A method is proposed for determining the optical characteristics of glass plates after physicochemical surface treatment by measuring spectra of ellipsometric angles at incidence angles equal to Brewster’s angle. The dispersion dependence of the refractive index could be determined and the surface layer thickness during the plate manufacturing process could be estimated using the coordinates of the ellipsometric-angle spectral minima. Refractive-index spectra calculated by the Brewster formula for KU-1 optical quartz plates in the non-absorbing region were in satisfactory agreement with spectra determined by numerical methods in the DeltaPsi2 software of a UVISEL 2 spectral ellipsometer (Horiba). The relative error of a refractive-index determination of the quartz plates by the proposed method was ≤0.1%.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
R. Swanepoel, J. Phys. E: Sci. Instrum., 16, No. 12, 1214–1222 (1983).
D. A. Minkov, G. M. Gavrilov, E. Marquez, and S. M. Fernandez, 2016 XXV International Scientifi c Conference Electronics (ET), September 12–14, 2016, Sozopol, Bulgaria (2016), pp. 1–4.
A. Penzkofer, E. Drotleff, and W. Holzer, Opt. Commun., 158, 221–230 (1998).
A. B. Sotskii, K. N. Krivetskii, S. O. Parashkov, and L. I. Sotskaya, Zh. Prikl. Spektrosk., 83, No. 5, 809–817 (2016) [A. B. Sotsky, K. N. Krivetskii, S. O. Parashkov, and L. I. Sotskaya, J. Appl. Spectrosc., 83, 845–853 (2016)].
V. I. Pshenitsyn, M. I. Abaev, and N. Yu. Lyzlov, Ellipsometry in Physicochemical Research [in Russian], Khimiya, Moscow (1986), p. 71.
V. G. Zhupanov, F. V. Grigor’ev, V. B. Sulimov, and A. V. Tikhonravov, Vestn. Mosk. Univ., Ser. 3: Fiz. Astron., No. 6, 64–67 (2017).
M. R. Nenkov and T. G. Pencheva, Eur. Phys. J.: Appl. Phys., 42, No. 3, 219–228 (2008).
R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam (1977), 529 pp.
H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry, William Andrew, Inc., Springer, New York, Norwich (2005).
K. Ogusu, K. Suzuki, and H. Nishio, Opt. Lett., 31, No. 7, 909–911 (2006).
E. D. Palik, Handbook of Optical Constants of Solids, Academic Press (1988).
Horiba Scientifi c; http://nytek.ru/upload/iblock/556/faq-spektralnaya-ellipsometriya-_-obshchie-voprosy.pdf (accessed Apr. 24, 2019).
GOST 15130-86. Optical quartz glass, INK Izd. Standartov, Moscow (1991), p. 30.
Quartz glass for optics production, OOO Tydex; http://www.tydexoptics.com/pdf/Fused_Silica_ru.pdf (accessed Apr. 24, 2019).
I. H. Malitson, J. Opt. Soc. Am., 55, No. 10, 1205–1209 (1965).
R. Kitamura, L. Pilon, and M. Jonasz, Appl. Opt., 46, No. 33, 8118–8133 (2007).
M. M. Gorshkov, Ellipsometry [in Russian], Sovetskoe Radio, Moscow (1974).
J. M. Gonzalez-Leal, R. Prieto-Alcon, J. A. Angel, D. A. Minkov, and E. Marquez, Appl. Opt., 41, No. 34, 7300–7308 (2002).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 87, No. 1, pp. 122–129, January–February, 2020.
Rights and permissions
About this article
Cite this article
Staskov, N.I., Mohammedmuradov, A.A., Krekoten, N.A. et al. Optical Characteristics of Parallel-Sided Quartz Plates at Brewster Angles Determined by Spectral Ellipsometry. J Appl Spectrosc 87, 105–111 (2020). https://doi.org/10.1007/s10812-020-00970-y
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10812-020-00970-y