Block copolymer (BCP) self‐assembly (SA) can be exploited for next‐generation lithography for the advanced nanopatterning of surfaces with versatile nanoscale features. To render BCP‐SA suitable for the creation of tailored surface patterns, a fundamental understanding of interfacial interactions is crucial. This progress report gives an overview on the interplay of BCP microscale film thickness modulation and nanoscale microphase separation during BCP‐SA. Light is shed on the role of interfacial energies in both events. Microscale processes determining the topography of BCP films, i.e., hole/island formation and dewetting into droplets, are presented. Nanoscale microphase separation into energetically favorable pattern orientations in dependency on the polymer film thickness and influenced by surface polarities are discussed critically. Finally, examples are shown in which the combination of microscale dewetting and nanoscale microphase separation are exploited to create hierarchical nanostructures from BCPs. An outlook is given presenting successful applications of both mechanisms on prepatterned surfaces in order to control position and morphology of the hierarchical nanostructures. This approach is particularly promising for the creation of advanced surface architectures.

中文翻译：

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纳米级嵌段共聚物的自组装和微米级聚合物膜的去湿：理解界面能量在分层纳米结构形成中的作用的进展。

可以将嵌段共聚物（BCP）自组装（SA）用于下一代光刻，以对具有多种纳米级特征的表面进行高级纳米构图。为了使BCP‐SA适合于创建量身定制的表面图案，对界面相互作用的基本理解至关重要。该进展报告概述了BCP-SA期间BCP微米级膜厚度调制和纳米级微相分离之间的相互作用。揭示了两种情况下界面能的作用。介绍了确定BCP膜形貌的微尺度工艺，即孔/岛的形成和润湿成液滴的过程。严格讨论了将纳米级微相分离成能量上有利的图案取向的方法，该方向取决于聚合物膜的厚度并受表面极性的影响。最后，示出了实例，其中微尺度去湿和纳米尺度微相分离的组合被利用以从BCP产生分层的纳米结构。给出了一种前景，介绍了这两种机制在预图案化表面上的成功应用，以便控制分层纳米结构的位置和形态。这种方法对于创建高级表面架构特别有希望。