This paper presents a novel step structure of RF MEMS switch with and without uniform, non-uniform serpentine meanders, having square perforations which results with a low actuation voltage. Here, design, study, and simulation of the proposed device are evaluated in the FEM tool. By changing the span beam length of the serpentine meanders from results owing to low spring constant and a low pull-in

This work presents the design of a front-end MEMS piezoresistive pressure sensor readout circuit along with a drug actuator model based on TSMC 0.18 μm CMOS technology. The overall system finds application in implantable systems based on micro-pressure sensing and actuation such as the closed loop automatic micturition chip. The system consists of high performance and ultra-low noise chopper stabilized

In this work, Z-axis MEMS accelerometers are investigated with variation in spring topography. The serpentine spring structure demonstrated the optimum sensitivity of MEMS accelerometers due to a large number of beams that reduce the spring constant considerably. The augmented serpentine spring MEMS accelerometers are simulated for SU-8, PolySi, Si3N4, and SiC-based primary structural materials. SU-8

The Electro-Magnetic (EM) MEMS switches are playing an important role in our everyday life due to their high efficiency and system integrity. The design, modelling and testing of MEMS EM switch is presented in this research work. This chip-based MEMS switch is fabricated using 0.35 µm Complementary Metal Oxide Semiconductor (CMOS) three metals-two poly technology, released i.e., post micromachining

In-situ self-calibration can fundamentally solve the problem of long-term stability of the accelerometer. The implementation of external integrated micro structure to provide physical excitation has become an effective method to compensate for the long-term drift error of the accelerometer. A closed-loop self-calibration system for accelerometers by integrating sensors and actuators is presented. The

Underwater connectivity has been a leading field of study in undersea navigation, deep-sea investigation and autonomous underwater vehicle control (AUVs). Because of the low attenuation (signal reduction) of sound in water, acoustic communication is the most versatile and broadly used tool in underwater network. Factors such as long propagation delay, restricted usable bandwidth, large Doppler range

Capacitive proximity sensors have been widely used in human-robot interaction, but suffer from the problem of the imperfect measurement accuracy in the nonlinear detection range. Meanwhile, sensor calibration makes the measurement tedious, time consuming, and is difficult to be used in 3D positioning. In this paper, we use a hand as the sensing target and propose a new distance estimation and positioning

Reinforcement of polymer matrices with nanosized objects contributes to the improvement of the mechanical properties of matrices, which strongly depend on the distribution of nanoinclusions in the matrix. In this paper, a new multilevel modeling method has been proposed for estimating the Young's modulus of polymers reinforced with graphene nanoplatelets. The developed methodology covered sequential

The micro-electro-mechanical-system switch performance significantly depends on materials used for the design of different components. The two most important elements of the MEMS switch are the beam membrane and dielectric layer. Thus, the selection of a material for these two components should be done with utmost care. In this paper, Ashby’s material selection methodology is employed for choosing

A correction to this paper has been published: https://doi.org/10.1007/s00542-021-05214-3

In this paper we measure the evolution of adhesion between two polycrystalline silicon sidewalls of a microelectromechanical adhesion sensor during three million contact cycles. We execute a series of AFM-like contact force measurements with comparable force resolution, but using real MEMS multi-asperity sidewall contacts mimicking conditions in real devices. Adhesion forces are measured with a very

Printed electronics such as solar cells, RFIDs, and display panels can be made using printed electronic technology by printing viscous liquids having various properties on films or insulating substrates. Among printed electronic production processes, the roll-to-roll process transfers functional ink to an insulation substrate by filling its engravings through repeated contact and rotation of two rolls

It is usually very difficult to find the causes of low yield performance in semiconductor manufacturing. In a typical wafer probing process, when the yield is low, engineers are required to examine both the equipment and the products to clarify if the low yield performance could be contributed by the testing conditions or the products. No matter which were the main cause, the time-consuming trouble-shooting

A symmetrical micro-gripper structure is designed via the Scott-Russell mechanism. The kinematic and dynamic models are established through pseudo-rigid-body method and Lagrange’s method, which are verified by finite element modeling. The hysteresis inverse compensator via Bouc–Wen model is applied to describe the micro-gripper system and their parameters are also identified via least square optimization

A flexible antenna for portable and wearable radio frequency energy harvesting and flexible electronics applications is proposed. A silicone wristband with ɛr = 3 is used as the substrate to support the radiating element and hence the appellation given as bandenna – a wristband antenna. The radiating element is a single fed corner truncated circularly polarized microstrip patch operating in the 2.45 GHz

