A novel structural piezoresistive pressure sensor with four-grooved diaphragm combined with rood beam has been proposed for low pressure measurements of less than 1 psi. The proposed sensor chip is fabricated on a SOI wafer by traditional MEMS micromachining and anodic bonding technology. By localizing more strain energy in the stress concentration region and increasing the constraint of the partial

This paper presents the design and development of a strategy of low-cost automation by the use of a minicomputer Raspberry Pi, to implement web technology in hydraulic processes for edge computing, close to where data is produced. A web page was built to be an user interface, besides, the Ethernet standard has been used to establish the internet connection with the Raspberry board to manipulate the

In the original publication, footnote marks 4, 5 and their respective notes were incorrectly added to the text. The correct footnote marks and the notes are given here.

Over the past years, robot-aided rehabilitation has gained traction to regain lost mobility in upper limb due to stroke. In most cases, rehabilitative robotic devices have not considered movement of shoulder joint center (center of glenohumeral joint); however, this movement leads to misalignment of human joints with robot joints, which is undesirable in any circumstances. In this research, a 2 degrees

In this work, we designed a novel structure to produce vibration sensors with a linear voltage output that are suitable for large-amplitude vibration applications. Specifically, the sensor structure featured a cylindrical proof mass attached to a diaphragm structure with eight release holes. Based on this structure and using a commercial eight-inch microelectromechanical system foundry process, aluminum

A novel gradient thermoelectric microwave power sensor is designed to improve the performance in this work. The thermocouples are designed with different lengths based on the thermal distribution of resistance. It is fabricated using GaAs MMIC technology, and it can be integrated with other planar circuit structures. The thermal distribution of the gradient thermoelectric microwave power sensor is

In this paper, a T-shape microchannel containing a mixing unit inserted in the straight main channel is designed to increase the mixing quality by geometrical changings in the mixing unit. Governing equations on flow field and concentration field have been discretized and solved using finite element method. Obtained numerical results were validated by comparing the numerical data reported in literature

This study discusses the exploitation of a full-3D methodology for the electromagnetic simulation of a Wafer-Level Packaging solution featuring Through Silicon Vias (TSVs) for the redistribution of electrical signal from the in-package (RF-MEMS) passive devices to the external world. In particular, the Finite Element Method full-3D model is parameterised and allows analysing the influence of the most

In this paper, a fuzzy stability control algorithm based on the type-2 sequential fuzzy neural network (T2SFNN) is proposed to suppress the chaotic motion of the MEMS resonator. The dynamical behaviors of the MEMS resonator are revealed by the bifurcation diagram, exponent diagram, phase diagram and corresponding time history. In the process of the controller design for backstepping control, the T2SFNN

The aim of this work is to find an adaptive control scheme to realize precise position tracking for a piezo-actuated stage, which is usually very difficult to control due to the essential nonlinearity and unknown uncertainty. Firstly, a proportional-integral-derivative (PID) sliding mode controller is designed based on the established model and the estimated parameters. Then, in order to reduce the

Piezoelectric driven magnetic flux modulation is an effective method to suppress 1/f noise of magnetoresistive sensor, and obtaining a modulation structure with high quality factor (Q factor) is of great significance in improving the modulation performance. In this paper, influence of anchor positions on the Q factor was investigated with simulation and experiment methods. First, Q factor dependent

Nanopositioning stage, based on the stick–slip principle, is a hot research topic due to its unparallel merits such as compact structure, high resolution, and long travel stroke. However, most of the conventional stick–slip nanopositioning stages only have the ability to move along the horizontal directions. In addition, analysis of vertical stage movement is few. This paper proposes a novel stick–slip

In this article, a rectangular solid-core photonic crystal fiber (PCF) is proposed as temperature sensor. The air-holes of the PCF have been filled with Ethyl alcohol analyte. The full vector finite element method with perfectly matched layer PML is used to investigate the sensing properties. The proposed sensor is working based on changing of analyte refractive index with temperature. The simulated

Now a day’s there’s a drive to encourage L.P.G. gas in India in order to meet the rising demands for energy. Therefore use of induction heater is on increase in urban and other parts of the country. To run induction heater electricity is required. However electricity doesn’t reach all the villages in India. In order to overcome this problem, solar based induction heater is currently being created.

