In the double-sided polishing process of silicon wafers, there is a strong demand to reduce amount of edge roll-off (ERO) while improving global flatness of a wafer. In the present study, we clarified the negative effects of uneven wear of the polishing pads on the global flatness of a wafer can be suppressed when the deformation of the polishing pads is large. As for the ERO, we found small deformation

An absolute surface encoder for measurement of absolute in-plane position with a mode-locked femtosecond laser and a planar scale grating having variable periods along the two orthogonal directions is proposed. In the proposed method, the absolute in-plane position is measured through observing the spectra of the coupled groups of the positive and negative first-order diffracted mode-locked femtosecond

One advantage of a femtosecond laser is that it enables the processing of materials that are otherwise difficult to process via conventional methods such as cutting, grinding, electric discharge machining, etc. However, it is difficult to predict a three dimensional shape processed by the laser. To achieve required three-dimensional shapes using femtosecond lasers with high accuracy and efficiency

Roll-to-roll (R2R) printing technologies have been widely adopted in a variety of engineering fields, e.g., organic photovoltaics and flexible electronics, owing to the advantages of cost and throughput. Although a minimum feature size of 100 nm has been demonstrated on R2R systems, the layer to layer registration accuracy (i.e., overlay accuracy) still remains as low as tens of microns, which prevents

Air flotation rails are widely used in semiconductor production lines to produce an airflow film for handling components such as liquid crystal glass substrates. During transportation, the glass substrate deforms with a large curvature, which inclines the airflow film between each hole in the rail and substrate. This study theoretically and experimentally investigated the pressure field of an inclined

A new method for measurement of the pitch deviation of a scale grating by an optical angle sensor based on the laser autocollimation is proposed. In the proposed method, the scale pitch deviation is evaluated through detecting the change in the angles of diffraction of the first-order diffracted beams, which is associated with the change in the scale pitch deviation. The optical angle sensor unit is

Gyro finishing, which is one of the mass finishing, is expected to be an excellent finishing process of a workpiece with a complex shape. However, its fundamental researches are few, and hence the development of techniques to address its issues/problems, such as the decline of shape accuracy and low process controllability, is hindered by a lack of understanding of the process. Thus, a fundamental

Reconstruction algorithms in X-ray computed tomography assume a particular geometrical alignment of the instrument components: X-ray source, sample stage, and detector. Motion errors and misalignments in the actual instrument contribute to errors in the reconstruction. In previous work, we presented an object-based procedure to measure the instrument geometrical alignment at a single position of the

In Japan, deterioration of electric power supply systems has been accompanied by a steady increase in the quantity of maintenance work. Since such work on the bucket of an elevated work vehicle is extremely hard for the workers, innovations are required to save labor. Some robotic systems attached to the bucket have been researched, however, they are remotely operated and their operability is not so

There are still some problems in the electrochemical machining (ECM) of micro-deep holes with a diameter of 100–200 μm. For example, it is difficult to prepare an insulation layer on the outer sidewall of a micro-hollow electrode. Under the influence of high-pressure liquid flushing and bubble tearing in a small machining gap, the prepared insulation layer is easily damaged/fallen off. And the micro-hollow

In the standardized accuracy test procedures for machine tools, error motions of a linear axis, i.e. the linear positioning, straightness, and angular error motions, are separately measured in a different setup with a different measuring instrument. This paper presents a novel scheme to measure all the two-dimensional (2D) error motions of two linear axes by using a laser interferometer only. The proposed

Powder mixed-electro discharge machining (PM-EDM) is recently evolving machining technique which can simultaneously remove and modify the machined surface through thermo-electrical process. It is a modified form of EDM in which the conductive powder elements are added in the dielectric liquid to enhance machined surface characteristics and machining responses. The commonly used biomaterials such as

Semiconductor manufacturing systems and ultra-precise machine tools now require nanometer-scale positioning accuracy. To improve positioning accuracy, it is efficient to support the top table with a noncontact guide system to prevent guide friction and heat transfer from the lower table or base. A magnetic levitation (maglev) stage can accomplish ultra-precise positioning accuracy with six-degrees-of-freedom

This paper presents a novel method for mapping a texture for machining onto a freeform surface. When a grain texture designed on a 2D plane is projected onto a freeform surface simply, the texture is distorted along the curvature of the surface in the projection direction. Therefore, a method is required to suppress this distortion. The algorithm proposed in this paper rapidly generates a point cloud

