Abstract
Sb-doped SnO2 (ATO) thin films were synthesized via the sol–gel dip-coating method on glass substrates. The XPS and XRD spectra showed that Sb atoms were successfully incorporated into the SnO2 lattice and mostly existed in the form of Sb5+ (~ 90%) in 1 at.% ATO thin films annealed in air and further annealed in vacuum. The transmittance spectra revealed that the average transmittance was more than 75% at the wavelength range of 325–700 nm. The average sheet resistancewas 14.05 kΩ/□ in 1 at.% ATO thin films annealing in air and much less than undoped SnO2. The electric property was better when ATO thin films were further annealing vacuum compared to annealing in air. The average sheet resistance and resistivity of 1 at.% ATO thin films were 2.42 kΩ/□ and 0.035 Ω cm, respectively. The PL showed that electrons transition from a shallow level of VO to the minimum level of conduction band (CBM) increased with increasing of Sb3+ ions. The maximum level of valence band (VBM) and CBM level positions were mainly affected by Sb3+ and Sb5+ energy levels after air annealing, respectively. The behavior of surface carrier transport was investigated after further vacuum annealing. The CBM–VBM level position mainly was affected by VO energy level after further vacuum annealing. It was further proved by the Hall carrier concentration and the electrochemical impedance spectroscopy (EIS).
Similar content being viewed by others
References
D.O. Scanlon, G.W. Watson, On the possibility of p-type SnO2. J. Mater. Chem. 22(48), 25236–25245 (2012). https://doi.org/10.1039/c2jm34352e
S. Gürakar, T. Serin, Comprehensive structural analysis and electrical properties of (Cu, Al and In)-doped SnO2 thin films. Mater. Sci. Eng. B (2019). https://doi.org/10.1016/j.mseb.2019.114445
Q. Jiang, L. Zhang, H. Wang, X. Yang, J. Meng, H. Liu, Z. Yin, J. Wu, X. Zhang, J. You, Enhanced electron extraction using SnO2 for high-efficiency planar-structure HC(NH2)2PbI3-based perovskite solar cells. Nat. Energy 2(1), 1–7. https://doi.org/10.1038/nenergy.2016.177
A.S. Hassanien, I. Sharma, Optical properties of quaternary a-Ge15-xSbxSe50Te35 thermally evaporated thin-films: refractive index dispersion and single oscillator parameters. Optik 200, 163415 (2019). https://doi.org/10.1016/j.ijleo.2019.163415
H.Y. Liu, V. Avrutin, N. Izyumskaya, U. Ozgur, H. Morkoc, Transparent conducting oxides for electrode applications in light emitting and absorbing devices. Superlattices Microstruct 48(5), 458–484 (2010). https://doi.org/10.1016/j.spmi.2010.08.011
Y.W. Huang, G.F. Li, J.H. Feng, Q. Zhang, Investigation on structural, electrical and optical properties of tungsten-doped tin oxide thin films. Thin Solid Films 518(8), 1892–1896 (2010). https://doi.org/10.1016/j.tsf.2009.07.119
S.P. Huang, Z.S. Wang, J. Xu, D.X. Lu, T.S. Yuan, Determination of optical constants of functional layer of online Low-E glass based on the Drude theory. Thin Solid Films 516(10), 3179–3183 (2008). https://doi.org/10.1016/j.tsf.2007.08.137
M.E. White, O. Bierwagen, M.Y. Tsai, J.S. Speck, Electron transport properties of antimony doped SnO2 single crystalline thin films grown by plasma-assisted molecular beam epitaxy. J. Appl. Phys. 106(9), 93704 (2009). https://doi.org/10.1063/1.3254241
A. Ammari, B. Bellal, N. Zebbar, B. Benrabah, M. Trari, Thermal-frequency dependence study of the sub-band localized states effect in Sb-doped SnO2 based sol-gel thin films. Thin Solid Films 632, 66–72 (2017). https://doi.org/10.1016/j.tsf.2017.02.060
