Presents the table of contents for this issue of the publication.

Presents a listing of the editorial board, board of governors, current staff, committee members, and/or society editors for this issue of the publication.

This letter presents an under-etching prevention method for an aqueous hydrofluoric acid (HF) releasing process by adding a single-side low-pressure chemical vapor deposition (LPCVD) silicon protection layer. The proposed method enables advanced silicon-on-insulator (SOI) based millimeter-wave/terahertz (mmW/THz) MEMS waveguide devices, which require for RF performance a complete metallization film

The letter reports highly sensitive metal oxide (V 2 O 5 ) based NanoElectromechanical Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence of additional supplementary material in the sensing element increases the sensing area and enables the in-situ monitoring capability. Considering the feasibility of the idea, the design is simulated and verified with the experimental

This paper proposes an analytic model of a resonant MEMS mirror with electrostatic actuation based on a Fourier series approximation for both the comb drive torque and the input waveform and verifies the model by measurements using rectangular input waveforms with various duty cycles. The analytic model is derived by the perturbation method, results in slow flow evolution in amplitude and phase with

In this work, the effects of physical dimensions such as length, width and thickness as well as the mode of vibration and the number of anchors on the performance of longitudinal thin film piezoelectric on silicon (TPoS) MEMS resonators have been studied. TPoS resonators, designed for a resonant frequency of around 1 GHz, were fabricated with a 4 mask CMOS compatible process. A $225~\mu \text{m}$ wide

Microalgae concentrations have been studied as an important factor to reflect water qualities. High concentration of microalgae should cause water eutrophication then cause environment pollution. However, conventional methods to monitor algal concentration in source water whose use is hampered by high-cost, complicated operation and the need of a centralized laboratory for practical samples’ analysis

Metal microelectromechanical systems (MEMS) provide attractive properties such as high reflectivity and high conductivity. They are typically processed using an organic sacrificial layer that is removed by an oxygen ash. This enables low-temperature processing but presents other problems. For example, ashing is not applicable to metals that are susceptible to oxidation. However, if an inorganic sacrificial

This paper reports a novel micro electromagnetic actuator serving as the distal rotary scanner of an endoscopic probe developed for side-viewing luminal tissue screening and analysis enabled through different endoscopic modalities. The micro rotary optical scanner, for the first time, offers stepwise, low-speed, and high-speed rotational motions to be compatible with endoscopic optical coherence tomography

A continuously recording, impedimetric thermal liquid flow sensor fabricated on a Parylene C thin film substrate is presented for the first time. The sensing concept, inspired by hot-film anemometry, includes an additional upstream unheated reference electrode pair which enabled attenuation of environmental drift in impedance by more than $5\times $ . This sensor design and transduction approach was

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The IEEE Electron Devices Society invites the submission of nominations for the EDS Education Award. This award is presented annually by EDS to honor an individual who has made distinguished contributions to education within the field of interest of the Electron Devices Society. The recipient is awarded a plaque and a check for US$2,500, presented at the IEEE International Electron Devices Meeting

This paper reports a precision mode-localized accelerometer operating in a higher-order flexural mode. The accelerometer consists of two symmetric resonators coupled by a central rigid coupler to generate an ultra-weak coupling factor. A reduced noise floor is observed when the resonators operate in the higher-order flexural mode compared to the basic lower-order mode. The mode-localized accelerometer

Portable inhalers are used for delivering drugs to the lung in the form of aerosols and form the standard treatment for diseases such as Asthma, COPD, and cystic fibrosis. However, for aqueous drug formulations, spray nozzle chips have so far been restricted to cleanroom manufacture due to their small feature sizes. Here we present a spring-actuated 3D-printed swirl nozzle that sprays an aqueous drug

This paper presents a systematic approach to transduction optimization of resonant piezo-based MEMS devices. The method is based on inverse design approach using direct piezoelectric effect and exploits mechanical action of desired mode to calculate the polarization map of the piezoelectric ceramics. Optimal transduction is achieved by matching the excited electric field distribution to the inversely

This paper presents a linear electrochemomechanical model for microscale ionic actuators. A frequency-domain approach is used to facilitate model interpretation, simplify model application, and accelerate the generation of actuator-specific models. A system comprising a micro PEDOT:PSS/PEO actuator with external loading at its tip was modeled to incorporate the mass loading effect using the proposed