Energy harvesting has become a fascinating topic of research. As the world moves towards reducing its dependency on fossil fuels, new and innovative techniques of energy harvesting have been tested and developed. The use of piezoelectric materials to harvest the ambient vibrations from the surroundings is one method that has seen a dramatic rise in use for power harvesting. Remote sensors can be powered

The artificial lateral line is a bionic sensor developed in recent years to detect physical parameters of gas and liquid flow field, which has great application prospects in underwater target detection, microfluidic velocity detection and smart skin. However, these sensors generally have only one kinocilium, resulting in inability to identify directions. Moreover, the kinocilium exposed directly in

An electrostatic doping (ED) based 35 Gb/s dual-parallel Mach-Zehnder modulator (DP-MZM) for photonic integrated circuits (PICs) is proposed and analyzed. Theoretical formulation of the transfer function and linearity analysis of the proposed modulator is also presented here. The proposed modulator contains two ED-aided sub-MZMs and an ED-aided optical phase shifter (PS) in a MZI structure. Numerical

This article examines the free size-dependent vibration behaviour of an Euler–Bernoulli type double-microbeam system, made of two microbeams elastically connected, with simply supported, clamped–clamped and clamped–pinned boundary conditions using an assumed-mode expansion technique (AMET) along with finite-element verifications; effects of altering the couple-stress-tensor-related parameter and the

Now a days, filters became essential component in many of the RF, satellites and wireless communication networks and system. The size and complexity of the system increases while dealing with multiple frequencies which employs a large number of filters. Hence, a single filter which can reconfigure at multiple frequencies is much more needed in the present scenario. In this paper, a reconfigurable band

Warm forged components have better surface properties and higher dimensional accuracy than hot forged components. Diamond-like-carbon (DLC) coatings can be used as wear protection coatings, which are anti-adhesive and extremely hard (up to 3500 HV), to increase tool service life. In the first funding period of the research project at the IPH – Institut für Integrierte Produktion Hannover gGmbH and

This research article discusses the types of carbon nanotubes and some related properties, synthesis methods and applications. In this research article, the specificities of SWCNTs as well as MWCNTs are described along with the extraordinary properties of carbon nanotubes such as electrical conductance, resistivity, and thermal conductivity in the direction of axis of the tube. Overview of certain

This paper presents a novel design of micro solar sails for emerging lightweight chip scale spacecraft based on flexible electronic circuits. To acquire large deformation, the micro solar sails were designed to be bilayer beams that were able to be electro-thermally actuated by Joule heating. The concept design of the solar sail with high area-to-mass ratios allowed the solar sailing system, named

In this work, drain current ID for 3 nm gate length of triple material (TM) double surrounding gate (DSG) inversion mode (IM) and junctionless (JL) Si nanotube (SiNT) MOSFET has been studied and simulation results are reported using Silvaco ATLAS 3D TCAD. In this device we consider the Non Equilibrium Green’s Function (NEGF) approach and self-consistent solution of Poisson’s equation with Schrodinger’s

In this research a biologically inspired finger-like mechanism similar to human musculoskeletal system is developed based on Shape Memory Alloys (SMAs). SMA actuators are inspiring the design of a modular finger part with compact and compliant actuation. A three-segmented finger-like mechanism is designed and fabricated. This mechanism is composed of six bending Shape Memory Alloy (SMA) actuators.

A comprehensive review of the modeling approaches used to simulate the behaviors of micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial sensors can be significantly improved through understanding their governing dynamics and exploiting specific phenomena and distinctive features. Such understanding can be developed by solving and analyzing their governing equations

This paper presents Micro-Electro-Mechanical System (MEMS) diaphragm based piezoresistive pressure sensor for biomedical applications. A piezoresistive pressure sensor with a squared bossed diaphragm structure was developed for a low-pressure range. A trade-off between the deformation of the diaphragm and the stress induced in the piezo resistors on the diaphragm edge is analysis by using Carbon nanotubes

The purpose of this paper is to present an overview of problems and some research gaps for better understanding of piezoelectric micropump studies. Micropumps have important and diverse application areas in health and engineering applications. In recent years, researchers have carried out simulations, analytical and experimental studies to develop these technologies with different methods for the same

In this research we present an algorithm for a six-wheeled robotic vehicle with articulated suspension (RVAS) to estimate the vehicle velocity and acceleration states, slip ratio and the tire forces. The estimation algorithm consists of six parts. In the first part, a wheel state estimator estimates the wheel rotational speed and its angular acceleration using Kalman filter, which is used to estimate

The University of the corresponding author should be Department of Mathematics, College of Science and Arts, Qassim University, Al Bukairiyah, Saudi Arabia.

