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Focused Ion Beam Microstructuring of Quantum Matter
Annual Review of Condensed Matter Physics ( IF 22.6 ) Pub Date : 2018-03-12 00:00:00 , DOI: 10.1146/annurev-conmatphys-033117-054021
Philip J.W. Moll 1
Affiliation  

Focused ion beam (FIB) machining promises exciting new possibilities for the study of quantum materials through precise control over the shape and geometry of single crystals on the submicrometer scale. It offers viable routes to fabricate high-quality mesoscale structures from materials that cannot yet be grown in thin-film form and to enhance the experimentally accessible signatures of new physical phenomena. Prototype devices can also be produced in a silicon-chip environment to investigate directly the materials application potential for future electronics. This review introduces the concepts of ion beam shaping of matter, discusses the role and extent of surface damage and material disorder inherent to these techniques, and gives an overview of recent experiments on FIB-structured crystals. Given the early stage of the field of FIB-fabricated quantum materials, much is yet to come, and emergent trends and future directions are also discussed.

中文翻译:


量子离子的聚焦离子束微结构化

聚焦离子束(FIB)加工通过在亚微米尺度上精确控制单晶的形状和几何形状,为研究量子材料提供了令人兴奋的新可能性。它提供了可行的途径,可以用尚未以薄膜形式生长的材料制造高质量的中尺度结构,并增强新的物理现象的实验可访问特征。原型设备也可以在硅芯片环境中生产,以直接调查未来电子产品的材料应用潜力。这篇综述介绍了离子束物质整形的概念,讨论了这些技术固有的表面损伤和材料无序的作用和程度,并概述了FIB结构晶体的最新实验。

更新日期:2018-03-12
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