This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up to $500~\mu \text{m}$ -deep vias. Full conformality of Al

Slow Z-axis dynamics of Scanning Tunneling Microscope (STM) is a key contributing factor to the slow scan speed of this instrument. A great majority of STM systems use piezotube nanopositioners for scanning. The piezotube bulkiness along with the mass of STM tip assembly restrict the overall Z-axis bandwidth of the system to about 1 $kHz$ . This limited bandwidth slows down the STM response to the

This work presents a long-term characterization of a newly designed microelectromechanical-system (MEMS) micromirror capable of achieving a field-of-view (FOV) of almost 94°. The process used to fabricate the device allows to combine piezoelectric (PZT) actuation and piezoresistive (PZR) sensing of the tilt angle, enabling testing under closed loop control. Consistently with the adopted design guidelines

Scandium-alloyed aluminum nitride (AlScN) is a potential material for micro-electromechanical systems because of its unique advantages, such as strong piezoelectric effect and high thermal stability. However, issues related to its stability and interaction with other materials in multilayer systems require investigation. The formation of new phases at the interface between piezomaterial and electrode

In this paper, electret based vibration energy harvesters are designed and fabricated with perforated electrode based on MEMS technology. Through-holes are distributed on the fixed electrode in the device to optimize the energy harvesting process. The effect of the holes on the output power of the device are analyzed and discussed both in the finite element method (FEM) simulation and the experiments

A design of electric split-ring metamaterial (eSRM) with tunable terahertz (THz) free spectra range (FSR) characteristic is presented. The proposed eSRM is composed of double semicircle-shaped ring resonators with two connected metallic bars. By changing the radius of the semicircle-shaped ring resonators, the tuning ranges of FSR are 0.187 THz and 0.024 THz in transverse electric (TE) and transverse

Photonic Integrated Circuits (PICs) benefit from the technology advances in the semiconductor industry to incorporate an ever-increasing number of photonic components on a single chip to create large-scale photonic integrated circuits. We here present a broadband, compact and low-loss Silicon Photonic MEMS switch based on a Single-Pole Double-Throw (SPDT) architecture, where curved electrostatic actuators

In the above article [1] , two authors, Christopher P. Cameron and Gabrielle D. Vukasin, were mistakenly omitted from the byline. The correct byline should read:

In the above article [1] , the content of this article remains untouched. Only Table III is rectified. The stiffness of the proposed MOEMS accelerometer listed in Table III should be half of that value, which is 0.56 N/m.

Micro-robotics is a burgeoning field, with potential applications in search and rescue, smart dust, advanced additive manufacturing and micro-surgery. A critical component enabling micro-robotic systems is efficient actuator materials. In this work we introduce thin films of NdNiO 3 , a prototypical perovskite nickelate, as a potential material for MEMS actuation, providing up to 6.0% tensile volumetric

Grayscale mask creation has for the most part been restricted to over-simplified optical and resist models usually based on a contrast curve approach. While this technique has proven to work for microstructures of large dimensions (ten to hundreds of micrometers), its capability has not been assessed for microstructures with smaller dimensions. In this paper, a rigorous lithographic model has been

Inspired by the human cochlea, we propose a directional sound sensor using a resonator array to overcome the limitations of existing directional microphones. The proposed sensor consists of multiple cantilevers that respond to different resonance frequencies and separately acquire signals to then combine them for sound sensing. The directionality of the cantilevers is bipolar (figure-of-8) because

In this paper, we propose a non-contact ultrasonic liquid flowmeter based on AlN piezoelectric micromachined ultrasonic transducer (PMUT) arrays. Two 10 by 10 PMUT arrays with resonant frequency of 980 kHz in air are mounted outside of a pipe to measure liquid flow without contacting the liquid. An acoustic matching layer is designed to mitigate the loss of sound waves caused by sound reflection. Under

This paper reports a frequency trimming method for a resonator used in a quad-mass gyroscopes (QMG) by focused ion beam (FIB) etching. The effects of the suspension stiffness, coupling stiffness and mass perturbations on the anti-phase mode resonant frequency were studied theoretically and numerically, proving the effectiveness and merit of the suspension stiffness trimming. The asymmetry caused by