Exoskeleton robot-assisted physical therapy has recently been studied extensively due to its proven effectiveness in providing different forms of physical therapy at any stage of physical recovery. The efficacy of robot-assisted physical therapy depends on the maneuverability of the robot during the rehabilitation application. Robot dynamics is inherently nonlinear. Often, robot control algorithms

A new portable blood flow volume (BFV) sensor is developed from the function of estimating oxygen saturation (SpO2) implemented inherently to maximize the accuracy of predicting BFV. The sensor is designed to estimate BFV in high accuracy at the arteriovenous fistula (AVF) of a hemodialysis (HD) patient based on a built artificial neural network (ANN). The BFVs measured by the proposed sensor would

In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks

This study proposes the design of a light to digital converter (LDC) for the long-time continuous monitoring of the photoplethysmography (PPG) signal. The design system incorporates a transimpedance amplifier (TIA), a delta-sigma modulator (DSM), and a decimation filter. The analog front-end circuit is implemented in the integrated chip with the chip area of 2.76 mm2 and fabricated via TSMC T18 process

In this study, a hardware design that is micro-sized and capable of parallel processing is proposed for the solution of the most basic engineering problem required to control a serial robot manipulator. The proposed hardware design is in the form of FPGA-based digital circuit and has been realized in two different ways, serial and parallel. Forward kinematics problem solution of a 7-joint serial robot

Application of innovative technologies for the design and development of state-of-the-art weapons, enable precision aiming and maximum destruction, with minimal collateral damage. Modern warfare is based on accurate guidance and information superiority; hence next generation of weapons tends to be more reliable, intelligent, lightweight and compact. Fuze is one of the key components in the next generation

In the field of low power VLSI, the charge recovery property of adiabatic logic has been liked by the VLSI researchers. And this stimulates the research of various charge recovery techniques for low power computation. The applications of adiabatic logic in digital circuits are well understood, whereas mixed signals and analog circuits are yet to be explored. In this work, the author presents a wave

In this paper, a procedure to release SU-8 layers from glass substrates using typical undesirable effects is described. The proposed process can be used as lift off or stripping. The releasing method consists in taking advantage of the undesired thermal delamination, and the effect of UV overexposure on the delamination temperature, which are considered undesirable effects. This implies the use of

The thesis takes comb capacitance type micro-accelerometer as the research target and designs a new type of biaxial micro-accelerometer with variable cross-section beam. The biaxial accelerometer is mainly composed of proof mass, comb capacitation and cantilever beam. The design of cantilever beam is based on variable cross section. The section size increases linearly with the increase of the beam

The corrected figure is given below.

In these days of great attention around the dawn of 5G deployment, the future 6G scenario poses challenges and sketches trends that, according to the opinion of prominent scholar and scientists, fall far beyond the boundaries of the field that 5G will manage to conquer. In a nutshell, the classical approaches in designing devices, systems and infrastructures, which have been seamlessly followed from

This paper presents design and optimization of a bridge-type RF MEMS switch with and without perforations having non-uniform meanders for applications in the low-frequency (X-band) range. The CPW length of proposed switch is taken as 803 μm and has a signal line, an activated beam and a gap between these two components of 1 μm, these dimensions are taken using the optimization process. The choice of

Progressing advancement concerning the intensification of engine thrust to weight ratio in a gas turbine engine offers ascends to extremely loaded compressor stages which have a significant concern in recent times. Non-uniform Inlet flow conditions are frequently occurring in aircraft gas turbines engines that result in chronological distortions of total temperature and total pressure at the engine

Silicon carbide is considered as a more suitable material for piezoresistive pressure sensors in a high-temperature environment due to its excellent characteristics. In this paper, fundamental research on the structural design of SiC piezoresistive pressure sensors was carried out through the finite element method (FEM) to accurately estimate the optimal output characteristics. The effects of various

Roll-to-roll technology is used to form optoelectronic products because it allows fast, continuous production and a short cycle time. It has become the mass production technology with the most potential for development for the production of plastic products with a microstructure. This study designs and manufactures a composite light guide plate (LGP) to replace a traditional LGP with two pieces of

In this study, we fabricated a microfluidic device to mimic the human blood–brain barrier (BBB) in vitro, comprising a cellulose fiber membrane sandwiched between two silicone elastomer poly(dimethylsiloxane) (PDMS) layers. The PDMS layers were bonded using the oxygen plasma surface activation method. The encased cellulose fiber separated the intersection of channels in the PDMS layers and functioned

