Total electron yield (TEY) imaging is an established scanning transmission X-ray microscopy (STXM) technique that gives varying contrast based on a sample’s geometry, elemental composition, and electrical conductivity. However, the TEY-STXM signal is determined solely by the electrons that the beam ejects from the sample. A related technique, X-ray beam-induced current (XBIC) imaging, is sensitive

The contact mode high-speed atomic force microscope (AFM) operates orders of magnitude faster than conventional AFMs. It is capable of capturing multiple frames per second with nanometre-scale lateral resolution and subatomic height resolution. This advancement in imaging rate allows for microscale analysis across macroscale surfaces, making it suitable for applications across materials science. However

The determination of the content of the conducting phase and the assessment of conductivity by microscopic images are interesting for rapid and non-destructive analysis of the electrophysical properties of two-phase (conductor/dielectric) samples during the atomic force microscopy. In this paper we summarized results of the analysis of the conductivity maps of the shungite surface by the method of

The angular precision of crystal orientation determination by cross-correlating dynamically simulated electron diffraction patterns with experimental patterns via spherical harmonic analysis is investigated. The best precision found in this study is 0.016°, which approaches the level reported in the literature for other high-precision electron backscatter diffraction implementations. At this angular

Scanning Electron Microscopes (SEMs) often generate images with a shaded appearance which gives a natural 3D impression. Ergo, quite a few methods to reconstruct the 3D surface topography from these using shape-from-shading methods are available in the literature. Here, a novel approach is discussed which uses BackScatter Electron (BSE) images from multiple detectors to reconstruct the topography.

Exploiting the information provided by electron energy-loss spectroscopy (EELS) requires reliable access to the low-loss region where the zero-loss peak (ZLP) often overwhelms the contributions associated to inelastic scatterings off the specimen. Here we deploy machine learning techniques developed in particle physics to realise a model-independent, multidimensional determination of the ZLP with a

Transmission electron microscopy at very low energy is a promising way to avoid damaging delicate biological samples with the incident electrons, a known problem in conventional transmission electron microscopy. For imaging in the 0-30 eV range, we added a second electron source to a low energy electron microscopy (LEEM) setup, enabling imaging and spectroscopy in both transmission and reflection mode

The angle-resolved electron scattering is investigated in scanning-transmission electron microscopy (STEM) using a motorised iris aperture placed above a conventional annular detector. The electron intensity scattered into various angle ranges is compared with simulations that were carried out in the frozen-lattice approximation. As figure of merit for the agreement of experiment and simulation we

Simultaneous atomic force microscope (AFM) and sample scanning confocal fluorescence microscope measurements are widely used to obtain mechanistic and structural insights into protein dynamics in live cells. However, the absence of a robust technique to synchronously scan both AFM and confocal microscope piezo stages makes it difficult to visualize force-induced changes in fluorescent protein distribution

Colloidal nanoparticles (NPs) including nanowires and nanosheets made by chemical methods involve many organic ligands. When the structure of NPs is investigated via transmission electron microscopy (TEM), the organic ligands act as a source for e-beam induced deposition and this causes substantial build-up of carbon layers in the investigated areas, which is typically referred to as “contamination”

Strain analysis by nano-beam electron diffraction allows for measurements of strain with nanometre resolution in a large field of view. This is done by evaluating distances between diffraction discs in diffraction patterns acquired while a focussed electron beam is scanned across the sample in a transmission electron microscope. The bottleneck of this method is a precise determination of diffraction

Electron Energy-Loss Spectroscopy (EELS) is a powerful and versatile spectroscopic technique used to study the composition and local optoelectronic properties of nanometric materials. Currently, this technique is generating large amounts of spectra per experiment, producing a huge quantity of data to analyse. Several strategies can be applied in order to classify these data to map physical properties

In this paper we describe the design, technology and application of a test and reference sample for calibration and characterization of scanning thermal microscopy (SThM) probes and systems. In our solution temperature field in thin film structure, which is being contacted with the thermal tip is controlled in the traceable manner. The developed technology, integrating plasma etching of Pt and chemical-mechanical

HAADF-STEM tomography is a widely used experimental technique for analyzing nanometer-scale structures of a large variety of materials in three dimensions. It is especially useful for studying crystalline nanoparticles, where conventional TEM tomography suffers from diffraction-related artefacts. Unfortunately, the acquisition of a HAADF-STEM tilt series can easily take up one hour or more, depending

