectric vibration-powered microgenerator. IEE Proc Sci Meas Technol 148(2):68–72. https://doi.org/10.1049/ip-smt:20010323
Halvorsen E (2008) Energy harvesters driven by broadband random vibrations. J Microelectromech Syst 17(5):1061–1071. https://doi.org/10.1109/JMEMS.2008.928709
Kulah H, Najafi K (2008) Energy scavenging from low-frequency vibrations by using frequency up-conversion for wireless sensor applications. IEEE Sens J 8(3):261–268. https://doi.org/10.1109/JSEN.2008.917125
Liu H, Tay CJ, Quan C, Kobayashi T, Lee C (2011) Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power. J Microelectromech Syst 20(5):1131–1142. https://doi.org/10.1109/JMEMS.2011.2162488
Marzencki M, Defosseux M, Basrour S (2009) MEMS vibration energy harvesting devices with passive resonance frequency adaptation capability. J Microelectromech Syst 18(6):1444–1453. https://doi.org/10.1109/JMEMS.2009.2032784
Mateu L, Moll F (2005) Optimum piezoelectric bending beam structures for energy harvesting using shoe inserts. J Intell Mater Syst Struct 16(10):835–845. https://doi.org/10.1177/1045389X05055280
Prasad M, Sahula V, Khanna VK (2013) Design and fabrication of Sidiaphragm, ZnO piezoelectric film-based MEMS acoustic sensor using SOI wafers. IEEE Trans Semicond Manuf 26(2):233–241. https://doi.org/10.1109/TSM.2013.2238956
Saxena S, Sharma R, Pant BD (2017a) Dynamic characterization of fabricated guided two beam and four beam cantilever type MEMS based piezoelectric energy harvester having pyramidal shape seismic mass. Microsyst Technol 23(12):5947–5958. https://doi.org/10.1007/s00542-017-3455-0
Saxena S, Sharma R, Pant BD (2017b) Design and development of guided four beam cantilever type MEMS based piezoelectric energy harvester. Microsyst Technol 23(6):1751–1759. https://doi.org/10.1007/s00542-016-2940-1
Shahruz SM (2006) Design of mechanical band-pass filters for energy scavenging. J Sound Vib 292:987–998. https://doi.org/10.1177/1077546307083274
Soliman M, El-Saadany EF, Abdel-Rahman EM, Mansour RR (2008) Design and modeling of a wideband MEMS-based energy harvester with experimental verification. In: Microsystems and nanoelectronics research conference, 2008. MNRC 2008, vol 1, pp 193–196. https://doi.org/10.1109/MNRC.2008.4683411
Wang Z, Matova S, Elfrink R, Jambunathan M, de Nooijer C, van Schaijk R, Vullers RJM (2012) A piezoelectric vibration harvester based on clamped-guided beams. In: 2012 IEEE 25th international conference on micro electro mechanical systems (MEMS), pp 1201–1204. https://doi.org/10.1109/MEMSYS.2012.6170379
Yi JW, Shih WY, Shih W-H (2002) Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers. J Appl Phys 91(3):1680–1686. https://doi.org/10.1063/1.1427403
Zhu D, Tudor MJ, Beeby SP (2010) Strategies for increasing the operating frequency range of vibration energy harvesters: a review. Meas Sci Technol 21:022001. https://doi.org/10.1088/0957-0233/21/2/022001
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This work was supported by the Council of Scientific and Industrial Research, India, under Grant 21(1011)/16/EMR-II.
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Saxena, S., Sharma, R. & Pant, B.D. Fabrication process for very-low frequency operation of guided two-beam piezoelectric energy harvester. Microsyst Technol 26, 2479–2486 (2020). https://doi.org/10.1007/s00542-020-04788-8
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DOI: https://doi.org/10.1007/s00542-020-04788-8