In the present work, a polydiagnostic study of an atmospheric pressure plasma jet specifically designed for the deposition of coatings by using an Ar/tetraethyl orthosilicate (TEOS) mixture is undertaken. Both passive and active diagnostic methods are utilized to shed light on the complexity of gas-phase mechanisms of precursor fragmentation. A detailed characterization is performed by (fast imaging) optical emission spectroscopy (OES) to clarify the spatial-temporal behavior of excited species. The influence of the TEOS admixture on gas temperature is studied by OES and Rayleigh scattering techniques. The evolution of streamers and their influence on radical formation in the treatment zone is also discussed.

中文翻译：

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通过光谱诊断深入了解大气压下的等离子体辅助聚合

在目前的工作中，对专为使用 Ar/原硅酸四乙酯 (TEOS) 混合物沉积涂层而设计的大气压等离子体射流进行了多项诊断研究。被动和主动诊断方法都被用来阐明前体裂解气相机制的复杂性。通过（快速成像）光学发射光谱 (OES) 进行详细表征，以阐明激发物种的时空行为。通过 OES 和瑞利散射技术研究了 TEOS 混合物对气体温度的影响。还讨论了拖缆的演变及其对处理区自由基形成的影响。