Using the combination of off-axis electron holography and environmental Transmission Electron Microscopy (TEM), an experimental setup termed 'gas electron holography', we investigate how the presence of gas in the microscope affects the spatial and phase resolution of electron holograms. The gas is introduced either by using an Environmental TEM (ETEM) or a closed-cell holder. The ETEM data on gas

The intrinsically weak signals in ultrafast electron microscopy experiments demand an improvement in the signal-to noise ratio of suitable electron detectors. We provide an experience report describing the installation and operation of a fiber-coupled CMOS based detector in a low energy electron microscope. We compare the detector performance to the traditional multi-channel-plate-based setup. The

Scientific instruments for material characterization have recently been improved to yield big data. For instance, scanning transmission electron microscopy (STEM) allows us to acquire many diffraction patterns from a scanning area, which is referred to as four-dimensional (4D) STEM. Here we study a combination of 4D-STEM and a statistical technique called non-negative matrix factorization (NMF) to

Atomic force microscopy (AFM) is an established technique in nanoscale grain analysis due to its accuracy in producing 3-dimensional images. Even though height threshold and watershed algorithms are commonly used to determine the grain size and number of grains, they mostly require image processing that result in the change of topographical features of the surface that generates misleading conclusions

Electron tomography has been widely applied to three-dimensional (3D) morphology characterization and chemical analysis at the nanoscale. A HAADF-EDS bimodal tomographic (HEBT) reconstruction technique has been developed to extract high resolution element-specific information. However, the reconstructed elemental maps cannot be directly converted to quantitative compositional information. In this work

Atom probe tomography (APT), a 3D microscopy technique, has great potential to reveal atomic scale compositional variations, such as those associated with irradiation damage. However, obtaining accurate compositional quantification by APT for high bandgap materials is a longstanding challenge, given the sensitivity to field evaporation parameters and inconsistent behaviors across different oxides.

A monolithic active pixel sensor based direct detector that is optimized for the primary beam energies in scanning electron microscopes is implemented for electron back-scattered diffraction (EBSD) applications. The high detection efficiency of the detector and its large array of pixels allow sensitive and accurate detection of Kikuchi bands arising from primary electron beam excitation energies of

Magnetic skyrmions are complex swirling spin structures that are of interest for applications in energy-efficient memories and logic technologies. Multilayers of heavy metals and ferromagnets have been shown to host magnetic skyrmions at room temperature. Lorentz transmission electron microscopy is often used to study magnetic domain structures in multilayer samples using mainly Fresnel defocus imaging

The combination of aberration correction and ultra high energy resolution with monochromators has made it possible to record images showing lattice resolution in phonon modes, both with a displaced collection aperture and more recently with an on –axis collection aperture. In practice the objective aperture has to include Bragg reflections that correspond to the observed lattice image spacings, and

Focus and Aberrations of Nuclear Microprobe (FANM) is a new beam optics package to achieve fast and accurate design of a nuclear microprobe. FANM achieves a balance between speed of focusing and accuracy of high order aberrations. A combined method proposed in FANM is to achieve focusing conditions using a matrix method and to calculate aberration coefficients using a numerical ray tracing method.

An energy band gap measurement method based on nano-beam STEM with small off-axis angle valence band transmission electron energy loss spectroscopy (TEELS) is reported. The effect of multiple scattering event is removed by self-convolution method to obtain a single scattering loss function and a dielectric function is calculated from the single scattering valence band energy loss function through Kramers-Kronig

Atomic-resolution low-dose imaging for beam-sensitive materials is one of the most challenging topics in electron microscopy research. In this study, we theoretically developed a new scanning transmission electron microscopy (STEM) imaging technique by maximizing the signal-to-noise ratio of an obtainable image under the weak phase object approximation (WPOA), which we will call optimum bright-field

Magnetic induction mapping in the transmission electron microscope using phase contrast techniques such as off-axis electron holography and differential phase contrast imaging often requires the separation of the magnetic contribution to the recorded signal from the electrostatic contribution. When using off-axis electron holography, one of the experimental approaches that can be used to achieve this

