Hexagonal Boron Nitride (h-BN) thin film was deposited on flexible polyethylene terephthalate (PET) substrate using radio frequency (RF) magnetron sputtering system. Ceramic material h-BN was coated at three different thicknesses of 400 nm, 800 nm and 1200 nm on PET surface for a detailed comparative study. A clearer topography of the h-BN-coated surface on PET substrate was imaged using field emission scanning electron microscopy (FESEM) system, where it depicted well-developed grain boundaries. The existence of B–N components was ensured by peaks observed at 1442 and 817 cm⁻¹ using Fourier-transform infrared spectroscopy (FTIR) study. X-ray diffractograms (XRD) confirmed the presence of (100) and (004) oriented BN phases in the prepared thin films. Increase in surface roughness (10.2–55.2 nm) from surface analysis and moderate improvement in thermal conductivity also obtained in this work was evident. Characterization studies support the novelty in the study of the deposition of h-BN thin film on flexible PET substrate with improved surface roughness and thermal conductivity. The conclusion was that BN thin film can be suggested as a potential object as heat spreader in flexible electronics for efficient thermal management devices such as electronic packaging applications.

中文翻译：

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聚对苯二甲酸乙二酯上六方氮化硼涂层的合成与表征

使用射频（RF）磁控管溅射系统将六方氮化硼（h -BN）薄膜沉积在柔性聚对苯二甲酸乙二醇酯（PET）基板上。将h- BN陶瓷材料以400 nm，800 nm和1200 nm的三种不同厚度涂覆在PET表面上，以进行详细的比较研究。使用场发射扫描电子显微镜（FESEM）系统对PET基板上的h -BN涂层表面进行了更清晰的形貌成像，描绘了发达的晶界。B–N组分的存在通过在1442和817 cm ^-1处观察到的峰来确保使用傅立叶变换红外光谱（FTIR）研究。X射线衍射图（XRD）证实了在制备的薄膜中存在（100）和（004）取向的BN相。表面分析的结果表明，表面粗糙度的增加（10.2-55.2 nm）和热导率的适度提高也很明显。表征研究支持h- BN薄膜在具有改进的表面粗糙度和导热性的柔性PET基板上沉积的研究中的新颖性。结论是，可以将BN薄膜作为柔性电子器件中的散热器的潜在对象，用于高效的热管理设备（如电子封装应用）。