The fabrication of robust microfluidics can be tedious, often involving the use of numerous cleanroom resources and processes. We propose a process that is easy to apply yet capable of producing precision microfluidics in polymer with high yield and high fidelity at a wafer scale. The process is centered on the use of a wafer aligner-bonder implementing a one-step hot embossing process to transfer

A micro-machined tip-separable microneedle structure fabricated using a molding process was placed on the end of a metal rod with the outer diameter of 2.0 mm to produce a spear-shaped microneedle, and an applicator for inserting this microneedle into the skin based on a commercially available stamp mechanism was developed. The fabricated spear-shaped microneedle with the needle holder was inserted

The quality of collected electric power is directly affected by the mechanical properties of piezoelectric cantilever, which is an important part of vibration energy collection system. A piezoelectric energy harvester is employed to study the electromechanical conversion performance of piezoelectric cantilever under different counterweights by adding mass blocks. An experimental platform is built to

In this paper, a microscale device comprising a Flared-Ψ shaped composite cantilever having polyvinylidene fluoride (PVDF) ferroelectric polymer thin-film-based unimorph structure and a single brass ring mass is designed and validated by means of finite element method (FEM) simulations and experimental examinations to scavenge energy with high normalized areal and volumetric energy density of 6.8892 × 10−4

Micro-liquid dispensing technology is widely used in the field of in vitro diagnostics. To study the influence of the system factors on the liquid dispensing process, a micro-liquid dispensing system based on a syringe pump is designed in this paper, and a Fluent simulation model is established to simulate the dispensing process. Taking into account the existence of the air column in the simulation

A spectral power-based real-time BCI neuro-feedback (decision machine) system has been proposed in this paper. It is used to reflect the intended task of the movement imagination of hand movements. As a consequence of the cost-effective and greater temporal resolution, the proposed decision machine considered the electroencephalogram (EEG) signal. EEG data modeling is therefore an important step in

Digital images belong to one of the most important and frequently transmitted data categories are the inevitable part of the modern data communication systems. Images contain several sensitive and private data and therefore unauthorized access to these data can be very costly. Recent technological advancements allow us to process, store, and conveniently transmit digital images and it demands robust

A new neural network (NN) is orchestrated by this study to achieve high-accuracy in blood pressure (BP) estimation by a real-time photoplethysmography (PPG). The PPG system consists of an OLED/OPD module to detect the pulsation of blood vessels, followed by a readout circuitry. The circuit is comprised of transimpedance amplifier, a digital tune high order band pass filter, programmable gain amplifier

In this work, a study case is presented in which the design of the layout for a CMOS sensor cell is partially automated by implementing a metaheuristic algorithm to find the best tradeoff between two conflicting objectives (two quantitative opposite and not totally independent yet desired performance or design qualities) among the set of feasible layout and electronic device configurations within a

In this paper, the effect of perforations on both pull-in voltage and S-parameters have been studied experimentally and compared with the simulation results of perforated and non-perforated switch designs for validation. The perforated switch is fabricated using 4-mask layer process and low pull-in voltage of 1.85 V is achieved by introducing novel iterative methodology which reduce spring constant

Precise printed circuit boards (PCBs) and touch screen panels (TSPs) are produced by the proximity exposure patterning process. In the exposure patterning process, the smaller the gap between the mask and the substrate—under the condition that the mask and the substrate are not in contact—the higher the resolution of the pattern obtained. Unlike a substrate that is fixed on a rigid frame, in the exposure

In positioning systems, magnetic scales consisting of magnetoresistive sensors are widely used in the generation of position signals for machine tools. To obtain a precise position, magnetoresistive elements inside the sensor head output sinusoidal signals through the angle between the magnetization vector and the supplied current direction in order to determine the displacement of the system under

This paper presents an algorithm based approach for TFET (Tunnel Field Effect Transistor) design. A numerous number of meta-heuristic algorithms have been used to procure the best device dimension for a Si–Ge (Silicon–Germanium) pocket n-TFET. The foremost important task is to find an alternative to hit and trails based device optimization and thereby improve the device performance by using those techniques

Intracranial pressure (ICP) monitoring is proved to be a lifesaving tool for the person suffering from traumatic and other brain diseases. The need to comprehend and control intracranial pressure (ICP) is required for remedies in clinical neurosurgery, nervous system science and crisis medication. It gives detailed status about the brain, blood and cerebrospinal fluid. Non-invasive method of measuring