Skip to main content
Log in

Growth of Germanium Quantum Dots on Oxidized Silicon Surface

  • Published:
Russian Physics Journal Aims and scope

Epitaxial growth of germanium quantum dots on an oxidized silicon surface is considered. A kinetic model of the nucleation and growth of three-dimensional islands by the Volmer–Weber mechanism in this system is proposed. The dependences of the average size and surface density of quantum dots on the parameters of their synthesis are obtained. The proposed theoretical model can easily be extended to other material systems in which island growth by the Volmer–Weber mechanism is realized.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R. M. H. Douhan, A. P. Kokhanenko, and K. A. Lozovoy, Russ. Phys. J., 61, No. 7, 1194–1201 (2018).

    Article  Google Scholar 

  2. I. I. Izhnin, O. I. Fitsych, A. V. Voitsekhovskii, et al., Opto-Electron. Rev., 26, 195–200 (2018).

    Article  ADS  Google Scholar 

  3. K. A. Lozovoy, A. P. Kokhanenko, and A. V. Voitsekhovskii, Nanotechnology, 29, 054002 (1–7) (2018).

    Google Scholar 

  4. T. David, J.-N. Aqua, K. Liu, et al., Sci. Rep., 8, 2891 (1–10) (2018).

  5. K. Liu, I. Berbezier, L. Favre, et al., Phys. Rev. Mater., 3, 023403 (1–7) (2019).

  6. A. I. Nikiforov, V. V. Ul’yanov, O. P. Pchelyakov, et al., Phys. Solid State, 46, 77–79 (2004).

    Article  ADS  Google Scholar 

  7. N. L. Rowell, D. J. Lockwood, A. Karmous, et al., Superlattices and Microstructures, 44, 305–314 (2008).

    Article  ADS  Google Scholar 

  8. A. A. Shklyaev and M. Ichikava, Phys.-Usp., 51, 133–161 (2008).

  9. K. A. Lozovoy, A. P. Kokhanenko, and A. V. Voitsekhovskii, Phys. Chem. Chem. Phys., 17, No. 44, 30052– 30056 (2015).

    Article  Google Scholar 

  10. V. G. Dubrovskii, G. E. Cirlin, and V. M. Ustinov, Phys. Rev. B, 68, P, 075409 (1–9) (2003).

  11. V. G. Dubrovskii, Nucleation Theory and Growth of Nanostructures, Springer, Berlin (2014).

    Book  Google Scholar 

  12. X. Zhang, V. G. Dubrovskii, N. V. Sibirev, and X. Ren, Crystal Growth & Design., 11, 5441–5448 (2011).

    Article  Google Scholar 

  13. P. Muller and R. Kern, Appl. Surf. Sci., 102, 6–11 (1996).

    Article  ADS  Google Scholar 

  14. S. A. Kukushkin and A. V. Osipov, Phys.-Usp., 41, 983–1014 (1998).

  15. K. A. Lozovoy, A. P. Kokhanenko, and A. V. Voitsekhovskii, Crystal Growth & Design, 15, No. 3, 1055–1059 (2015).

    Article  Google Scholar 

  16. O. P. Pchelyakov, Yu. B. Bolkhovityanov, A. V. Dvurechenskii, et. al., Semiconductors, 34, 1229–1247 (2000).

  17. A. P. Kokhanenko, K. A. Lozovoy, and A. V. Voitsekhovskii, Russ. Phys. J., 60, No. 11, 1871–1879 (2018).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding authors

Correspondence to K. A. Lozovoy, A. P. Kokhanenko, N. Yu. Akimenko, V. V. Dirko or A. V. Voitsekhovskii.

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 2, pp. 104–109, February, 2020.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lozovoy, K.A., Kokhanenko, A.P., Akimenko, N.Y. et al. Growth of Germanium Quantum Dots on Oxidized Silicon Surface. Russ Phys J 63, 296–302 (2020). https://doi.org/10.1007/s11182-020-02035-1

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11182-020-02035-1

Keywords

Navigation