During past decades Micro Electro Mechanical Systems (MEMS) have been developed and presented in the market. It is important to find new processes and methods to facilitate MEMS production regarding to growing demand of MEMS devices in IoT, smart and intelligent systems, consumer electronics and medical applications. In this paper, Ni–P layer deposition on insulator substrates is presented. The layer

Expanding the gripping stroke is the key problem in the research of microgripper. Generally, the magnification of the multi-stage amplifier is larger than that of the single-stage amplifier, but the multi-stage amplifier has a certain inhibition effect on the single-stage amplifier. The effect of simply increasing the number of the amplification mechanism on increasing the magnification is lower. To

This paper presents modification in the thickness profile of bimorph cantilever type piezoelectric vibration energy harvester (PVEH) to achieve uniform stress along the beam length. The thickness profile is obtained by varying the thickness of substrate layer and keeping the thickness of piezoelectric layers constant. Analytical expressions for the cantilever beam displacement, stress on the beam and

Single-Walled Carbon Nanotubes (SWCNTs) are widely used as potential carriers in drug delivery systems. The objective of this work was to observe the effects of pristine, and single-stranded DNA oligonucleotide functionalized SWCNT over the locomotion pattern in the nematode model, Caenorhabditis elegans. The implication of ssDNA in the as-modified SWCNT has been understood in terms of lowering the

The intention of the present work is to study the stability analysis of heat transfer enhancement occurring due to the influence of significant properties variation of fluids in the presence of thermal radiation with an aid of suspended hybrid nanofluids. The mathematical equations are converted into a pair of self-similarity equations by applying appropriate transformation. Runge Kutta Fehlberg 45th

Some serious errors exist in the above paper.

A force sensor utilizing a transformer concept with a ferrofluid core was developed. A ferrofluid reservoir was machined out of Teflon and the open top of the reservoir was sealed with a thin silicone membrane. Forces applied to the silicone membrane caused the membrane to deflect, resulting in the displacement of the ferrofluid in the reservoir through an external tube. The ferrofluid in the tube

The paper reports on the fabrication and characterisation of E3135 epoxy polymer planar waveguides fabricated onto allyl diglycol carbonate substrate. We measured transmission spectra from the visible to near-infrared region and studied waveguiding properties by the m-line spectroscopy using six lasers (532.0, 654.2, 846.4, 1308.2, 1549.1 and 1652.1 nm). Optical scattering losses of the planar waveguides

Chattering due to vibrations on the machine tool shaft and control of the transmitted torque are both a concern in precision machining. Hence, a magnetorheological fluid clutch–brake, also acting as a rotary damper could be a promising solution. Permanent magnets are used to mechanically activate the clutch thus offering simplicity and reliability in operation. The viscosity of the magnetorheological

The wettability property of a material surface is highly dependent on the topography of the surface micro/nanostructure. Femtosecond (fs) laser can be used to fabricate various kinds of surface micro/nanostructures. We present parallel microgroove arrays with unique cross-sectional profiles on the surface of an aluminum foil induced by varying the laser fluence and the scanning spacing. The laser textured

These commentaries show that the heat generation/absorption parameter (γ1) is dimensionless only if the parameter (m) = 1, which means constant surface thickness. However, Hayat et al. (Microsyst Technol 25:1243–1250. https://doi.org/10.1007/s00542-018-4157-y, 2019) utilized m < 1 like m = 0.5 (shape with increasing thickness). For the motion type, m = 0.5 represents decelerated motion. In addition

Thermo mechanical fatigue and damage have been always an issue for solder joint materials used in microelectronics. Accurate damage and crack prediction is important to define the life cycle of these joints. This paper provides a finite element modeling approach used in combination with continuum damage model in order to determine damage level, update material’s constituent properties and to predict

Functional and intelligent soft materials are useful for controlled release of medicines and other molecules. Poly(N-isopropylacrylamide) (PNIPAm) gels are well known as thermo-responsive gels with large discontinuous volume change which is commonly called as the volume phase transition. PNIPAm gels are expected to be applied to controlled-releasable material for drug delivery systems. Furthermore

This paper presents a new design and modeling of a novel variable stiffness scotch yoke series elastic actuator (VSY-SEA) mechanism that can achieve variable stiffness values with a linear relationship between torque and displacement. The main goal of this study was to design the yoke’s shape in the scotch yoke mechanism for a system with the desired stiffness. The word “variable” in VSY-SEA does not

In this study, energy harvesting devices using Wiegand-effect transducer is investigated through integration with linear positioning measurement system. With the device, energy can be harvested due to the changes of magnetic polarities from linear position measurement system. Using numerical finite element method, the energy harvesting module is parametrically investigated to offer the optimal design

In this work, a modelling approach of complete RF-MEMS (MicroElectroMechanical-Systems for radio frequency) passives is discussed. The methodology takes into account both the non-linear electromechanical and the RF behaviour, and is suitable for being implemented and automated within a standard circuit simulator. The intrinsic electromechanical core is based on a structural hierarchical model library

A numerical method was developed to study the effects of the micropolar (MP) lubricants at pure squeeze action in an isothermal elastohydrodynamic lubrication point contact with surface roughness under constant load condition, but without asperities contact. The modified transient stochastic Reynolds equation was derived in polar coordinates by means of the Christensen’s stochastic theory and the Eringen’s

In the original publication, third author name was incorrectly published as X. Roazard. The correct name should read as ‘X. Roizard’.