H. Kimura, T. Fukumura, M. Kawasaki, K. Inaba, T. Hasegawa, H. Koinuma, Rutile-type oxide-diluted magnetic semiconductor: Mn-doped SnO2. Appl. Phys. Lett. 80(1), 94–96 (2002). https://doi.org/10.1063/1.1430856
I. Saadeddin, H.S. Hilal, B. Pecquenard, J. Marcus, A. Mansouri, C. Labrugere, M.A. Subramanian, G. Campet, Simultaneous doping of Zn and Sb in SnO2 ceramics: enhancement of electrical conductivity. Solid State Sci. 8(1), 7–13 (2006). https://doi.org/10.1016/j.solidstatestructures.2005.09.002
J. Montero, J. Herrero, C. Guillen, Preparation of reactively sputtered Sb-doped SnO2 thin films: structural, electrical and optical properties. Sol Energy Mater. Sol. Cells 94(3), 612–616 (2010). https://doi.org/10.1016/j.solmat.2009.12.008
H. Wang, S. Cao, B. Yang, H. Li, M. Wang, X. Hu, K. Sun, Z. Zang, NH4Cl-Modified ZnO for high-performance CsPbIBr2 perovskite solar cells via low-temperature process. Solar RRL (2019). https://doi.org/10.1002/solr.201900363
T. Zhou, Z. Zang, J. Wei, J. Zheng, J. Hao, F. Ling, X. Tang, L. Fang, M. Zhou, Efficient charge carrier separation and excellent visible light photoresponse in Cu2O nanowires. Nano Energy 50, 118–125 (2018). https://doi.org/10.1016/j.nanoen.2018.05.028
A.S. Hassanien, A.A. Akl, X-ray studies: CO2 pulsed laser annealing effects on the crystallographic properties, microstructures and crystal defects of vacuum-deposited nanocrystalline ZnSe thin films. CrystEngComm 20(44), 7120–7129 (2018). https://doi.org/10.1039/c8ce01614c
D.H.O. Machado, J.H.D. da Silva, A. Tabata, L.V.A. Scalvi, Influence of thermal annealing on the properties of evaporated Er-doped SnO2. Mater. Res. Bull. (2019). https://doi.org/10.1016/j.materresbull.2019.110585
A. Salehi, F.E. Ghodsi, J. Mazloom, S. Ebrahimi-Koodehi, Tuning of optical bandgap, conductivity parameters, and PL emissions of SnO2: Ni thin films under Ar, N2, and O2 annealing. Appl. Phys. A 124(10), 661 (2018). https://doi.org/10.1007/s00339-018-2087-2
S. Das, V. Jayaraman, SnO2: a comprehensive review on structures and gas sensors. Prog. Mater. Sci. 66, 112–255 (2014). https://doi.org/10.1016/j.pmatsci.2014.06.003
M.M. Bagheri-Mohagheghi, M. Shokooh-Saremi, The influence of Al doping on the electrical, optical and structural properties of SnO2 transparent conducting films deposited by the spray pyrolysis technique. J. Phys. D 37(8), 1248–1253 (2004). https://doi.org/10.1088/0022-3727/37/8/014
L.K. Wang, J.Y. Yu, X.Y. Niu, L. Wang, C. Fu, R.M. Qiu, W.J. Yan, H.L. Zhao, J.K. Yang, Effect of F and Nb co-doping on structural, electrical and optical properties of spray deposited tin oxide thin films. Thin Solid Films 649(10), 147–153 (2018). https://doi.org/10.1016/j.tsf.2018.01.035
J.M.D. Coey, A.P. Douvalis, C.B. Fitzgerald, M. Venkatesan, https://doi.org/10.1063/1.1650041
F. Xue, K. Li, J. Liu, Effect of Fe and N co-doping on structural, electrical and optical properties of tin oxide thin films. Mater. Lett. 236(24), 366–369 (2019). https://doi.org/10.1016/j.matlet.2018.10.070
W.F. Mao, B.Y. Xiong, Q.C. Li, Y.W. Zhou, C.S. Yin, Y. Liu, C.Q. He, Influences of defects and Sb valence states on the temperature dependent conductivity of Sb doped SnO2 thin films. Phys. Lett. A 379(36), 1946–1950 (2015). https://doi.org/10.1016/j.physleta.2015.06.033
