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Wafer-Level Electrically Detected Magnetic Resonance: Magnetic Resonance in a Probing Station. IEEE Trans. Device Mat Reliab. Pub Date : 2018-01-01 Duane J McCrory,Mark A Anders,Jason T Ryan,Pragya R Shrestha,Kin P Cheung,Patrick M Lenahan,Jason P Campbell
We report on a novel semiconductor reliability technique that incorporates an electrically detected magnetic resonance (EDMR) spectrometer within a conventional semiconductor wafer probing station. EDMR is an ultrasensitive electron paramagnetic resonance technique with the capability to provide detailed physical and chemical information about reliability limiting defects in semiconductor devices.
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