Electron beams can be reflected by an electrode that is at a more negative potential than the cathode from which the beam is emitted. We want to design a mirror with a flat mirror electrode where the electrons are reflected at a plane very close to the electrode. The wave front of an electron can then be shaped when the mirror contains a surface topography or modulated potential. However, electron

Laser ablation is capable of removing large volumes of material with micron scale precision at very high speeds. This makes it an ideal tool for the initial stage of preparation of samples for atom probe and electron microscopy studies. However, the thermal nature of the laser ablation process is such that thermal and mechanical damage is induced in the samples in the form of zones of recrystallisation

Atomically-resolved mappings of the indium composition in InGaN/GaN multi-quantum well structures have been obtained by quantifying the contrast in HAADF-STEM. The quantification procedure presented here does not rely on computation-intensive simulations, but rather uses EDX measurements to calibrate the HAADF-STEM contrast. The histogram of indium compositions obtained from the mapping provides unique

The size and structure of spatial molecular and atomic clustering can significantly impact material properties and is therefore important to accurately quantify. Ripley’s K-function (K(r)), a measure of spatial correlation, can be used to perform such quantification when the material system of interest can be represented as a marked point pattern. This work demonstrates how machine learning models

During the process of whole slide imaging, it is necessary to focus thousands of fields of view to obtain a high-quality image. To make the focusing procedure efficient and effective, we propose a novel autofocus algorithm for whole slide imaging. It is based on convolution and recurrent neural networks to predict the out-of-focus distance and subsequently update the focus location of the camera lens

This paper aims to elucidate the effect of native air-formed oxide on the crystallographic contrast between differently oriented copper grains in scanning electron microscope images obtained at energies from 0 eV up to 1 keV. The contrast between the Cu grains is strongly affected by the presence of native oxide. The crystallographic orientation contrast between the grains without covering the native

Charge carrier transport through the probe-sample junction can have substantial consequences for outcomes of electrical and electromechanical atomic-force-microscopy (AFM) measurements. For understanding physical processes under the probe, we carried out conductive-AFM (C-AFM) measurements of local current-voltage (I-V) curves as well as their derivatives on samples of a mixed ionic-electronic conductor

Atom Probe Tomography (APT) was used to quantify carbon in implanted silicon at two various electric fields (~ 15 and 20 V/nm). Using equal proportions of implanted 12C and 13C, the numerous molecular ions that were observed were identified and their contribution to the carbon content statistically derived. Much more accurate carbon quantification was obtained in the lowest electric field analysis

A method of calculating the magnitude of the core hole screening of lithium materials is implemented for the simulation of Energy Loss Near Edge Structure (ELNES). ELNES is calculated for a range of lithium materials resulting in improved agreement between calculation and experiment. The technique uses linear response theory to relate the electron density to the core hole shielding contribution from

We present a quantitative method which allows us to reliably measure dynamic changes in the atomic structure of monatomic crystalline nanomaterials from a time series of atomic resolution annular dark field scanning transmission electron microscopy images. The approach is based on the so-called hidden Markov model and estimates the number of atoms in each atomic column of the nanomaterial in each frame

A scanning diffraction technique is implemented in the scanning electron microscope. The technique, referred to as 4D STEM-in-SEM (four-dimensional scanning transmission electron microscopy in the scanning electron microscope), collects a diffraction pattern from each point on a sample which is saved to disk for further analysis. The diffraction patterns are collected using an on-axis lens-coupled

Electron tomography has achieved higher resolution and quality at reduced doses with recent advances in compressed sensing. Compressed sensing (CS) exploits the inherent sparse signal structure to efficiently reconstruct three-dimensional (3D) volumes at the nanoscale from undersampled measurements. However, the process bottlenecks 3D reconstruction with computation times that run from hours to days

Gamma-alumina (γ-Al2O3), like other low-Z oxides, is readily damaged when exposed to an electron beam. This typically results in the formation of a characteristic pre-edge peak in the oxygen-K edge of electron energy-loss spectra (EELS) acquired during or after the damage process. This artifact can mask the presence of intrinsic O-K edge fine structure that would reveal chemical properties of the material;

Focused ion beam (FIB) milling has evolved to be one of the most important Transmission Electron Microscope (TEM) site specific sample preparation techniques. However, this technique still poses challenges, such as the structural damage and potential curtaining issues often observed for thin TEM lamella. These artefacts can negatively affect the TEM analysis results. In particular, structures such

