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A monolithic Si-micromachined four-stage Knudsen pump for µ GC applications J. Micromech. Microeng. (IF 1.739) Pub Date : 2021-01-21 Tsenguun Byambadorj, Qisen Cheng, Yutao Qin and Yogesh B Gianchandani
This paper reports the design, microfabrication, and experimental evaluation of a monolithic Si-micromachined four-stage Knudsen pump (KP) suitable for microscale gas chromatography ( µ GC) applications. Without moving parts, KPs generate gas flow by leveraging free molecular flow against a temperature gradient in narrow channels. In this work the KP consists of four monolithically integrated stages
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Active real-time electric field control of the e-jet in near-field electrospinning using an auxiliary electrode J. Micromech. Microeng. (IF 1.739) Pub Date : 2021-01-21 Anton Karlsson, Henrik Bergman and Stefan Johansson
Near-field electrospinning (NFES) is an additive manufacturing technique that allows for both high-resolution 3D structures and a wide variety of printed materials. Typically, a high electric field between a nozzle, the spinneret, and the substrate creates a μ m-sized jet of a supplied liquid material. With mm distances between spinneret and sample, it is possible to have a fair control of the lateral
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Three-axis force sensor miniaturized by 3D microstructuring using high-temperature punch creep-forming process J. Micromech. Microeng. (IF 1.739) Pub Date : 2021-01-09 Kyosuke Nimura, Kenji Osaka, Kazuma Sawada, Akio Uesugi, Koji Sugano and Yoshitada Isono
This study developed a small, three-axis force sensor with a 3D microstructure for installation into a robot gripper. The sensor was manufactured by high-temperature punch creep-forming of 5 μ m thick single-crystal silicon (Si) cantilevers during an impurity diffusion process for piezoresistors. The punch creep-forming could achieve a large out-of-plane deformation of the Si cantilevers within a small
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An ultrafast response and precisely controllable soft electromagnet actuator based on Ecoflex rubber film filled with neodymium-iron-boron J. Micromech. Microeng. (IF 1.739) Pub Date : 2021-01-09 Xinli Wang, Qian Zhang, Ping Liu, Xun Zhu, Chen Wu, Jinyu Wang, Caixia Liu, Junfeng Wang, Yang Gao, Aiguo Song and Ying Huang
Soft actuator is widely applied in soft grasp and artificial actuation. However, the characteristics of fast response and precise controllability are challenges for soft actuators. In this report, an ultrafast response and precisely controllable soft electromagnet actuator based on Ecoflex rubber film filled with neodymium-iron-boron is proposed. After optimizing the matrix and size of the actuator
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Lithographically patterned polypyrrole multilayer microstructures via sidewall-controlled electropolymerization J. Micromech. Microeng. (IF 1.739) Pub Date : 2021-01-07 Michael Synodis, Jun Beom Pyo, Minsoo Kim, Xuan Wang and Mark G Allen
Composite materials comprising multilayers of metal and conductive polymer can have applications in sensing, biomedical, and energy storage/conversion scenarios. One attribute of such metal/polymer composites is that they typically display highly anisotropic electrical properties, which makes them useful as materials for microelectronic or magnetic devices. However, incorporating the deposition of
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Effects of laser light and AC signals on opto-electrohydrodynamic flow with twin microvortices: I. non-uniform AC electric fields J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-31 Choongbae Park and Steven T Wereley
This paper describes both qualitative and quantitative analysis of rapid microvortex flow generation and manipulation induced by opto-electrohydrodynamic technique. A flow named twin opposing microvortex (TOMV) is generated by infrared laser light under non-uniform alternating current (AC) electric fields. For the AC electric fields, frequency ranges from 3 kHz up to 2 MHz while the voltage is changed
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Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-31 Hayato Noma, Yoshihiro Hasegawa, Miyoko Matsushima, Tsutomu Kawabe and Mitsuhiro Shikida
We developed a stent flow sensor using micro-electromechanical systems (MEMS) technology in order to measure airflow in the airways of laboratory animals. An airflow waveform contains a respiration signal produced by lung motion and heartbeats as these functions are physically connected. This enables both respiration and heart functions to be evaluated under unrestrained and unanesthetized conditions
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Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-09 Lihao Wang, Dengyuan Fu, Xiaochen Liu, Junyuan Zhao, Jicong Zhao, Quan Yuan, Yinfang Zhu, Jinling Yang and Fuhua Yang