Parameter extraction during the final test of MEMS sensors poses a highly time-critical challenge. The progressing miniaturization, test stimuli and structural complexity lead to nonlinear couplings and inhomogeneity in system differential equations, which cannot be linearized and are therefore dependent on either slow numerical solution methods or machine learning algorithms requiring many labeled

Recently we presented a parametric resonator which is constructed from a double-sided comb-drive transducer with an electrostatically floating rotor. That device had a natural frequency of ~2.3 kHz. In the present study we present a parametric resonator of the same type, but with a natural frequency of ~30 kHz, and a more compact design. The higher frequency is relevant for several applications, and

This work provides an analytical non-linear model for the capacitive transduction in MEMS transducers with perforated counter-electrodes, especially applicable to capacitive MEMS microphones. Starting from an electrostatic description of a perforated unit cell of the transducer, analytical formulations of the variable capacitance and electrostatic forces are derived, accounting for the deflection profile

This work presents the development of a novel process flow for the fabrication of Lithium niobate Lamb wave resonator that allows full control of the shape and size of the released area (undercut) necessary for stabilizing quality factor. We then investigate the influence of the inactive regions of the resonator (i.e. undercut, anchor, bus and gap) on $Q$ ; and determine the optimum dimensions for

A piezoelectric disk gyroscope fabricated with a single-crystal lithium niobate (LN) wafer has been developed for inertial navigation systems for localization during automated driving. LN has a high electromechanical coupling coefficient and a resonator made of a low-cost single-crystal wafer shows a high quality factor, which is suitable for high-performance vibratory gyroscopes. In this study, its

In this letter we present the first demonstration of an ultra-thin (100 nm) lithium niobate (LN) flexural resonator for airborne ultrasound transduction. Due to the aggressively scaled thickness of the monocrystalline X-cut LN layer, the trasnsducers exhibit a low resonance frequency of 32 kHz while occupying an area of only $120\,\,\mu \text{m}\,\,\times 120\,\,\mu \text{m}$ . An innovative electrode

This paper presents a planar architecture implementing dual-nonlinearity mechanism for broadening bandwidth of a two-degree-of-freedom MEMS energy harvester. The proposed device consists of an electromagnetic-based inner resonator for power generation, and an outer resonator for accessory frequency tuning. In comparison with conventional 2DOF configuration, different high-order nonlinearity is subjected

This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these modes superposed on the resonator. The frequency and Q-factor mismatches were compensated by the phases

This paper reports a micro electromechanical system (MEMS) resonant accelerometer with high relative sensitivity based on sensing scheme of electrostatically-induced stiffness perturbation for the first time. The perturbation electrodes convert the acceleration induced displacement of proof masses to electrostatic perturbation force and cause the effective stiffness perturbation and frequency shift

A two-dimensional (2D) model was developed, for the first time, to describe the characteristics of the micromachined thermal expansion-based angular motion (TEAM) sensor, which has been validated by the experimental results. Scaling analysis on the performance characteristics through the 2D model was conducted to optimize the TEAM sensor’s design in terms of the normalized distances between the microheaters

This paper presents a technique for suppressing specific resonance modes of micromechanical resonators by mechanical means. In particular, attaching multiple miniaturized beam structures with properly designed dimensions acting as anti-resonating tuned mass dampers (TMD’s) to a micromechanical clamped-clamped beam (CC-beam) resonator based on a CMOS-MEMS process platform successfully attenuate the

A novel solid-liquid inter-diffusion (SLID) bonding process is developed allowing to use thin layers of the Au-Sn material in wafer-level microelectromechanical systems (MEMS) packaging while providing a good bonding strength. The bond material layers are designed to have a robust bond material configuration and a metallic bond with a high re-melting temperature, which is an important advantage of

This work reports a monolithic RF front-end module integrating bulk acoustic wave (BAW) filters, Lamb acoustic wave filters, and electronic RF silicon-on-insulator (RFSOI) switches to deliver single-chip multiband RF front-end module (RF-FEM) manufactured on commercial 200mm RF silicon-on-insulator (RFSOI) foundry technology. BAW and Lamb filters built in the same chip and within the same process enable