M. Esro, S. Georgakopoulos, H. Lu, G. Vourlias, A. Krier, W.I. Milne, W.P. Gillin, G. Adamopoulos, Solution processed SnO2: Sb transparent conductive oxide as an alternative to indium tin oxide for applications in organic light emitting diodes. J. Mater. Chem. C 4(16), 3563–3570 (2016). https://doi.org/10.1039/c5tc04117a
S.D. Ponja, B.A.D. Williamson, S. Sathasivam, D.O. Scanlon, I.P. Parkin, C.J. Carmalt, Enhanced electrical properties of antimony doped tin oxide thin films deposited via aerosol assisted chemical vapour deposition. J. Mater. Chem. C 6(27), 7257–7266 (2018). https://doi.org/10.1039/c8tc01929k
Y. Porte, R. Maller, H. Faber, H.N. AlShareef, T.D. Anthopoulos, M.A. McLachlan, Exploring and controlling intrinsic defect formation in SnO2 thin films. J. Mater. Chem. C 4(4), 758–765 (2016). https://doi.org/10.1039/c5tc03520a
S. Caravati, M. Bernasconi, T.D. Kuhne, M. Krack, M. Parrinello, First-principles study of crystalline and amorphous Ge2Sb2Te5 and the effects of stoichiometric defects. J. Phys. 21(25), 255501 (2009). https://doi.org/10.1088/0953-8984/21/25/255501
S. Chen, X. Zhao, H. Xie, J. Liu, L. Duan, X. Ba, J. Zhao, Photoluminescence of undoped and Ce-doped SnO2 thin films deposited by sol–gel-dip-coating method. Appl. Surf. Sci. 258(7), 3255–3259 (2012). https://doi.org/10.1016/j.apsusc.2011.11.077
H. Shen, X. Zhao, L. Duan, R. Liu, H. Wu, T. Hou, X. Jiang, H. Gao, Influence of interface combination of RGO-photosensitized SnO2@RGO core-shell structures on their photocatalytic performance. Appl. Surf. Sci. 391, 627–634 (2017). https://doi.org/10.1016/j.apsusc.2016.06.031
H. Shen, X. Zhao, L. Duan, R. Liu, H. Li, Enhanced visible light photocatalytic activity in SnO2@g–C3N4 core–shell structures. Mater. Sci. Eng. B 218, 23–30 (2017). https://doi.org/10.1016/j.mseb.2017.01.006
L. Znaidi, Sol-gel-deposited ZnO thin films: a review. Mater. Sci. Eng. B 174(1–3), 18–30 (2010). https://doi.org/10.1016/j.mseb.2010.07.001
H. Shen, X.R. Zhao, L.B. Duan, R.D. Liu, H. Li, B.H. Wang, Effect of NaZn/Nai ratio on structural, optical, and electrical properties of Na-doped ZnO thin films. J. Appl. Phys. 121(15), 155303 (2017). https://doi.org/10.1063/1.4980172
L.B. Duan, X.R. Zhao, J.M. Liu, W.C. Geng, H.N. Sun, H.Y. Xie, Effect of annealing atmosphere on structural, optical and electrical properties of Al-doped Zn1−xCdxO thin films. J. Sol-Gel Sci. Technol. 62(3), 344–350 (2012). https://doi.org/10.1007/s10971-012-2731-9
G. Singla, K. Singh, O.P. Pandey, Williamson-Hall study on synthesized nanocrystalline tungsten carbide (WC). Appl. Phys. A 113(1), 237–242 (2013). https://doi.org/10.1007/s00339-012-7531-0
T. Krishnakumar, R. Jayaprakash, N. Pinna, A.R. Phani, M. Passacantando, S. Santucci, Structural, optical and electrical characterization of antimony-substituted tin oxide nanoparticles. J. Phys. Chem. Solids 70(6), 993–999 (2009). https://doi.org/10.1016/j.jpcs.2009.05.013
J. Rockenberger, U. zum Felde, M. Tischer, L. Troger, M. Haase, H. Weller, Near edge X-ray absorption fine structure measurements (XANES) and extended X-ray absorption fine structure measurements (EXAFS) of the valence state and coordination of antimony in doped nanocrystalline SnO2. J. Chem. Phys. 112(9), 4296–4304 (2000). https://doi.org/10.1063/1.480975
J. Tong, Y. Liu, Q. Peng, W. Hu, Q. Wu, An efficient Sb–SnO2-supported IrO2 electrocatalyst for the oxygen evolution reaction in acidic medium. J. Mater. Sci. 52(23), 13427–13443 (2017). https://doi.org/10.1007/s10853-017-1447-1