This work presents a highly sensitive biosensor based on a microcantilever and alternating current (AC) electrothermal technology. The AC electrothermal unit was developed and integrated with the cantilever chip to improve the capture efficiency of the molecules under test. The AC electrothermal effect enhanced the aggregation of molecules around the microcantilever, increased their binding probability
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Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-09 Milče M Smiljanić, Žarko Lazić, Milena Rašljić Rafajilović, Katarina Cvetanović Zobenica, Evgenija Milinković and Ana Filipović
In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the < n 10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to
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Stable 3D inertial focusing by high aspect ratio curved microfluidics J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-05 Javier Cruz, Karin Hjort and Klas Hjort
Fine manipulation of particles is essential for the analysis of complex samples such as blood or environmental water, where rare particles of interest may be masked by millions of others. Inertial focusing is amongst the most promising techniques for this task, enabling label-free manipulation of particles with sub-micron resolution at very high flow rates. However, the phenomenon still remains difficult
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Micromilling of Ti6Al4V alloy assisted by plasma electrolytic oxidation J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-03 Yizhong Hu, Jianbing Meng, Xiaosheng Luan, Xiaojuan Dong, Haian Zhou, Linghui Qu, Hongwei Zhang and Xiuting Wei
This paper develops a novel processing method of plasma electrolytic oxidation-assisted micromilling (PEOAM). Electrolyte solutions with KH 2 PO 4 , NaAlO 2 , or Na 2 SiO 3 as the main component are designed, and three types of oxide films are grown on the surface of a Ti6Al4V alloy in situ by means of plasma electrolytic oxidation. The morphology and composition of the oxide films are characterized
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Curved passive mixing structures: a robust design to obtain efficient mixing and mass transfer in microfluidic channels J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-03 Ingrid H Oevreeide, Andreas Zoellner, Michal M Mielnik and Bjørn T Stokke
Analyte mixing and delivery to a functionalized sensor surface are important to realize several advantages associated with biosensors integrated with microfluidic channels. Here, we present a comparison between a herringbone structure (HBS) and a curved passive mixing structure of their efficiency at facilitating mixing and surface saturation using fluorescein included in one of the inlets of a Y-channel
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Machine learning-based off-line electrical characteristic prediction through in-line pattern integrity inspection J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-03 Ting-Jeng Liu, Meng-Jhu Wu and Cheng-Yao Lo
In this study, an image inspection method was introduced to two-arm Archimedean spiral antenna patterns to quantify and qualify their in-line integrity, which was linked to their off-line electrical characteristics in terms of the capacitance values through machine learning. The pattern was intentionally deteriorated in shape to imitate potential fabrication variations existing in the microelectronic
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Fabrication of microgrooves with secondary microstructures by electrical discharge machining using a functionally graded laminated electrode J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-12-01 Zhiwen Zhou, Xiaoyu Wu, Jianguo Lei, Zuohuan Hu, Guoli Gao, Yong Tang and Chuntao Chang
As tool electrodes of different materials have distinct electrical discharge machining (EDM) wear rates, this paper proposed a method for fabricating a surface microstructure by EDM with a laminated electrode including a functionally graded material foil. The preparation of functionally graded CuSn foils and the formation of a functionally graded laminated electrode (FGLE) were studied. Additionally
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A self-attachable and self-alignable micro electromagnetic linear actuator J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-26 Chao Zhi, Bin Tang, Yue Wang, Mingshan Qu, Yanjun Li, Jin Xie and Zhuang Xiong
This paper presents the design, fabrication and characterization of a novel micro electromagnetic linear actuator, which exhibits two highlights: slider self-alignment and self-attachment capability. Such characters are realized by deliberately utilizing the attractive force between the permanent magnets (Nd 2 Fe 14 B) of the slider and nickel ferromagnetic cores embedded in the stator. Actuation is
