We present two approaches for high‐accuracy aligning of patterning processes with each other when fabricating solar cells. We introduce the approaches on the example of two different patterning processes of which one is adjustable (laser process) and one is not adjustable (screen‐printing process). The basic idea is to measure the coordinates of the applied structures of each involved patterning process at discrete grid points with respect to a reference coordinate system. We chose the grid points such that they completely define the final cell pattern. Then, we adjust the grid point coordinates of one of the patterning processes (the laser process) according to the pattern of the other process (the screen‐printing process). The laser then performs the patterning by connecting the corrected grid points with each other in the desired direction. We perform the associated high‐precision measurement of the patterns' coordinates by using either a high‐precision offline coordinate measuring machine or a high‐resolution inline camera system with subsequent computer‐based data processing. The latter inline method enables high throughput and is, in turn, of great interest for mass production of solar cells. In this paper, we demonstrate the alignment procedure approaches on “pPassDop” solar cells by adjusting a locally applied laser process to the directly following screen‐printing step. This proof of principle includes both above‐mentioned methods for coordinate determination in separate cell batches. Our innovative alignment procedures so far demonstrated the successful matching of 40‐μm‐wide screen‐printed contact fingers to 70‐μm‐wide laser‐processed lines over the entire area of 6‐inch solar cells.

中文翻译：

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太阳能电池生产中图案化工艺的高精度对准程序

我们提出了两种在制造太阳能电池时使图案形成过程彼此高精度对准的方法。我们以两种不同的图案化过程为例介绍这些方法，其中一种是可调整的（激光过程），而另一种是不可调整的（丝网印刷过程）。基本思想是在相对于参考坐标系的离散网格点上测量每个涉及的构图过程的应用结构的坐标。我们选择了网格点，以便它们完全定义最终的单元格图案。然后，我们根据另一个过程（丝网印刷过程）的图案来调整其中一个构图过程（激光过程）的网格点坐标。然后，激光通过在所需方向上将校正后的栅格点彼此连接来执行构图。我们通过使用高精度的离线坐标测量机或高分辨率的在线相机系统以及随后的基于计算机的数据处理来执行与模式坐标相关的高精度测量。后者的在线方法能够实现高产量，并且因此对于太阳能电池的批量生产具有极大的兴趣。在本文中，我们通过将局部应用的激光工艺调整到紧随其后的丝网印刷步骤，来演示“ pPassDop”太阳能电池的对准程序方法。该原理证明包括上述两种用于在单独的细胞批次中确定坐标的方法。