This paper demonstrates the use of a new screen-printed corn starch-based sacrificial layer that decomposes entirely thermally at ∼550 °C. A comparison with a polyester-based sacrificial layer used in previous work is made. Both are used to make PZT microcantilevers and discs in a fully screen-printed fabrication process. Both designs are released during the sintering of the ceramics at 900 °C using the new sacrificial layer, with porosities of 6.7% and 2.2% for microcantilevers and discs, respectively.

中文翻译：

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基于丝网印刷PZT陶瓷的新型MEMS玉米基牺牲层

本文演示了使用新的丝网印刷玉米淀粉基牺牲层的方法，该牺牲层在约550°C时会完全热分解。与先前工作中使用的聚酯基牺牲层进行了比较。两者均用于在完全丝网印刷的制造过程中制造PZT微悬臂和圆盘。使用新的牺牲层在900°C的陶瓷烧结过程中释放了两种设计，微悬臂和圆盘的孔隙率分别为6.7％和2.2％。