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Elastic-plastic properties of mesoscale electrodeposited LIGA nickel alloy films: microscopy and mechanics J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-25 Li-Anne Liew, David T Read, May L Martin, Frank W DelRio, Peter E Bradley, Nicholas Barbosa, Todd R Christenson and John T Geaney
The elastic-plastic properties of mesoscale electrodeposited LIGA Ni alloy specimens are investigated as a function of specimen size, strain rate, and material composition. Two material compositions are studied: a high-strength fine-grained Ni-Fe alloy and a high-ductility coarse-grained Ni-Co alloy. The specimens have thicknesses of approximately 200 μ m and gauge widths ranging from 75 μ m to 700
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Electrochemical detection of baicalein based on a three-dimensional micromixer J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-14 Jie Liang, Jianfeng Yu, Yang Cheng, Yang Wu and Yongliang Li
Baicalein, a kind of flavonoid, has many medical benefits, and therefore, its accurate and efficient determination is necessary in the field of medical ingredient detection. To achieve the rapid and precise detection of baicalein, a three-dimensional (3D) expansion–contraction wave micromixer was designed and used along with an electrochemical detection method to assemble a micromixing electrochemical
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Ultrasonic wireless communication using capacitive micromachined ultrasonic transducers in liquid with OOK digital modulation J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-14 Weile Jiang, Yihe Zhao, Qi Mao, Libo Zhao, Zhikang Li, Jie Li, Ping Yang, Zichen Liu and Qijing Lin
The modulation scheme of ultrasonic communication using capacitive micromachined ultrasonic transducers, acting as the transmitted port and received port, was simulated and experimented with four parallel channels in silicone oil. Four channel signals were coded by a steady and reliable binary amplitude shift keying method such as on–off keying modulation. The modulation scheme was simulated with additive
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A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-12 Jinglun Li, John Tichy and Diana-Andra Borca-Tasciuc
This paper reports a predictive model for vibration-to-electrical energy harvesters based on an in-plane, gap-closing variable capacitor with frequency up-conversion triggered by the impact between the electrodes. Since the output power is proportional to the output frequency, rectifying low-frequency ambient vibrations (1–50 Hz) to high-frequency electrical signals (200–600 Hz) increases the power
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Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-12 Pham Ngoc Thao, Shinya Yoshida and Shuji Tanaka
This paper describes a new design of piezoelectric micromachined ultrasonic transducer (pMUT) with a monocrystalline Pb(Zr,Ti)O 3 -based thin film (Mono-PZT) for enhancing the mechanical robustness. In this study, we investigated two design concepts to suppress crack generation in Mono-PZT. First, the area of Mono-PZT is limited by leaving an island Mono-PZT pattern only on the membrane of the pMUT
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Scanning digital oil immersion lithography providing high-speed large area patterning with diffraction limited sub-micron resolution J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-11 Aravind Jakkinapalli, Arun Bhaskar and Sy-Bor Wen
A high numerical aperture (NA) scanning digital oil immersion lithography scheme is proposed and demonstrated in this study. To successfully conduct the scanning digital oil immersion lithography, immersion oil should be removed from the photoresist layer before the development process. Also, uniformity of the projected light patterns becomes crucial in the quality of this high NA photolithography
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Shoulder fillet effects in strength distributions of microelectromechanical system components J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-07 Frank W DelRio, Brad L Boyce, Jake T Benzing, Lawrence H Friedman and Robert F Cook
The failure forces and fracture strengths of polysilicon microelectromechanical system (MEMS) components in the form of stepped tensile bars with shoulder fillets were measured using a sequential failure chain methodology. Approximately 150 specimens for each of four fillet geometries with different stress concentration factors were tested. The resulting failure force and strength distributions of
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Fabrication and characterization of micro electromagnetic linear actuators J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-06 Chao Zhi, Mingshan Qu, Yue Wang, Yanjun Li, Jin Xie, Wei Feng and Bin Tang
This paper on the reports design, fabrication and position monitoring of a micro electromagnetic linear actuator. The actuator consists of stator, slider, guide, sensors and affiliated jigs. Actuation is achieved through ampere force between two phase micro-coils (copper) on the stator and permanent magnets (thick NdFeB film) on the slider. During the slider’s movement in the guide slot, tunnelling
