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Electrochemical Local Maskless Micro/Nanoscale Deposition, Dissolution, and Oxidation of Metals and Semiconductors (A Review)

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Abstract

The review is devoted to the modern methods of local maskless electrochemical machining of metals and semiconductors with the aim of formation of individual islands or cavities, their groups, and patterns according to a given program on their surface, or 3D micro/nanostructures, for example, metal threads and various thread structures. For this purpose, various methods of localizing the electrochemical deposition, dissolution, or oxidation are used.

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The work was performed with support of Ministry of Science and Higher Education of Russian Federation.

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  1. Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences, 119071, Moscow, Russia

    A. D. Davydov & V. M. Volgin

  2. Tula State University, 300012, Tula, Russia

    V. M. Volgin

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Davydov, A.D., Volgin, V.M. Electrochemical Local Maskless Micro/Nanoscale Deposition, Dissolution, and Oxidation of Metals and Semiconductors (A Review). Russ J Electrochem 56, 52–81 (2020). https://doi.org/10.1134/S1023193520010036

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