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Epitaxy of ZnO Films on the (0001) Surface of Crystalline Substrates of Lanthanum–Magnesium Hexaaluminate LaMgAl11O19

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Abstract

The morphology and structure of heteroepitaxial ZnO films deposited on the (0001) surface of crystalline substrates of lanthanum–magnesium hexaaluminate LaMgAl11O19 by magnetron sputtering have been investigated by electron microscopy, probe microscopy, X-ray diffraction (XRD) analysis, and electron diffraction analysis. It is established that the structure of these ZnO films is more perfect than that of the films on (0001) sapphire substrates (including those containing a buffer aluminum nitride layer).

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Funding

This study was supported by the Ministry of Science and Higher Education of the Russian Federation within the State assignment for the Federal Scientific Research Centre “Crystallography and Photonics” of the Russian Academy of Sciences in the part concerning the film deposition and by the Russian Foundation for Basic Research (project no. 18-29-12099 mk) in the part concerning the diagnostics of epitaxial films. The experiments were carried out using equipment of the Shared Research Center of the Federal Scientific Research Centre “Crystallography and Photonics” of the Russian Academy of Sciences and supported by the Ministry of Science and Higher Education of the Russian Federation (project no. RFMEFI62119X0035).

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,” Russian Academy of Sciences, 119333, Moscow, Russia

    N. A. Arkharova, A. E. Muslimov, A. V. Butashin, A. Sh. Asvarov, V. V. Klechkovskaya & V. M. Kanevsky

  2. Amirkhanov Institute of Physics, Dagestan Scientific Center, Russian Academy of Sciences, 367015, Makhachkala, Russia

    A. Sh. Asvarov

  3. Dagestan State University, 367000, Makhachkala, Russia

    A. M. Ismailov

Authors
  1. N. A. Arkharova
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  2. A. E. Muslimov
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  3. A. V. Butashin
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  4. A. Sh. Asvarov
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  5. A. M. Ismailov
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  6. V. V. Klechkovskaya
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  7. V. M. Kanevsky
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Corresponding author

Correspondence to A. E. Muslimov.

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Translated by Yu. Sin’kov

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Arkharova, N.A., Muslimov, A.E., Butashin, A.V. et al. Epitaxy of ZnO Films on the (0001) Surface of Crystalline Substrates of Lanthanum–Magnesium Hexaaluminate LaMgAl11O19. Crystallogr. Rep. 65, 486–490 (2020). https://doi.org/10.1134/S1063774520030049

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  • DOI: https://doi.org/10.1134/S1063774520030049

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