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An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-11-04 Ke Zhu, Xuying Chen, Mengjiao Qu, Dengfei Yang, Liang Hu, Jinghui Xu and Jin Xie
This paper firstly proposes an ultrasonic liquid flowmeter based on AlN piezoelectric micromachined ultrasonic transducer arrays. By detecting the transit time of ultrasonic wave, the flowmeter can measure liquid flow in small pipes (8 mm), which is difficult for traditional bulk piezoelectric ultrasonic transducers. In the flowmeter, the acoustic path and flow path are overlapped, which greatly improves
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Design and implementation of dual pressure variation chambers for bone conduction microphone J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-29 Bo-Cheng You, Sung-Cheng Lo, Chun-Kai Chan, Cheng-Syun Li, Hsien-Lung Ho, Shih-Chia Chiu, Guan-Hong Hsieh and Weileun Fang
This study presents a bone conduction microphone (BCM) to detect the variation of air pressure resulted from the skull vibration. The presented BCM consists of a commercial MEMS microphone, the sensing circuits, the bulk metal, the deformable polymer diaphragm, and two printed circuit board (PCB) covers. In this design, two chambers and a vibrating spring-mass structure are hermetic sealed by two PCB
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Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-29 Mahsa Pournia, Seyed Ahmadreza Firoozabadi, Morteza Fathipour and Mohammadreza Kolahdouz
Realization of high-aspect-ratio vertical features on silicon substrates is a crucial step in the fabrication process of microelectromechanical systems devices. Therefore deep reactive ion etching (DRIE) plays an important role in the fabrication of those structures. Recently many efforts have been made in order to propose the novel DRIE processes in order to achieve higher aspect ratios; however,
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Three-dimensional Fabry–Pérot cavities sculpted on fiber tips using a multiphoton polymerization process J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-27 Jonathan W Smith, Jeremiah C Williams, Joseph S Suelzer, Nicholas G Usechak and Hengky Chandrahalim
This paper presents 3D Fabry–Pérot (FP) cavities fabricated directly onto cleaved ends of low-loss optical fibers by a two-photon polymerization (2PP) process. This fabrication technique is quick, simple, and inexpensive compared to planar microfabrication processes, which enables rapid prototyping and the ability to adapt to new requirements. These devices also utilize true 3D design freedom, facilitating
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Frequency and damping effect of suspended silicon nitride membranes in water near the megahertz range J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-22 Jiaying Wang, Jiyang Mei, James Friend and Oscar Vazquez-Mena
Understanding the behavior of water-immersed membranes in the megahertz range is critical to develop novel acoustic metamaterials compatible with biomedical ultrasound applications. Herein, we study the influence of water on the resonance frequency and quality factor near the megahertz range of silicon nitride membranes fully immersed in water using laser Doppler vibrometry. The resonance frequency
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Surface tension—based ultra-micro precision dispensing method for micro—scale manufacturing and its key influence factors analysis J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-21 Huifang Liu, Kaiqing Qiao, Xingwei Sun, Quanxiang Gao, Yunlong Chang and Haotian Xu
Due to the rapid development of precision micro-manufacturing technology, the connection and assembly process of precision micro devices put forward higher requirements for the volume and accuracy of micro dispensing technology. In this paper, an ultra-micro dispensing method based on the surface tension is proposed. It can realize micro size feature adhesive dispensing, here, adhesive droplet volume
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Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-21 M-T Bakouche, S Ganesan, D Guérin, D Hourlier, M Bouazaoui, J-P Vilcot and S Maricot
In this paper, we describe a novel fabrication method of a microfluidic integrated surface plasmon resonance (SPR) gold chip based on a (3-mercaptopropyl) trimethoxy silane (MPTMS) self-assembled monolayer. This monolayer was formed at the surface of a microfluidic chip made of polydimethylsiloxane (PDMS). Its presence was confirmed by contact angle and Fourier transform infrared spectroscopy measurements
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An implantable microelectrode array for chronic in vivo epiretinal stimulation of the rat retina J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-16 E Yoon, B Koo, J Wong, S Elyahoodayan, J D Weiland, C D Lee, A Petrossians and E Meng
