The performance of 1D nano/microbeam‐based devices greatly relies on heat dissipation to substrates. The surface roughness plays a key role in interfacial heat transport while this issue is seldom investigated due to the difficulty in quantitative determination of thermal contact resistance (TCR) at nanoscale. Here, the impact of interfacial roughness on heat transport at solid–solid interface by taking VO₂ microbeam on Si substrate (VO₂/Si) as a prototype is investigated. With the increased interface roughness from atomic fluctuation to ≈100 nm, it is found that an unusual uncertainty emerges in thermal interface transport along with the dramatical increase in TCR with two orders of magnitudes. Besides, a single‐layer graphene is inserted into VO₂/Si interface as thermal interface material to study its performance under interface roughness. The inserted graphene not only substantially reduces the TCR but also reduces the uncertainty of thermal interface transport. This enhancement is even remarkable at rougher interface. Microscopic characterization and molecular dynamics simulation suggest that suspended condition and high heat conductivity of graphene on rough surface are responsible for the above effects. This work provides the quantitative evaluation of TCR and contributes to the in‐depth understanding on heat transport at imperfect interface.

中文翻译：

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纳米粗糙度对固-固界面传热的影响

一维基于纳米/微束的设备的性能很大程度上取决于对基板的散热。表面粗糙度在界面传热中起着关键作用，而由于难以定量确定纳米级的热接触电阻（TCR），因此很少对此问题进行研究。在这里，通过以硅衬底上的VO ₂微束（VO ₂ / Si）为原型，研究了界面粗糙度对固-固界面传热的影响。随着从原子波动到≈100nm的界面粗糙度的增加，发现热界面传输会出现异常的不确定性，而TCR急剧增加两个数量级。此外，在VO _2中插入了单层石墨烯/ Si界面作为热界面材料，以研究其在界面粗糙度下的性能。插入的石墨烯不仅大大降低了TCR，而且降低了热界面传输的不确定性。在更粗糙的界面上，这种增强甚至是显着的。微观表征和分子动力学模拟表明，石墨烯在粗糙表面上的悬浮状态和高导热性是造成上述效应的原因。这项工作提供了对TCR的定量评估，并有助于对不完善界面处的热传输的深入理解。