In micro electrical discharge machining (micro-EDM), the precision fabrication of cylindrical micro rods is difficult to achieve with a high processing efficiency. In order to overcome this challenge, this paper proposes a new processing method, which is denoted as twin-mirroring-wire tangential feed micro electrical discharge grinding (TMTF-WEDG). The machining principle, characteristics, and realization

A study of the secondary source phenomenon due to the presence of off-focal radiation in industrial micro-focus cone-beam X-ray computed tomography (XCT) systems and its influence on dimensional measurements is presented. Although off-focal radiation production within X-ray tubes has been studied for medical X-ray imaging systems, its properties and its effects on dimensional measurements in industrial

During the nanoparticle colloid jet polishing process to obtain ultra-smooth surface, cavitation is easy to occur because of the intense fluid turbulence. Cavitation interacts with nanoparticles in the colloid solution, which has a great influence on the processing quality of the ultra-smooth surface. In this paper, the collision between nanoparticles and ultra-smooth surfaces under the micro-jet effect

Optical scanning instruments require sampling and reconstruction with high accuracy and low computational cost. T-splines have recently been developed that allow significant reductions in the number of control parameters by overcoming some of the topological constraints of B-splines and NURBS. As a subset of T-splines, analysis-suitable T-splines (ASTS) show promise due to the linear independence and

This paper presents a flexure-based piezoelectric actuated microgripper for high precision grasping/releasing tasks. The design of the microgripper consists of a three-stage amplification and transmission mechanism, and the parallel grasping technique. A bridge-type mechanism and two sequential lever-type mechanisms are symmetrically connected to amplify the output displacement of the embedded piezoelectric

In X-ray computed tomography (CT) reducing the number of projections (Np) acquired for data reconstruction will reduce the measurement acquisition time and, thereby, the cost of the measuring process. However, reducing Np can also reduce reconstruction quality and the accuracy of dimensional information provided by the CT measurement. This paper assesses changes in dimensional accuracy of X-ray CT

This paper performs a comprehensive analysis and calibration on the geometric error of the ultra-precision drum roll lathe with dual-spindle symmetrical structure and cross slider layout. Firstly, the volumetric error model which contains all geometric errors of the dual-spindle ultra-precision drum roll lathe (DSUPDRL) is developed based on the combination of the homogenous transfer matrix (HTM) and

In this paper, we present the development of a high-speed dual-beam stealth laser dicing (D-SLD) method for processing semiconductor wafers based on electrically tunable lenses (ETLs). An SLD system utilizes a laser beam to dice a wafer by inducing interior defects without modifying the surface characteristics of a wafer, thereby presenting significant advantages over conventional dicing methods, e

0.5 wt% boron-doped zinc oxide (BZO) films were fabricated by utilizing pulse laser deposition under different growth temperature ranged from 250 °C to 450 °C. The effect of the growth temperature on the structural, optical, and electrical properties was investigated and discussed. The crystal structure and orientation of BZO thin films were examined by X-ray diffraction. All of the BZO films under

Different aspects of noise in X-ray computed tomography (XCT) for industrial purposes are examined. An overview of the most common noise metrics is given, together with a description of XCT noise influence quantities. We address the current state of the art in understanding the contribution of noise to XCT measurement uncertainty, giving a chronological view of the different attempts that have been

This paper describes the first uncertainty analysis for drilling stability using a frequency-domain drilling stability model. The stability model inputs include: the modal parameters for the torsional-axial vibration mode from the twist drill-holder-spindle axial frequency response function; and the mechanistic coefficients that relate the torque and thrust force to chip area for the selected drill-workpiece

Flexographic printing, which involves high-speed contact of an inked stamp against a substrate, is of increasing interest for scalable manufacturing of electronics in new formats. However, the adaptation of flexography to thinner, finer features which are generally required for printed electronics requires improved understanding of stamp-substrate contact mechanics. Here, we present a desktop plate-to-roll

Large Volume Metrology is essential to many high value industries to go towards the factory of the future, but also to many science facilities for fine alignment of large structures. In this context, we have developed a multilateration coordinate measurement system, traceable to SI metre, and suitable for outdoor measurements or industrial environments. It is based on a high accuracy absolute distance