The design, fabrication, and testing of a microelectrode array for chronic in vivo stimulation of the rat retina is presented. Epiretinal positioning of the array introduced design challenges associated with the surgical implantation approach into the rat ocular orbit. These anatomical and surgical challenges were overcome using microfabrication of thin-film Parylene C and platinum to create the array
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MEMS device for applying shear and tension to an epithelium combined with fluorescent live cell imaging J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-16 Miguel A Garcia, Ehsan Sadeghipour, Leeya Engel, W James Nelson and Beth L Pruitt
Mechanical forces play important roles in the biological function of cells and tissues. While numerous studies have probed the force response of cells and measured cell-generated forces, they have primarily focused on tensile, but not shear forces. Here, we describe the design, fabrication, and application of a silicon micromachined device that is capable of independently applying and sensing both
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Super-wetting enabled by an array of SU-8 micro-pillars etched with ion-beam J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-12 Yiang Song, Qing Liu, Zhaolong Wang, Yiqin Chen, Huigao Duan and Ping Cheng
The wettability transition of an ion-beam-etched micro-pillar array surface is reported in the present study. The micro-pillar array, made of negative photoresist SU-8, was fabricated by ultraviolet lithography. The results indicate that the combination of the micro-pillar array and ion-beam etching technique can easily regulate surface wettability, which can be changed from hydrophobicity to super-hydrophilicity
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Inertial focusing in two dimensional flows with sharp viscosity stratification in a microchannel J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-12 T Krishnaveni, T Renganathan and S Pushpavanam
Recent experimental studies have shown that lateral particle migration can be controlled passively using stratified flows of co-flowing streams. In this study, we numerically analyze particle migration in a stratified Poiseuille flow of two liquids of different viscosities. A novel numerical approach using immersed boundary method is employed to perform 2D simulations in moving frame of reference.
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An efficient macro model for CMOS-MEMS thermal wind speed sensor J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-07 Jia-Zhen Zhang, Zai-Fa Zhou, Ming Qin and Qing-An Huang
In this paper, we propose a thermal wind speed sensor Verilog-A model with thermal-fluid-electric hybrid characteristics. Because the structure of the thermal wind sensor and the interface circuit chip are designed separately, which cannot effectively carry out MEMS-IC (integrated circuit) co-simulation, the overall performance of the sensor and interface circuit chip is prone to large deviation. At
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Ultrasensitive detection of antigen–antibody interaction and triglycerides in liquid ambient using polysilicon cantilevers J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-10-05 M V Chinnamani, Priyanka Bhadra, V T Fidal, S Gayathri, Anju Chadha and Enakshi Bhattacharya
Measurement in liquid media is a major challenge in real-time detection using resonant cantilevers. This is addressed in the present study by fabricating sub-micron thick cantilevers followed by functionalization for biomolecule detection. The fabricated cantilever resonator beams of thickness 165 nm were used for measurements in two systems: (i) human immunoglobulin (HIgG) as the antibody on the cantilever
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Volume-preserving strategies to improve the mixing efficiency of serpentine micromixers J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-29 Sajad Razavi Bazaz, Amir Hossein Hazeri, Omid Rouhi, Ali Abouei Mehrizi, Dayong Jin and Majid Ebrahimi Warkiani
In this study, we have proposed volume-preserving strategies to boost chaoticadvection and improve the mixing efficiency of serpentine micromixers. The proposed strategies revolve around the point that the volume of the micromixer is kept constant during the manipulation. The first strategy involves the utilization of a nozzle-diffuser (ND) shaped microchannel. Using this, the velocity of the fluids
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Fabrication and characterization of a fully conventionally machined, high-performance porous-media electrospray thruster J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-29 M R Natisin, H L Zamora, W A McGehee, N I Arnold, Z A Holley, M R Holmes and D Eckhardt