This paper presents an airborne piezoelectric micromachined ultrasonic transducers (PMUTs) operated at low frequency (40–50 kHz) for long-range detection, where the acoustic absorption loss in air is relatively low (0.8–1 dB/m). The PMUTs made with single-crystal Lead Zirconate Titanate (PZT) enables a high piezoelectric coefficient ( ${e} _{31, f} \approx ~16$ - 24 C/ $\text{m}^{{2}}$ ), and a low

This work is an extensive study of the plasma chemical etching (PCE) process of single-crystalline lithium niobate (LiNbO 3 ) in the SF 6 /O 2 based inductively coupled plasma (ICP). The influence of the main technological parameters of the LiNbO 3 PCE process, including the distance between the sample and the lower edge of the discharge chamber, as well as the temperature of the substrate holder on

Mechanical control is essential for adaptive regulation in biological systems. This work presents a magnetic, non-contact approach to simultaneous detection and actuation in a microscale tissue testbed. The platform builds upon previously developed passive mechanical platforms, where tissues self-assemble on flexible pillars. Standard detection is typically derived from microscope images and actuation

MEMS biochemical sensors based on nanomechanical cantilevers (NMC) translate bio/chemical interactions into nanomechanical motion that can be detected by various transduction techniques. Polymer Nanomechanical Sensors have proven to be better candidates than the conventional silicon MEMS sensors owing to better sensor performance, ease of fabrication and cost effectiveness. In this paper, the development

Here, we propose a robust lab-on-a-chip system for multi-dimensional (electrical, optical, and mechanical) characterization of a single-molecule utilizing a Si micromachined micro-electromechanical-system (MEMS) chip. Our MEMS-based break junction (MEMS-BJ) utilizes conventional MEMS chip fabrication techniques to create an electrostatic comb actuator capable of trapping a single-molecule between two

A flexible PMUT device which can be applied on curved surfaces is presented. The oscillation behavior of the device under different curvatures (from ${\kappa } = 0$ to ${\kappa } =20\,\,\text{m}^{\mathbf {-1}}$ ), shows both modal frequency and vibration velocity shifts. The impact of bending of the device is discussed, in terms of stress given to the diaphragm. When the device is curved, additional

We present the design, modeling, fabrication, and experimental characterization of an electrodynamic wireless power transmission (EWPT) receiver for low-frequency (< 1 kHz), near-field wireless power transmission. The device utilizes a bulk-micromachined silicon serpentine suspension, two NdFeB magnets and two precision-manufactured coils. The architecture of the transducer is designed to maximize

The vapour etching of silicon sacrificial layers is often a critical process in the fabrication of micro/nanosystems. This method has a number of attractive features, in particular, high etch rates of sacrificial silicon layers and good selectivities associated with photoresist, SiO 2 , stoichiometric Si 3 N 4 and a number of regularly used metal films. However, materials that are commonly inert to

This article reports on the first demonstration of a high resolution (~1.9 nW/Hz 1/2 measured in 200 Hz bandwidth) and fast (~5.3 ms) uncooled Infrared (IR) detector based on a high frequency (172 MHz) aluminum nitride nano-plate piezoelectric fishnet-like metasurface (PFM). For the first time, an ultrathin (650 nm) piezoelectric fishnet-like metasurface is employed to form the vibrating body of a

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This paper reports the development of a wireless pressure sensing coil system by embedding a capacitive micro sensor onto a wire. The coil system, consisting of an inductor (coil itself) and multiple capacitors (sensors), formed a passive LC telemetry configuration for wireless sensing. The capacitive sensor, utilizing the movements of a liquid in a sealed chamber for hydraulic amplification, enabled

This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended tuning forks (DETFs), two link beams, two micro-leverages, a proof mass, and a quartz frame. Micro-leverages and DETFs are perpendicular

This article describes a shape-recognizable sheet device using origami structures with single-walled carbon nanotubes (SWCNTs) strain sensors. Recently, a sheet-like measurement system that is directly attached to an object has been attracting attention for obtaining the shape, motion, and deformation of the object as alternative systems with external cameras. However, previous sheet-like measurement

Silicon microfabrication technology was employed in the generation of a cavity in the form of a truncated inverted pyramid with very smooth sidewalls and a silicon dioxide UV transparent optical window at the bottom. This can be used as a micro-cuvette for testing of fluids. 100nl fluid volumes can be tested using this platform by ultraviolet absorbance spectroscopy employing a deuterium lamp and an