Abstract
This paper presents a technology computer-aided design analysis of an ultrasensitive black phosphorus junctionless recessed channel MOSFET as a biosensor. A nano cavity gap is embedded in the gate insulator region (for molecules immobilization) due to which gate capacitance changes owing to the accumulation of different molecules which reflects the deviation in threshold voltage. Higher sensitivity (1.7) is achieved for protein at low Vds (0.2 V) in comparison to streptavidin (1.17) and Biotin (1.24). Further, the effect of cavity gap length and oxide thickness variation is also examined. All the results pave the way for early detection techniques of protein-related diseases such as Alzheimer’s diseases, ovarian cancer and coronary artery disease with the existing complementary metal–oxide–semiconductor technology.
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The authors are thankful to Jaypee Institute of Information Technology and Delhi Technological University and for supporting this work.
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Kumar, A., Gupta, N., Tripathi, M.M. et al. Analysis of structural parameters on sensitivity of black phosphorus junctionless recessed channel MOSFET for biosensing application. Microsyst Technol 26, 2227–2233 (2020). https://doi.org/10.1007/s00542-019-04545-6
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DOI: https://doi.org/10.1007/s00542-019-04545-6