While electrospray devices have been used in a variety of applications for decades, they have recently seen a surge in research within the field of electric propulsion. These research efforts have helped significantly improve the understanding of electrospray thruster operation and optimization, however they have primarily been focused on capillary-based, droplet emitting devices due to the more readily
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Fine pattern formation with solder paste using screen printing with stainless steel mesh-cut screen mask J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-29 Ken-ichi Nomura, Yoshinori Horii, Tomoya Koshi, Manabu Yoshida, Hirobumi Ushijima, Hiroyuki Matsuo, Takayuki Ouchida, Yoshiharu Kotsubo and Yuji Kurata
Stencil contact printing is widely used to fabricate conductive patterns, and it is particularly used with solder paste to create interconnections. However, stencil contact printing is becoming inefficient for electronic components owing to the ever decreasing size of the components. An alternative method for fine pattern formation is screen printing, i.e. gap printing with a screen mask, which exploits
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Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-28 Andrea Vergara, Takashiro Tsukamoto, Weileun Fang and Shuji Tanaka
We developed a lead zirconate titanate (PZT) thin film actuator integrated with buried piezoresistors for the dynamic and static deformation sensing of a PZT MEMS actuator. We demonstrated the fabrication of sol-gel deposited PZT thin film devices combined with buried piezoresistors and proved, for the first time, the process compatibility of these materials. Dopant concentration measured by secondary
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Fabrication and static calibration of double-layer thermal film sensor for fluid wall shear stress measurement J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-28 Jinjun Deng, Shaojun Zheng, Yuchao Yan, Runbo Chen, Jian Luo and Binghe Ma
A double-layer flexible sensor array with an active thermal insulation method for fluid wall shear stress was fabricated in this study and evaluated experimentally. Static calibration of the sensor was studied in both wind and water tunnels and the experimental results reveal that the sensor’s static performance was improved by active thermal insulation. Compared to single-layer methods, the static
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A rapid technique to integrate micro-components on released MEMS dies using SU-8 J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-25 Amit Gour, Frederic Nabki and Michaël Ménard
This technical note reports a rapid technique to post-process and assemble micro-components onto dies including released movable microstructures. The method is applied to microelectromechanical systems (MEMS) chips that were fabricated using a commercial process, PolyMUMPs from MEMSCAP. It allows the assembly of a micro-polyhedron over released micromotors and ensures that the micromotors remain fully
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Fabrication method of quartz glass ring resonator using sacrificial support structure J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-22 Muhammad Jehanzeb Khan, Takashiro Tsukamoto and Shuji Tanaka
In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between
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A high-stability triboelectric nanogenerator with mechanical transmission module and efficient power management system J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-22 Heng Wu, Hongkai Li and Xiaoli Wang
The triboelectric nanogenerator (TENG) has been demonstrated to be a promising technology for harvesting mechanical energy and powering electronic devices. However, it is difficult to make TENG output stable because of the irregular movement of actual mechanical sources in the environment, and the inefficient energy utilization limits its application. In this study, we propose a contact-separation
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Real-time physiological sensor-based liver-on-chip device for monitoring drug toxicity J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-21 Hafiz Muhammad Umer Farooqi, Muhammad Asad Ullah Khalid, Kyung Hwan Kim, Sun Ryung Lee and Kyung Hyun Choi
Organ-on-chip models, known as microphysiological systems, are created to mimic the anatomy and physiology of a human organ at the micro-level. Besides being pivotal in the reverse engineering of human organs and pathogenesis studies, they serve as an alternative to animal testing and the development of pharmaceutics. Monitoring the extracellular stromal environment is the basis for gaining in-depth
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Scaling effects and brittle fracture mechanisms in laser punching of PECVD SiO 2 films J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-16 I Sakaev, Y Berg, Z Kotler and A A Ishaaya
