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Microstructure characterization of Al2O3–Mullite–AlN multiphase ceramic film on Cr/WCu substrate

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Abstract

The sintering mechanism of multiphase ceramic film—made of alumina, mullite and aluminum nitride—fabricated by water vapor-assisted sintering on Cr/WCu substrate was investigated. The multiphase ceramic film and interfacial reaction layer between ceramic film and Cr/WCu substrate were examined to reveal their microstructure by relevant test methods. The multiphase ceramic was composed of α-Al2O3 and mullite-coated aluminum nitride particles. During metastable stage, metastable alumina and amorphous silica were generated, which originated from AlN and PCS, respectively. A structure containing Al–Si–O glass and metastable alumina-coated AlN particle was formed. With firing temperature increasing to 1050 °C, Al–Si–O glass crystallized and generated crystal mullite. Meanwhile, α-Al2O3 was formed from metastable alumina. κ-Al2O3 and Al1.98Cr0.02O3 phases were observed in the interfacial reaction layer by high-resolution transmission electron microscopy. It revealed that the distances of (002) facet for κ-Al2O3 and (104) facet for Al1.98Cr0.02O3 were 0.447 nm and 0.255 nm, respectively. During water vapor-assisted sintering, κ-Al2O3 and Cr2O3 were generated, which were derived from AlN and Cr, respectively. When the sintering temperature was increased to 1050 °C, κ-Al2O3 and Cr2O3 would react with each other and generate Al1.98Cr0.02O3 phase. The Al1.98Cr0.02O3 phase was of great help to improving adhesion strength of multiphase ceramic film on Cr/WCu substrate.

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Acknowledgements

This work was supported by National Natural Science Foundation of China, under Grant 51374084, and sponsored by grants from open subject that was supported by State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Jiao Tong University, China (2019GZKF03010).

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Authors and Affiliations

  1. State Key Laboratory On Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China

    Jiandong Zhu & Jianguo Liu

  2. State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, China

    Zhen Zheng & Chunqing Wang

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  1. Jiandong Zhu
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  2. Zhen Zheng
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  3. Chunqing Wang
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  4. Jianguo Liu
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Correspondence to Chunqing Wang or Jianguo Liu.

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Zhu, J., Zheng, Z., Wang, C. et al. Microstructure characterization of Al2O3–Mullite–AlN multiphase ceramic film on Cr/WCu substrate. J Mater Sci: Mater Electron 31, 5941–5947 (2020). https://doi.org/10.1007/s10854-020-03162-8

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  • DOI: https://doi.org/10.1007/s10854-020-03162-8

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