A.R. Babar, S.S. Shinde, A.V. Moholkar, C.H. Bhosale, J.H. Kim, K.Y. Rajpure, Structural and optoelectronic properties of antimony incorporated tin oxide thin films. J. Alloy Compd. 505(2), 416–422 (2010). https://doi.org/10.1016/j.jallcom.2010.06.091
I.M. Costa, Y.N. Colmenares, P.S. Pizani, E.R. Leite, A.J. Chiquito, Sb doping of VLS synthesized SnO2 nanowires probed by Raman and XPS spectroscopy. Chem. Phys. Lett. 695, 125–130 (2018). https://doi.org/10.1016/j.cplett.2018.02.014
D. Shuttleworth, Preparation of metal-polymer dispersions by plasma techniques-an esca investigation. J. Phys. Chem. 84(12), 1629–1634 (1980). https://doi.org/10.1021/j100449a038
A. Chen, K.G. Zhu, H.C. Zhong, Q.Y. Shao, G.L. Ge, A new investigation of oxygen flow influence on ITO thin films by magnetron sputtering. Sol Energy Mater. Sol Cells 120, 157–162 (2014). https://doi.org/10.1016/j.solmat.2013.08.036
J.M. Wu, A room temperature ethanol sensor made from p-type Sb-doped SnO2 nanowires. Nanotechnology 21(23), 235501 (2010). https://doi.org/10.1088/0957-4484/21/23/235501
R. Nasser, H. Elhouichet, Production of acceptor complexes in sol–gel ZnO thin films by Sb doping. J. Lumin. 196, 11–19 (2018). https://doi.org/10.1016/j.jlumin.2017.11.060
A.A. Yadav, S.C. Pawar, D.H. Patil, M.D. Ghogare, Properties of (200) oriented, highly conductive SnO2 thin films by chemical spray pyrolysis from non-aqueous medium: Effect of antimony doping. J. Alloy Compd. 652, 145–152 (2015). https://doi.org/10.1016/j.jallcom.2015.08.197
C. Han, L.B. Duan, X.R. Zhao, Z.M. Hu, Y.F. Niu, W.C. Geng, Effect of Fe doping on structural and optical properties of ZnO films and nanorods. J. Alloy Compd. 770, 854–863 (2019). https://doi.org/10.1016/j.jallcom.2018.08.217
T.W. Kim, D.U. Lee, Y.S. Yoon, Microstructural, electrical, and optical properties of SnO2 nanocrystalline thin films grown on InP (100) substrates for applications as gas sensor devices. J. Appl. Phys. 88(6), 3759–3761 (2000). https://doi.org/10.1063/1.1288021
D. Calestani, L. Lazzarini, G. Salviati, M. Zha, Morphological, structural and optical study of quasi-1D SnO2 nanowires and nanobelts. Cryst. Res. Technol. 40(10–11), 937–941 (2005). https://doi.org/10.1002/crat.200410463
S. Rani, S.C. Roy, N. Karar, M.C. Bhatnagar, Structure, microstructure and photoluminescence properties of Fe doped SnO2 thin films. Solid State Commun. 141(4), 214–218 (2007). https://doi.org/10.1016/j.ssc.2006.10.036
A.S. Hassanien, I. Sharma, Band-gap engineering, conduction and valence band positions of thermally evaporated amorphous Ge15-xSbxSe50Te35 thin films: Influences of Sb upon some optical characterizations and physical parameters. J. Alloy Compd. 798, 750–763 (2019). https://doi.org/10.1016/j.jallcom.2019.05.252
A.S. Hassanien, A.A. Akl, Influence of thermal and compositional variations on conduction mechanisms and localized state density of amorphous Cd50S50−xSex thin films. J. Non-Cryst. Solids 487, 28–36 (2018). https://doi.org/10.1016/j.jnoncrysol.2018.02.018
J. Tauc, R. Grigorovici, A. Vancu, Optical properties and electronic structure of amorphous germanium. Physica Status Solidi 15(2), 627 (1966). https://doi.org/10.1002/pssb.19660150224
