Mode converters are key components in on‐chip mode‐division multiplexing systems. A compact silicon waveguide mode converter is proposed and demonstrated using all‐dielectric metasurface structure with a tilted subwavelength periodic perturbation. The proposed waveguide mode converter can be scaled to realize arbitrary waveguide mode conversion. As examples, two waveguide mode converters are experimentally demonstrated on a silicon‐on‐insulator wafer, which can convert the TE₀ mode to the TE₁ mode and the TE₂ mode with coupling lengths of 5.75 and 6.736 µm, respectively. The conversion losses of <1 dB and crosstalk values of <−10 dB are achieved for both the TE₀‐to‐TE₁ and the TE₀‐to‐TE₂ mode converters.

中文翻译：

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采用介电超表面结构的紧凑型硅波导模式转换器

模式转换器是片上模式分割多路复用系统中的关键组件。提出并展示了一种紧凑的硅波导模式转换器，该转换器使用具有倾斜亚波长周期性扰动的全介电超表面结构。所提出的波导模式转换器可以按比例缩放以实现任意波导模式转换。例如，在绝缘体上硅片上实验证明了两个波导模式转换器，它们可以将TE ₀模式转换为TE ₁模式和TE ₂模式，耦合长度分别为5.75和6.736 µm。对于TE ₀到TE ₁和TE ₀都实现了<1 dB的转换损耗和<-10 dB的串扰值到TE ₂模式转换器