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3D defect distribution detection by coaxial transmission dark-field microscopy
Optics and Lasers in Engineering ( IF 4.6 ) Pub Date : 2020-04-01 , DOI: 10.1016/j.optlaseng.2019.105988
Lulu Li , Qian Liu , Hui Zhang , Wen Huang

Abstract High-performance optics puts stringent requirements on the defect control of transparent optical components (TOCs). In order to accurately and reliably detect the surface and internal defects of TOCs, this paper proposes a three-dimensional (3D) defect distribution detection method based on coaxial transmission dark-field (CTDF) microscopy. The illumination and imaging light paths are coaxial, and a high-pass filter in front of the microscope objective is applied to remove the illuminated background light on the defect images and improve the imaging contrast. Based on the finite depth of focus (DOF) of the microscope objective, the focal plane position of defects can be determined by axial light intensity analysis, and the 3D defect distribution reconstruction is performed. Simulations and experiments show that the method can realize high-contrast defect imaging and has the ability to detect the 3D distribution of surface and internal defects of TOCs.

中文翻译:

通过同轴透射暗场显微镜进行 3D 缺陷分布检测

摘要 高性能光学对透明光学元件(TOCs)的缺陷控制提出了严格的要求。为了准确可靠地检测TOCs的表面和内部缺陷,本文提出了一种基于同轴透射暗场(CTDF)显微镜的三维(3D)缺陷分布检测方法。照明光路与成像光路同轴,在显微镜物镜前安装高通滤波器,去除缺陷图像上的照明背景光,提高成像对比度。基于显微镜物镜的有限焦深(DOF),可以通过轴向光强分析确定缺陷的焦平面位置,并进行3D缺陷分布重建。
更新日期:2020-04-01
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