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In2O3- and SnO2-based Ozone Sensors: Design and Characterization
Critical Reviews in Solid State and Materials Sciences ( IF 10.8 ) Pub Date : 2017-03-09 , DOI: 10.1080/10408436.2017.1287661
G. Korotcenkov 1 , V. Brinzari 2 , B. K. Cho 1
Affiliation  

This article describes in detail the SnO2 and In2O3 metal oxides as materials for designing solid state conductometric ozone sensors. The main focus of this article is on the description of the SnO2 and In2O3 films' structural parameters important for gas sensor design and on the establishment of the main regularities of the film parameters influence on the sensor characteristics. Advantages and disadvantages of approaches used for optimization of ozone sensor parameters are also analyzed. In particular, surface modification, bulk doping of SnO2 and In2O3, and the use of 1D structures and hybrid materials are considered. The main factors, controlling parameters of SnO2- and In2O3-based ozone sensors, are determined, and recommendations for the process of the SnO2 and In2O3 films deposition, facilitating the search of the film parameters and the fabrication technologies that optimize the ozone sensor performance, are formulated.

中文翻译:

基于2 O 3和SnO 2的臭氧传感器:设计与表征

本文详细介绍了SnO 2和In 2 O 3金属氧化物作为设计固态电导臭氧传感器的材料。本文的主要重点是描述对气体传感器设计很重要的SnO 2和In 2 O 3薄膜的结构参数,以及确定薄膜参数影响传感器特性的主要规律。还分析了用于优化臭氧传感器参数的方法的优缺点特别是表面改性,SnO 2和In 2 O 3的体掺杂,并考虑使用一维结构和混合材料。确定了基于SnO 2和In 2 O 3的臭氧传感器的主要控制参数,并为SnO 2和In 2 O 3薄膜沉积的工艺提出了建议,从而有助于薄膜参数的搜索和制造制定了优化臭氧传感器性能的技术。
更新日期:2018-03-14
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