Abstract
Some serious errors exist in the above paper.
References
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Pantokratoras, A. Comment on “Microsystem Technologies, (2018) 24:4945–4953”. Microsyst Technol 27, 337–338 (2021). https://doi.org/10.1007/s00542-020-04919-1
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DOI: https://doi.org/10.1007/s00542-020-04919-1