Thermally excited and piezoresistively detected in-plane cantilever resonators have been previously demonstrated for gas- and liquid-phase chemical and biosensing applications. In this work, the hammerhead resonator geometry, consisting of a cantilever beam supporting a wider semicircular "head", vibrating in an in-plane vibration mode, is shown to be particularly effective for gas-phase sensing with estimated limits of detection in the sub-ppm range for volatile organic compounds. This paper discusses the hammerhead resonator design and the particular advantages of the hammerhead geometry, while also presenting mechanical characterization, optical characterization, and chemical sensing results. These data highlight the distinct advantages of the hammerhead geometry over other cantilever designs.

中文翻译：

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用于化学传感应用的锤头谐振器的面内振动。

先前已经证明了热激发和压阻检测的平面悬臂谐振器可用于气相和液相化学和生物传感应用。在这项工作中，锤头共振器的几何形状由平面内振动模式下振动的悬臂梁支撑，该悬臂梁支撑着一个较宽的半圆形“头部”，被证明对气相感测特别有效，其子区域的检测极限估计为挥发性有机化合物的-ppm范围。本文讨论了锤头共振器的设计以及锤头几何形状的特殊优势，同时还介绍了机械特性，光学特性和化学传感结果。这些数据突出了锤头几何形状比其他悬臂设计的明显优势。