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3D-Printed Scanning-Probe Microscopes with Integrated Optical Actuation and Read-Out.
Small ( IF 13.3 ) Pub Date : 2019-12-05 , DOI: 10.1002/smll.201904695
Philipp-Immanuel Dietrich 1, 2, 3 , Gerald Göring 4, 5 , Mareike Trappen 1, 2, 6 , Matthias Blaicher 1, 2 , Wolfgang Freude 2 , Thomas Schimmel 4, 5 , Hendrik Hölscher 1 , Christian Koos 1, 2, 3, 6
Affiliation  

Scanning-probe microscopy (SPM) is the method of choice for high-resolution imaging of surfaces in science and industry. However, SPM systems are still considered as rather complex and costly scientific instruments, realized by delicate combinations of microscopic cantilevers, nanoscopic tips, and macroscopic read-out units that require high-precision alignment prior to use. This study introduces a concept of ultra-compact SPM engines that combine cantilevers, tips, and a wide variety of actuator and read-out elements into one single monolithic structure. The devices are fabricated by multiphoton laser lithography as it is a particularly flexible and accurate additive nanofabrication technique. The resulting SPM engines are operated by optical actuation and read-out without manual alignment of individual components. The viability of the concept is demonstrated in a series of experiments that range from atomic-force microscopy engines offering atomic step height resolution, their operation in fluids, and to 3D printed scanning near-field optical microscopy. The presented approach is amenable to wafer-scale mass fabrication of SPM arrays and capable to unlock a wide range of novel applications that are inaccessible by current approaches to build SPMs.

中文翻译:

具有集成光学驱动和读出功能的3D打印扫描探针显微镜。

扫描探针显微镜(SPM)是科学和工业中对表面进行高分辨率成像的一种选择方法。但是,SPM系统仍然被认为是相当复杂且昂贵的科学仪器,通过在使用前需要高精度对准的微悬臂,纳米尖端和宏观读出单元的精细组合来实现。这项研究引入了一种超紧凑型SPM引擎的概念,该引擎将悬臂,尖端以及各种执行器和读出元件组合到一个单一的整体结构中。该设备是通过多光子激光光刻技术制造的,因为它是一种特别灵活且精确的添加剂纳米制造技术。最终的SPM引擎可通过光学驱动和读出来操作,而无需手动对齐各个组件。该概念的可行性在一系列实验中得到了证明,从提供原子步高分辨率的原子力显微镜引擎,其在流体中的操作以及3D打印扫描近场光学显微镜到一系列实验。所提出的方法适用于SPM阵列的晶片规模大规模制造,并且能够解锁目前构建SPM的方法无法访问的各种新颖应用。
更新日期:2020-01-16
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