We experimentally investigate the removal of several microns thick plasma-enhanced chemical vapour deposition SiO 2 films by a localized dynamic fracture due to confined laser–matter interaction with the silicon substrate (punching) using 10 ps laser pulses at 355 nm. A near order of magnitude increase in the punching threshold fluence (from ∼0.1 to ∼1 J cm −2 ) is observed as the ratio between the
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Flow modeling and experimental verification of flow resistors used in microfluidic chips driven by capillary force J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-14 Hao Zhong, Weifeng Huang, Yong Li, Hao Tong, Guodong Liu and Zhiqiang Wang
A microfluidic chip driven by capillary force has the advantage of low cost and ease of manufacturing in batches, and its flow behavior is dominated by the geometry and surface characteristics of the microchannel. The design of mirochannel structures is very important for the microfluidic chips. This study presents a semi analytical method for the design of capillary microchannel. In this method, the
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Near-infrared nanosecond pulsed laser ablation of silver nanowire in aqueous media for low-power and low-debris laser processing J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-14 June Sik Hwang, Jong-Eun Park, Gun Woo Kim, Huseung Lee and Minyang Yang
Silver nanowire (Ag NW) is used as an attractive alternative material to fabricate flexible transparent conductive electrodes (TCE) instead of indium tin oxide, which has brittle characteristics and unstable processing expenses. For practical applications of Ag NW TCE, a proper patterning process is essential because the Ag NW layer is usually formed from the solution process. Laser ablation is one
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Induced-charge electrokinetics in microfluidics: a review on recent advancements J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-11 Mohammad K D Manshadi, Mehdi Mohammadi, Mohammad Zarei, Mahsa Saadat and Amir Sanati-Nezhad
Applying an external electric field over a polarizable electrode or object within microchannels can induce an electric double layer (EDL) around channel walls and create induced-charge electrokinetics (ICEK) within channels. The primary consequence of the induced charge is the generation of micro-vortices around the polarizable electrode or object, presenting great potential for various microfluidic
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From CAD to microfluidic chip within one day: rapid prototyping of lab-on-chip cartridges using generic polymer parts J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-03 Daniel Podbiel, Lorenz Boecking, Hannah Bott, Julian Kassel, Daniel Czurratis, Franz Laermer, Roland Zengerle and Jochen Hoffmann
We report on a novel rapid prototyping approach for the manufacturing of highly individualized lab-on-chip (LoC) cartridges from generic polymer parts by laser micromachining and laser welding. The approach allows an immediate implementation of microfluidic networks, components, and functionalities into an existing LoC platform without the need for an expensive and time-consuming fabrication of production
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Experimental studies on micro powder hot embossing for high-aspect-ratio microstructures with ultra-high molecular weight polyethylene powders J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-09-03 Jie Gao, Linfa Peng, Yujun Deng, Peiyun Yi and Zhongqin Lin
High-aspect-ratio microstructures have broad application prospects in many fields. Conventionally, lithography and etching processes are the primary methods for fabricating high-aspect-ratio microstructures on glass or silicon chips. However, as application scenarios have expanded, polymeric microstructures have received increasing attention, due to the low cost and wide ranges of special physical
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Bridged resonator based on assembled Si thin wire J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-08-26 Masaya Toda, Taichi Nakamura, Naoki Inomata, Nguyen Van Toan and Takahito Ono
In this research, the Si thin wire has been assembled on a glass trench to be a bridged resonator, which has the potential to measure multi-dimensional force by the combination of strain sensing and field effect transistor (FET) sensing using the mechanical vibration. The Si thin wire was designed to be the suitable structure to improve the detectable minimum force and measurement time. Analysing the
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Advances in precision micro/nano-electroforming: a state-of-the-art review J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-08-19 Honggang Zhang, Nan Zhang, Michael Gilchrist and Fengzhou Fang
