Pulsed spark-assisted chemical engraving (SACE) is a promising technology for micromachining of insulating materials, with no burrs, no cracks and no residues left after processing. Cathode tool wear, however, is one of the problems that must be overcome to enable large-scale application of SACE. This paper presents a comprehensive study of the phenomena and mechanisms involved in cathode tool wear in pulsed SACE. By analyzing the electrolytic current and pulsed voltage waveform during the process, it is demonstrated that cathode tool wear is determined by the reverse current and is particularly affected by the pulse-off time and applied voltage. A longer pulse-off time results in more significant tool wear. The reverse current is mainly caused by the discharge of electrical double layer capacity when a pulsed voltage is applied. By applying a forward-bias voltage during the pulse-off time, cathode tool wear can be completely suppressed. The research results of this paper provide a reference for prevention of tool wear in precision micromachining with the pulsed SACE method.

脉冲火花辅助化学雕刻（SACE）是一种用于绝缘材料微加工的有前途的技术，加工后无毛刺，无裂纹，无残留。但是，阴极工具的磨损是要实现SACE的大规模应用必须克服的问题之一。本文对脉冲式SACE中阴极工具磨损所涉及的现象和机理进行了全面的研究。通过分析过程中的电解电流和脉冲电压波形，可以证明阴极工具的磨损取决于反向电流，并且特别受脉冲关闭时间和施加电压的影响。较长的脉冲关闭时间会导致更严重的工具磨损。当施加脉冲电压时，反向电流主要是由双电层电容的放电引起的。通过在脉冲关闭时间内施加正向偏置电压，可以完全抑制阴极工具的磨损。研究结果为脉冲SACE法预防精密微加工中的刀具磨损提供了参考。