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Molecular-Dynamics Simulation of the Interaction of Argon Cluster Ions with Titanium Surface

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Abstract

The molecular-dynamics simulation of impacts of accelerated argon cluster ions with titanium surface is carried out. The dependences of the dimensions of the produced defects and of the number of sputtered titanium atoms on the cluster-ion dimensions, energies, and incidence angles are studied.

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Funding

The work was supported by the Ministry of Science and Higher Education of the Russian Federation. Agreement no. 14.579.21.0157. The unique identifier of applied scientific research is RFMEFI57918X0157.

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Authors and Affiliations

  1. State Scientific Center of the Russian Federation, Leypunsky Institute for Physics and Power Engineering, 249033, Obninsk, Russia

    V. V. Sirotkin

  2. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 142432, Chernologovka, Russia

    V. V. Sirotkin

Authors
  1. V. V. Sirotkin
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Correspondence to V. V. Sirotkin.

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Translated by L. Kulman

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Sirotkin, V.V. Molecular-Dynamics Simulation of the Interaction of Argon Cluster Ions with Titanium Surface. J. Surf. Investig. 14, 292–297 (2020). https://doi.org/10.1134/S1027451020020342

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  • DOI: https://doi.org/10.1134/S1027451020020342

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