Micro/nano-electroforming has received considerable interest from various industry sectors as an advanced micro-manufacturing technique that offers high dimensional precision and replication accuracy. When tight feature tolerances and miniaturized geometries are required, electroforming provides unique advantages and cost-effective characteristics for fabrication. This paper firstly reviews the historical
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Manufacturing conductive patterns on polymeric substrates: development of a microcontact printing process J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-08-11 F E Hizir, M R Hale and D E Hardt
The integration of high-resolution conductive structures into polymer devices using a low-cost, rapid, and accurate manufacturing technique is important for the future of the microfluidic, photovoltaic, flexible printing, and organic electronics industries. In this study, the microcontact printing ( μ CP) of high-resolution conductive patterns on polymer substrates using silver nanoparticle inks and
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Trimming for alumina-based ceramic casting cores for turbine blade by double picosecond laser scanning J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-08-04 Chaoqing Min, Quansheng Li, Xianbin Yang, Xiaodong Wang, Qin Li, Dongxiang Hou, Wenjun Wang and Xuesong Mei
Ceramic cores determine the moulding accuracy of a turbine blade’s cavity, which strongly affects thermal diffusion performance and the service life of a turbine engine. To get a high quality ceramic core after the preliminary process, this paper deals with a laser trimming technology for ceramic casting cores via double picosecond laser scanning for the first time. Instead, the core ceramic foils
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The development of a pressure sensor using a technique for patterning silver nanowires on 3-dimensional curved PDMS membranes J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-08-03 Rick Helgason, Angelica Campigotto and Yongjun Lai
The development of flexible electronic devices has primarily been focused on the production of flat 2-dimensional sensors and has lacked the ability to manufacture devices with complicated 3-dimensional geometry. A mold-based method for manufacturing devices with 3-dimensional geometry that is cost-effective and repeatable is presented herein. This technique is demonstrated by the fabrication of a
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Large scale roll-to-roll production of polyurethane-acrylate-based hydrophobic film: a next-generation protection layer for solar devices J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-08-03 Jongsung Park, Ji-Kwan Kim, Dong-Su Kim, Arunkumar Shanmugasundaram and Dong-Weon Lee
In the present study, we fabricate a hydrophobic film using a roll-to-roll technique capable of large-area continuous production and examine the film’s applicability to solar panels. The hydrophobic film was fabricated using a polyurethane-acrylate (PUA)-based UV-curable material, which has high optical transmittance and high releasability. The roll-to-roll system used in this study was custom manufactured
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Subtractive transfer printing process for rapid fabrication of Au nano/micro structures on a polymer substrate J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-07-28 Hao Shen, Yuki Nakagawa and Masahiko Yoshino
This paper presents a fast stamp method for fabricating Au mico/nano structures based on subtractive cold-welding transfer printing. Cyclo-olefin polymer (COP) was used as the substrate. Polymer materials such as polymethylmethacrylate, polyethylene terephthalate, polycarbonate (PC) can be used to peel off Au films from the COP substrate. Uniform micro/nanodisk patterns of a large area were fabricated
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Precision fabrication of flexible microfluidic circuits using direct laser rapid prototyping solution J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-07-28 Jaka Mur, Aljaž Mikelj, Boštjan Podobnik and Rok Petkovšek
An effective development platform for custom lab-on-a-chip and lab-on-a-foil solutions has been regarded as a missing element for wider adoption of microfluidic technologies in everyday life. We have used a direct laser structuring device combined with CAD-CAM software and have developed an efficient, fast, and precise procedure for rapid prototyping of widely accessible contemporary materials utilized
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Micro-wrinkle strategy for stable soft neural interface with optimized electroplated PEDOT:PSS J. Micromech. Microeng. (IF 1.739) Pub Date : 2020-07-27 Bowen Ji and Minghao Wang
A highly reliable neural interface is required in long-term neural signal recording in vivo for neuroscience research and the treatment of neurological disorders. Organic poly(3,4-ethylenedioxythiophene): polystyrene sulfonate (PEDOT:PSS) is a promising candidate for a next-generation neural interface material due to its better faradaic charge transfer and capacitive charge coupling than metal electrodes