The paper assesses the applicability of advanced atomic resolution displacement measurement techniques to characterize dislocation character in metallic materials using simulated images derived from anisotropic elasticity and actual measurements in high entropy alloys. We draw attention to two techniques: the real space method of template matching (TeMA) and the reciprocal space method of geometric

With nanostructured materials such as catalytic heterostructures projected to play a critical role in applications ranging from water splitting to energy harvesting, tailoring their properties to specific tasks requires an increasingly comprehensive characterization of their local chemical and electronic landscape. Although aberration-corrected electron spectroscopy currently provides sufficient spatial

Tensor singular value decomposition (SVD) is a method to find a low-dimensional representation of data with meaningful structure in three or more dimensions. Tensor SVD has been applied to denoise atomic-resolution 4D scanning transmission electron microscopy (4D STEM) data. On data simulated from a SrTiO3 [100] perfect crystal and a Si [110] edge dislocation, tensor SVD achieved an average peak signal-to-noise

Scanning Transmission Electron Microscopy Diffraction Contrast Imaging (STEM-DCI) has been gaining popularity for the identification and analysis of dislocations in crystalline materials due to its ability to supress undesirable image features that are often present in conventional TEM images. However, there does not yet exist a robust body of work demonstrating expected contrast in these imaging conditions

Deep learning algorithms are one of most rapid developing fields into the modern computation technologies. One of the bottlenecks into the implementation of such advaced algorithms is their requirement for a large amount of manually-labelled data for training. For the general-purpose tasks, such as general purpose image classification/detection the huge images datasets are already labelled and collected

Current quantitative X-ray microanalysis methods are only available for homogeneous materials. This paper presents a newly developed inverse modeling algorithm to determine both the structure and composition of two-dimensional (2D) heterogeneous materials from a series of X-ray intensity measurements under different beam energies and beam positions. It utilizes an iterative process of forward modeling

The realization of chromatic aberration correction enables energy-filtered transmission electron microscopy (EFTEM) at atomic resolution even for large energy windows. Previous works have demonstrated lattice contrast from ionization-edge signals such as the L2,3 edges of silicon or titanium. However, the direct interpretation as chemical information was found to be hampered by contributions from elastic

The electron emission model of a negative electron affinity graded-bandgap AlGaAs/GaAs electron-injection cathode was developed from two-dimensional continuity equations. The emission current was obtained from a simulation of the model, and the emission current efficiency and emission current per unit length were calculated. Based on the simulation results and preparation conditions, the range of optimum

Atomic force microscopy (AFM) is widely used for nano-dimensional metrology in semiconductor manufacturing and metrological system. However, the conventional AFM can't provide accurate CD characterization of nanostructures, due to its top-down configuration and probe-size effect. In this paper, we develop a dual-probe atomic force microscopy (DPAFM). Compared to conventional optical-lever based AFM

Differential phase contrast (DPC) imaging in scanning transmission electron microscopy (STEM) allows for measuring electric and magnetic fields in solids on scales ranging from picometres to micrometres. The DPC technique mainly uses the direct beam, which is deflected by the electric and magnetic fields of the specimen and measured with a beam position sensitive detector. The beam deflection and thus

Lattice strain measurement of nanoscale semiconductor devices is crucial for the semiconductor industry as strain substantially improves the electrical performance of transistors. High resolution scanning transmission electron microscopy (HR-STEM) imaging is an excellent tool that provides spatial resolution at the atomic scale and strain information by applying Geometric Phase Analysis or image fitting

It is well known that dynamical diffraction varies with changes in sample thickness and local crystal orientation (due to sample bending). In differential phase contrast scanning transmission electron microscopy (DPC-STEM), this can produce contrast comparable to that arising from the long-range electromagnetic fields probed by this technique. Through simulation we explore the scale of these dynamical

Focused ion beam/scanning electron microscopy tomography (FIB/SEM tomography) is the method of choice for the tomographic reconstruction of mesoporous materials systems in various fields such as batteries, fuel cells, filter applications or composite materials. However, due to so called shine-through artifacts in FIB/SEM tomographies of porous materials, their segmentation into pore space and solid