In this study, a highly efficient method for chemical mechanical polishing (CMP) of silicon carbide (SiC) substrates using enhanced slurry was proposed and developed. The enhanced slurry contains bubbles of ozone gas generated by ozone gas generator in pure water mixed with a conventional commercially available slurry. Therefore, the enhanced slurry has an oxidizing effect on the Si-face of SiC substrates

Five-axis machining plays an important role in manufacturing by dint of its high efficiency and accuracy. While two rotation axes benefit the flexibility of machining, it also brings limitations and challenges. In order to further balance machining precision and efficiency, an improved feedrate scheduling method is presented considering geometric error and kinematic constraints for the Non Uniform

Freeform surfaces have important applications in various industrial fields. However, achieving a high level surface finish on freeform surfaces using polishing is always a challenging task. Hybrid robots are promising alternatives to conventional computer numerical control (CNC) machines and industrial robots for ultra-precision machining. Herein, we present a novel custom-built hybrid robot for freeform

Since many years ago, multilateration has been used in precision engineering notably in machine tool and coordinate measuring machine calibration. This technique needs, first, the use of laser trackers or tracking interferometers, and second, the use of nonlinear optimization algorithms to determine point coordinates. Research works have shown the influence of the experimental configuration on measure

As a nontraditional machining process, electrochemical discharge machining (ECDM) can apply to hard and brittle materials such as glass and ceramic. Improvement of process efficiency is an important topic that has been addressed in many investigations using various techniques such as magnetic field and ultrasonic vibrations. Nano particles are new and advanced materials that can be dispersed in a fluid

In the ultra-precision manufacturing of large optics, industrial robots have the potential to become an intelligent and economical choice of surface polishing. However, the transport of the workpieces between the polishing platform and the measurement instrument seriously limits the manufacturing efficiency. Therefore, an in-situ measurement system based on the monoscopic deflectometry is developed

In planarizing a thin substrate, it has been difficult to remove warp or waviness as such substrates are forcibly deformed by conventional clamping methods. To clamp a thin substrate with no deformation, we have developed a freezing pin chuck system that fixes a thin substrate by freezing the fixation liquid on many pins. This paper describes the precision and fixing characteristics of this newly developed

Amplitude–wavelength (AW) maps or “Stedman diagrams” are often used to provide a graphical representation of the limitations and capabilities of surface measuring instruments. This paper presents an approach for setting the parameter constraints of X-ray computed tomography (CT) in terms of resolution and measuring range for the purpose of representing the performance of industrial CT systems on an

Conformal cooling channels are widely adopted in the mold industry because of rapid and uniform cooling during injection molding. These complicated cooling channel geometries become feasible via selective laser melting (SLM) technology. However, the SLM fabricated internal channel surface shows high surface roughness of about 10 μm Ra. This rough surface can cause stress concentration, reducing the

The substitution method—an empirical approach for uncertainty assessment (adapted from the ISO 15530-3 guidelines) that is based on a comparison between repeated measurements of a calibrated standard workpiece and measurements of a test (uncalibrated) sample—has been the approach most adopted over the past decade for estimation of measurement uncertainties in dimensional metrology with X-ray computed

A method is described to select the location and number of fiducials used in point-based, rigid-body registration of two coordinate frames. Two indices are introduced which are used to search for the optimum configuration of fiducials. They can be used to quickly evaluate a large number of configurations because no actual registration is involved in their calculation. Furthermore, configurations yielding

Many experimental biological techniques utilize hollow glass needles called micropipettes to perform fluid extraction, cell manipulation, and electrophysiological recordings For electrophysiological recordings, micropipettes are typically fabricated immediately before use using a "pipette puller", which uses open-loop control to heat a hollow glass capillary while applying a tensile load. Variability