The sheet flexure is commonly used to provide support stiffness in flexure mechanisms for precision applications. While the sheet flexure is often analyzed in a simplified form, e.g. by assuming planar deformation or linearized stiffness, the deformation in practice is spatial and sufficiently large that nonlinear effects due to the geometric stiffness are significant. This paper presents a compact

Functional micro/nano structures are promising for enhancing the performance of CaF2-based devices. However, it is still a challenge to precisely manufacture CaF2 micro/nano structures due to their brittleness. In the present work, we demonstrated the machinability of ductile-mode diamond cutting of CaF2 and the ability to sculpture sophisticated micro/nano structures on CaF2 by applying elliptical

Nickel-based single crystal superalloy is widely used in the field of aerospace and nuclear reaction equipment due to its good properties. Ultra-precision machining technology is an important means to ensure the surface quality of parts. However, the anisotropy of materials has great influence on the evolution of surface and subsurface defects and the removal of materials in the process of machining

This paper investigates the effect of scribing speed on the surface morphology and material removal behavior in diamond wire sawing of monocrystalline silicon through specially designed high-speed diamond scribing experiments. High-speed scribing tests are performed on a (100) monocrystalline silicon wafer over a wide range of speeds. The results show that a higher scribing speed is prone to inducing

Light guiding is an essential functionality of automotive lighting responsible for styling, safety, and artistic effects. The functional performance of optical lighting and illumination products and components depends on novel optical designs and advanced technologies for cost-effective fabrication of tooling with strict surface quality and form geometry accuracy. The present multi-objective study

This paper represents a novel method to suppress the thermal effects of flexure mechanism-based nanopositioning system by fluid (air or water) flow under certain pressure conditions through the internal fluidic channels of the compliant structure. The nanopositioning system made of stainless steel was additively manufactured, and the rectangular fluidic channels were formed on each side of the double

The interference microscope is a powerful tool for surface topography measurement, but its high sensitivity to vibration hinders its application to on-machine use. To measure surface roughness on a machine for the ultra-precision machining, a vibration-resistant interference microscope (VRIM) with an assistant focusing function is developed. The basic principle of VRIM is an error-compensated phase-shifting

Microvibrations may affect the quality and yield of products in precision processes. Therefore, vibration control is essential for minimizing position errors and improving the quality of production. Conventional active vibration isolation systems (AVISs) do not consider the effect of inertia variation, such as the movement of the stage and manipulator, on the system. Variations in inertia are associated

Dynamic stiffness, or the product of the modal stiffness and damping ratio, is an important consideration for the design of additively manufactured parts that will experience dynamic loading. This paper describes a demonstration component which was designed and manufactured in two configurations using a metal wire arc additive process. The first configuration was an open channel structure, while the

Drilling micro-holes at different orientations on thermal barrier coated Inconel 718 superalloy surface is essential to protect turbine blades while operating in harsh environment. This work analyses integrity of micro drilled (600μm) surfaces on thermal barrier coated Inconel 718 sheets using TiAlN coated carbide micro-drills. Considering spindle speed, drill feed, and workpiece inclination, the drilling

This paper proposes two new methods to observe discharge phenomena without interference from the plasma in electrical discharge machining. The first method uses a bandpass filter with a bandwidth of 800–820 nm and laser illumination with a wavelength of 800–820 nm. The second method also uses a bandpass filter with a bandwidth of 800–820 nm; however, in this method, the tungsten material is used not

Visual surveillance systems play a vital role in smart manufacturing scenes. In this paper, a cooperative camera surveillance method is proposed based on the coarse-fine coupling boresight adjustment principle. A master-slave camera cooperative monitoring model is established by combining a high-resolution camera with a large-field camera, the former of which is embedded with a Risley prism pair to

This paper describes the fabrication, modeling, and dynamic testing of laser powder bed fusion stainless steel walls with captured powder cores. The purpose of the study is to determine the increased structural damping, or energy dissipation, and mode shape modification caused by the inclusion of the unmelted powder core within the solid walls. It is shown experimentally that the damping increases

Bionic artificial compound eyes inspire a promising field of miniaturized imaging systems. In this research, a novel infrared (IR) three-dimensional (3D) compound eye imaging system, consisting of a double-side molded 3D microlens array and an aperture array, was designed and fabricated by combining modulated slow-tool-servo diamond turning and precision glass molding. To facilitate the complex profiles

