The feasibility of using aluminum-doped zinc oxide (AZO) as a piezoresistive pressure sensor material is reported. AZO has attracted a great deal of attention in many applications because of its nontoxicity, abundancy and lower cost than other materials such as indium tin oxide (ITO). The AZO films were deposited on polyethylene (PE) substrates by a radio-frequency (rf) magnetron sputtering method and they were used as the diaphragms of the pressure sensors. The piezoresistive sensor was tested for different pressures in vacuum and gage pressure conditions. The response characteristics indicated that resistance increased with the bending of the AZO layer in both compressive and tensile operation modes. The sensor characteristics exhibited that the AZO piezoresistive sensor can be used to measure ambient pressure quantitatively. This investigation indicated that AZO can be used as an alternative material for the fabrication of pressure sensors.

报道了使用铝掺杂的氧化锌（AZO）作为压阻式压力传感器材料的可行性。由于AZO的无毒性，丰富性以及比其他材料（例如铟锡氧化物（ITO））低的成本，它们在许多应用中引起了广泛的关注。通过射频（rf）磁控溅射方法将AZO膜沉积在聚乙烯（PE）基板上，并将它们用作压力传感器的膜片。测试了压阻传感器在真空和表压条件下的不同压力。响应特性表明，在压缩和拉伸操作模式下，电阻都随着AZO层的弯曲而增加。传感器特性表明，AZO压阻传感器可用于定量测量环境压力。