L.B. Duan, X.R. Zhao, J.M. Liu, W.C. Geng, H.Y. Xie, H.N. Sun, Effect of annealing ambient on the structural, optical and electrical properties of (Mg, Al)-codoped ZnO thin films. Phys Scr 85(3), 035709 (2012). https://doi.org/10.1088/0031-8949/85/03/035709
K.H. Kim, S.W. Lee, D.W. Shin, C.G. Park, Effect of antimony addition on electrical and optical-properties of tin oxide film. J. Am. Ceram. Soc. 77(4), 915–921 (1994). https://doi.org/10.1111/j.1151-2916.1994.tb07247.x
S. Gupta, B.C. Yadav, P.K. Dwivedi, B. Das, Microstructural, optical and electrical investigations of Sb-SnO2 thin films deposited by spray pyrolysis. Mater. Res. Bull. 48(9), 3315–3322 (2013). https://doi.org/10.1016/j.materresbull.2013.05.001
B. Nasr, S. Dasgupta, D. Wang, N. Mechau, R. Kruk, H. Hahn, Electrical resistivity of nanocrystalline Al-doped zinc oxide films as a function of Al content and the degree of its segregation at the grain boundaries. J. Appl. Phys. 108(10), 103721 (2010). https://doi.org/10.1063/1.3511346
L. Nulhakim, H. Makino, Change of scattering mechanism and annealing out of defects on Ga-doped ZnO films deposited by radio-frequency magnetron sputtering. J. Appl. Phys. 119(23), 235302 (2016). https://doi.org/10.1063/1.4954001
M. Cao, Y. Li, J. Yang, Y. Chen, Study for double-layered AZO/ATO transparent conducting thin film. J. Phys. 419, 012022 (2013). https://doi.org/10.1088/1742-6596/419/1/012022
P. Ouyang, H. Zhang, Y. Wang, W. Chen, Z. Li, Electrochemical & microstructural investigations of magnetron sputtered nanostructured ATO thin films for application in Li-ion battery. Electrochim Acta 130, 232–238 (2014). https://doi.org/10.1016/j.electacta.2014.03.021
S. Ebrahimi-Koodehi, F.E. Ghodsi, J. Mazloom, Optical, electrical, and electrochemical behavior of p-type nanostructured SnO2:Ni (NTO) thin films. J. Solid State Electrochem. 22(8), 2375–2384 (2018). https://doi.org/10.1007/s10008-018-3951-x
V. Fauzia, M.N. Yusnidar, L.H. Lalasari, A. Subhan, A.A. Umar, High figure of merit transparent conducting Sb-doped SnO2 thin films prepared via ultrasonic spray pyrolysis. J. Alloy Compd. 720, 79–85 (2017). https://doi.org/10.1016/j.jallcom.2017.05.243
A.R. Babar, K.Y. Rajpure, Effect of intermittent time on structural, optoelectronic, luminescence properties of sprayed antimony doped tin oxide thin films. J. Anal. Appl. Pyrol. 112, 214–220 (2015). https://doi.org/10.1016/j.jaap.2015.01.024
A. Ammari, M. Trari, Electronic states in tin oxide thin films upon photo and electrochemical analysis. Colloids Surf. A 561, 178–186 (2019). https://doi.org/10.1016/j.colsurfa.2018.10.070
C. Kilic, A. Zunger, Origins of coexistence of conductivity and transparency in SnO2. Phys. Rev. Lett. 88(9), 095501 (2002). https://doi.org/10.1103/PhysRevLett.88.095501
Acknowledgements
This work is financially supported by the National Natural Science Foundation of China (Grant Nos. 51302218 and 51472205), the Natural Science Basic Research Plan in Shanxi Province of China (Grant No. 2018JM5039), the Innovative Training Project for Undergraduate Students of China (Grant No. 201810699300), and the Analytical and Testing center of Northwestern Polytechnical University in Xi’an.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Niu, Y., Duan, L., Zhao, X. et al. Effect of Sb doping on structural and photoelectric properties of SnO2 thin films. J Mater Sci: Mater Electron 31, 3289–3302 (2020). https://doi.org/10.1007/s10854-020-02877-y
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-020-02877-y