We perform the experimental study on the precision positioning capability of SMA actuators, with the aim of evaluating practical applicability of the SMA actuator to the field of precision engineering. For the aim, we focus on assessing the positioning accuracy and the minimum step-size of the SMA actuator quantitatively. In the accuracy test measuring the positioning tracking error, the position generated

Based on the traveling surface acoustic wave separation mechanism, a focused acoustic sorting chip is presented in this work, which fully utilizes the focusing energy characteristics of the focused interdigital transducer (F-IDT). Firstly, the structure of the focused acoustic sorting chip and the basic parameters of F-IDT are determined by numerical analysis. Then, the related optimal operating parameters

In this paper, a novel RF MEMS shunt capacitive switch with application in the Ka frequency band is proposed. The spring design and the step structure added to the beam succeeded in improving the performance of the switch and reducing the stress which results in extended life-time of the switch. Also, by optimally reducing the gap between the dielectric and the beam (without problems such as self-actuation)

As the current trend in numerous industrial domains is to miniaturise products, micro-positioning stage(MPS) capable of performing micro-manipulation and micro-assembly tasks with sub-micrometer or nanometer precision is playing an increasing important role in these fields. In addition, well performances and low cost are two emergency issues need to be addressed for widely using flexure-based MPSs

This paper deals with glass surface micromachined antenna of RF energy harvesting for wireless sensor node applications. The research aims to provide a system based on a new integrated RF energy harvester circuitry using a transparent receiving antenna by micromachining process. The energy harvester system is studied using CST-MWS software by Pyrex glass as the antenna substrate having dielectric constant

Multi-walled carbon nanotube-polypropylene nano-composite loaded at 0.01–5 wt% of CNTs has been prepared using twin-screw mixer. The rheological and thermo-mecanical properties have been studied using rheometer and tensile machine. The CNTs were well dispersed in PP with fairly good dispersion stability. The effect of the volume fraction of CNT reinforcements on the Young’s modulus of the nano-composites

To realize metal foil consolidation, a push–pull high-power ultrasonic consolidation resonance system is designed. Firstly, the structure of a high-power piezoelectric transducer was designed and calculated, the push–pull ultrasonic consolidation resonance system was designed according to requirements of ultrasonic consolidation. Secondly, the finite element modal analysis of the ultrasonic consolidation

A thermal sensor integrated with its driving circuit by using Cu on polyimide (COP) as a substrate was developed. A heater, working as the thermal flow sensor and constant temperature circuit (CTC), working as its driving feedback circuit, were successfully integrated on the COP substrate by photolithography, metal deposition, and sacrificial selective etching in the Cu layer. The Cu layer works to

The nonlinear mechanical response of an electrostatically actuated doubly-clamped micro-actuator assuming a non-contact based actuation arrangement is examined. The electrostatic actuating force is numerically approximated through solving a nonlinear electrical field problem using a finite-elements based analysis. An electro-mechanical model is established within the framework of the Euler–Bernoulli

A new fabrication process for micro structures from thermoplastic polymers is presented. Two layers of thermoplastic polymer are placed onto a tool with micro structures. By a friction welding machine, the polymer surfaces are rubbed against each other generating friction heat and melting the polymer. The polymer adapts to the surface shape of the micro structures on the tool. Then, the movement of

This paper presents the design, optimization and analysis of a novel radio-frequency micro electromechanical system (RF MEMS) switch for reconfigurable antenna. The proposed antenna operates at frequency band from 4.5 to 12.5 GHz. The antenna is created by reconfiguring its size using a rectangular patch and an inverted U shaped patch via RF MEMS switch. A series metal to metal contact RF MEMS switch

Recent advances in microfluidics and micro-fabrication technology enabled the emergence of a new microelectrode-dot-array (MEDA) architecture for microfluidic biochips. The MEDA based design facilitates dynamic routing with variable sized droplets having advanced characteristics such as field programmability, higher level of reconfigurability and scalability. Unlike traditional digital microfluidic

This paper presents, the design and simulation of RF MEMS shunt capacitive switch. The electromechanical and electromagnetic analysis of the switch has been done using COMSOL(FEM) and HFSS tools. The proposed switch has the design with non-uniform meanders and dielectric material Silicon Nitrate (Si3N4). Different beam materials such as Gold, Aluminum, and Platinum are used to design the switch and

