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Efficient high-pass filtering with practical, high-yield X-ray transmission mirror optics

Published online by Cambridge University Press:  29 April 2020

David N. Agyeman-Budu Open the ORCID record for David N. Agyeman-Budu [Opens in a new window] ,
Joel D. Brock  and
Arthur R. Woll
David N. Agyeman-Budu*
Affiliation:
Cornell High Energy Synchrotron Source, 161 Synchrotron Dr., Ithaca, New York14853, USA
Joel D. Brock
Affiliation:
Cornell High Energy Synchrotron Source, 161 Synchrotron Dr., Ithaca, New York14853, USA School of Applied and Engineering Physics, 271 Clark Hall, Ithaca, New York14853, USA
Arthur R. Woll
Affiliation:
Cornell High Energy Synchrotron Source, 161 Synchrotron Dr., Ithaca, New York14853, USA
*
a)Author to whom correspondence should be addressed. Electronic mail: da76@cornell.edu
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Abstract

Although the concept, first demonstration, and potential applications of X-ray transmission mirrors (XTMs) were initially described over 30 years ago, only a few implementations exist in the literature. This is attributed to the unsolved challenge of a thick frame supporting a thin, reflecting membrane which does not itself block the transmitted beam. Here, we introduce a novel approach to solve this problem by employing silicon microfabrication. A robust XTM frame has been fabricated by using a novel two-step etch process, which secures the thin-film membrane without blocking the transmitted beam. Specifically, we have fabricated delicate XTM optics with 90% yield, which consist of 280-nm-thick low-stress silicon nitride membrane windows that are 1.5 mm wide and 125 mm long on silicon substrates. The XTM optics have been demonstrated to be a more efficient high-pass X-ray filter; for example, when configured for 40% transmission of 11.3 keV photons, we measure the reduction of 8.4 keV photons by a factor of 56.

Keywords

microfabricationhigh-pass X-ray filteringdeep reactive ion etchingX-ray windowssilicon nitride
Type
Proceedings Paper
Information
Powder Diffraction , Volume 35 , Supplement S1 , December 2020 , pp. S3 - S7
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Copyright
Copyright © 2020 International Centre for Diffraction Data

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