Ball screws are crucial for improving the reliability and interchangeability of transmission mechanical systems; however, existing contact measurement methods that utilise stylus contact are not efficient, which precludes their use for rapid in-situ geometry evaluation. This paper presents a vision-based two-stage method for rapid measurement of key parameters (raceway arc radii and centre distance)

The cutting-edge temperature on the flank face in dry turn-milling of medium carbon steel (ISO C45) is measured using a two-color pyrometer with an optical fiber. In turn-milling, undeformed chip geometry is complex due to its dependence on several factors including diameter of the cutting tool, number of tooth, diameter of the workpiece, tool-work revolution speed ratio, depth of cut, feed per tooth

Given the complex nature of their phenomena and interactions, industrial processes often have multiple variables of interest, usually grouped into critical-to-quality and critical-to-performance characteristics. These variables often have significant correlations, which make engineering problems multivariate. For this reason, Response Surface Methodology, coupled with multivariate techniques, has been

Precision platforms composed of smart-material-based actuators and compliant mechanisms show advantages of high accuracy and fast response. This research focuses on a 3-degree-of-freedom compliant platform driven by magnetostrictive actuators. A parameterized physical model is established for the platform with consideration of three kinds of coupling effects. The magneto-mechanical coupling of the

The purpose of this paper is to understand the generation mechanism and to propose an analytical model of a unique regenerative chatter with the burnishing process in wiper-turning operations. The authors have found a unique chatter when using wiper inserts, which cannot be explained by the existing chatter theory found in the literature. The authors believe that this occurs because of the burnishing

To reduce the contour error in contour-following tasks, the most common method is to design a contour controller based on the contour error model. Therefore, how to estimate the contour error in real-time and with high accuracy plays an important role in contour-following control. It is difficult to guarantee real-time performance, high estimation accuracy and strong robustness against arbitrary trajectories

In order to predict error motion of continuous porous journal air bearing, an accuracy model is established to reveal the relationship among error motion, roundness error and structure parameter under quasi-static conditions. Based on the model, averaging coefficient is defined to quantitatively characterize the error averaging ability. The study finds that whether the bush and shaft roundness errors

Ti6Al4V alloy can be successfully used to fabricate complex near-net-shape industrial products and prosthetic components with enhanced biocompatibility by means of additive manufacturing (AM) technologies. Post-processing machining of such components are still necessary steps; however, the different machinability that characterizes AM products affect the manufacturing process in a great extent. To

Thermal expansion errors represent an important source of measurement uncertainty in precision length measurements. The authors present research performed on thermal error minimisation in calibration of step gauges, with the goal to develop a new high precision procedure for step gauge calibration in the Slovenian National Dimensional Metrology Laboratory. Thermal conditions during step gauge calibration

Achieving high workpiece accuracy is the long-term goal of machine tool designers. There are many causes for workpiece inaccuracy, with thermal errors being the most common. Indirect compensation (using prediction models for thermal errors) is a promising strategy to reduce thermal errors without increasing machine tool costs. The modelling approach uses transfer functions to deal with this issue;

One of the versatile microstructures with numerous applications is represented by V-grooves. Their range of the applicability is broad and covers many types of components from mechanical to optical. Their fabrication process is accompanied by challenges related to their tight form accuracy, shape complexity and surface quality requirements. The vast majority of previously-reported axial cutting strategies

Piezoelectric dynamometers are widely used to measure machining forces during milling operations. While dynamometers are precise in measuring the low-frequency content of machining forces, their electromechanical dynamics distort the high-frequency content of the forces, resulting in critical measurement errors particularly in high-speed or highly intermittent milling processes. Existing methods (e

The characterization and correction of lens distortion is an important part of optical measurement. This work analyzes the formation mechanism of color fringes and multiplication moiré, and discusses modification of the color CCD moiré method for correcting lens distortion. A demosaicing algorithm was used to simulate the color fringes in a CCD moiré pattern. We then performed a detailed analysis of

Atmospheric pressure plasma processing (APPP) is proved to be potential in the fabrication of optical elements with high efficiency and near-zero damage. However, high convergence rate in the figuring process is hard to achieve because of the tool influence function (TIF) non-linearity. Directly solved dwell time map by conventional deconvolution methods does not consider the non-linear thermal effect