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Geometric effects of a micromachined ZnO-based microspeaker

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Abstract

This paper reports the performance improvement of micromachined piezoelectric microspeakers that are audible in open air according to the geometrical parameters. The sound pressure level (SPL) of the microspeaker fabricated with a piezoelectric ZnO film is even more enhanced due to the carefully designed process conditions and electrode shapes. The SPL of the fabricated microspeakers, which have a square electrode, shows more than 50 dB from 400 Hz to 20 kHz; the highest SPL is about 94 dB at 9.5 kHz with 5 Vpp sinusoidal input biases and 3 mm distances from the fabricated microspeakers to the reference microphone.

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Authors and Affiliations

  1. Department of Mechanical Eng./RIC-ReSEM, Chungju National University, 72 Daehakro, Chungju, 380-702, Chungbuk, Korea

    SeungHwan Yi & Heechan Cho

  2. Research Center for Convergence Technology, Hoseo University, 165 Sechul-ri Baebang-myeon, Asan-si, 336-795, Chungnam, Korea

    Seungoh Han

Authors
  1. SeungHwan Yi
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  2. Heechan Cho
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  3. Seungoh Han
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Correspondence to Seungoh Han.

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Yi, S., Cho, H. & Han, S. Geometric effects of a micromachined ZnO-based microspeaker. Electron. Mater. Lett. 5, 55–57 (2009). https://doi.org/10.3365/eml.2009.06.055

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  • DOI: https://doi.org/10.3365/eml.2009.06.055

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