Nanopillar arrays structure deployed over a top photodetector surface exhibits high light coupling efficiency which is attributed to their unique optical and structural properties. The paper presents a proposed GaAs material based periodic pyramidal cut nanopillar structure array model deployed over a 50 µm × 50 µm detector’s surface area. From the geometric analysis of the proposed model structure

The objective of this work is to create an analytical framework to study the problem of instability and squeezed film damping in bi-axial micro-scanners under electromagnetic actuation considering Casimir effects and size dependence, simultaneously. Also, the concept of Eulerian angles has also been used to achieve this idea. The novelty of this work is analytical solution of squeeze film damping considering

A coupled nonlinear nonlocal strain gradient theory (NSGT) is developed for functionally graded Timoshenko nanoscale (FGTN) beams. This highly nonlinear-scale-dependent continuum model is solved numerically for dynamical responses for the first time. Hamilton’s energy minimisation technique is used for rotation-equation of the nanobeam in addition to axial-displacement and transverse-displacement equations;

In this paper, we present elaborate study of design parameters of hybrid microfluidic mixer through numerical approach using finite element method and experimental studies to improve mixing efficiency in 3D printed lab on a chip. We investigated the change in mixing efficiency by varying passive parameters like intersection angle of the channel inlet V-leg, barrier shape, barrier orientation and the

This paper presents the simulation and analysis of capacitive shunt SPDT RF MEMS switch for high radio frequency applications. The design is based on the shunt configuration consisting of 2 capacitive type switches. To reduce pull in voltage, the high-frequency capacitive SPDT switch is proposed. The beam is designed with non-uniform meanders with perforations. By using the COMSOL Multiphysics tool

This paper reports on the simulation and analysis of Ohmic SPDT (single pole double throw) switch for telecommunication application. A comparative study is performed by varying the gaps from 3 to 2 μm for three different types of beam materials, namely gold, aluminum, and platinum. The design is based on the series configuration consisting of two cantilever type switches. In order to improve isolation

This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing springs with bends that play a significant role in reducing the device’s sensitivity to external shocks

The current endeavor scrutinizes the flow of tangent hyperbolic fluid over a moving stretched surface. The characteristics of heat transfer are conferred by utilizing nonlinear radiation. Further features of mass transfer are characterized with activation energy. The problem is modeled in terms boundary layer equations by implementing the relative laws. The independent variables in the governing equations

In this study, the static displacement behaviour of a three-layer axisymmetric circular piezoelectric unimorph actuator subjected to voltage and uniform pressure loads for different mechanical and geometric properties of layers was investigated. The closed-analytical model of piezoelectric actuator based on the classical laminated thin plate theory was performed. Kirchhoff’s thin plate theory for the

The functionality of electric power network are continuously challenged by dynamic and diverse disruptions. The vulnerability analysis in the context of resiliency, using complex networks has significantly modified in the past few years, enlighten valuable ideas to examine the structural, topological and constructional behavior of a power transmission network. This network having similarity with graph

This paper investigates utilizing ferrofluid in a novel design for a tilt sensor. Ferrofluid is becoming widely used in various fields such as sealing, heat transfer and damping, and its popularity is increasing due to its ability to function as both a fluid and a magnetized substance. The proposed sensor design employs the movement of an excited ferrofluid through a transformer setup which detects

MEMS-based piezoelectric vibration energy harvesters found suitable to power wireless sensor nodes, typically in a remote area of operation. In MEMS technology, piezoelectric type vibration energy harvesters are realized using fixed-fixed or fixed-free cantilever structures. These structures are spring mass damper systems that have a fixed resonance frequency which is to be matched with ambient vibration

This paper examines the simulation-based performances of piezoelectric MEMS vibration energy harvester made up of two Tapered-L shaped springs and one seismic mass, which is designed for supplying energy to the bearing fault observing device or else identifying the defect in small bearing. The proposed novel structure having PZT-5A piezoelectric material is designed and analyzed in finite element method

We present a method for tuning the resonance frequency of a comb resonator using a combination of mechanically softening and hardening springs in order to achieve a high tuning range of resonant frequency. The nonlinear behavior of the structure is due to an angle in the main beam of a crab-leg flexure. Theoretical and simulation results are done to analyze the linear, quadratic, and cubic stiffness

This paper reveals a new design of a meander line ultra-high frequency (UHF) nanosatellite antenna for nanosatellite communication, intended for potential applications in nanosatellite store and forward missions. The design utilizes a modified meander line as principal radiating element. Co planer waveguide feeding with LC impedance has been applied for impedance matching to result in a compact UHF