Abstract In this study, an original ‘electromagnetic damping-controlled horizontal cutting mechanism’ is designed and proposed for precisely controlling micro-scale wire-tension for cutting a microstructure array. The electromagnetic damper uses a set of three annular electromagnets equally distributed with their end-faces orientated toward a mild-steel disc. This arrangement is located at the front of the cutting mechanism. The cutting mechanism also consists of a set of microgroove rollers, a wire-electrode guide, and an auxiliary guide designed to suppress wire-wriggling and wire-swaying in order to deliver a tungsten wire of O13 μm diameter at a steady state over the long-term. Experimental verification is conducted on B-NPD (boron-doped nano-polycrystalline diamond), which possesses a high melting-point and high electrical resistivity characteristics, to establish the feasibility of cutting such difficult-to-machine materials. A 'one-cut one-skim' machining approach is used whereby the surface flatness and the dimensional accuracy of the slot-wall can be improved. Experimental results found that the wire feed-rate during the finish-cutting stage can be used at a rate greater than that of the rough-cutting stage. The resultant diamond microstructure array is of high-consistency and aspect-ratio at 1:22, demonstrating that the electromagnetic damping-controlled horizontal cutting mechanism can precisely and stably control the tension and running speed of the microwire.

中文翻译：

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开发一种独创的电磁阻尼控制水平切割微细线切割机构

摘要 在这项研究中，设计并提出了一种独创的“电磁阻尼控制水平切割机构”，用于精确控制微尺度线张力以切割微结构阵列。电磁阻尼器使用一组三个均匀分布的环形电磁体，它们的端面朝向低碳钢圆盘。该布置位于切割机构的前部。切割机构还包括一组微槽滚轮、一个线电极导向器和一个辅助导向器，旨在抑制线蠕动和线摇摆，以便在长时间内稳定地输送直径为 O13 μm 的钨丝。 -学期。对B-NPD（掺硼纳米多晶金刚石）进行实验验证，其具有高熔点和高电阻率的特性，从而确立了切割此类难加工材料的可行性。使用“一刀一削”加工方法，从而可以提高槽壁的表面平整度和尺寸精度。实验结果发现，精切削阶段的送丝速度可以比粗切削阶段的速度大。得到的金刚石微结构阵列具有高一致性和1:22的纵横比，表明电磁阻尼控制的水平切割机构可以精确稳定地控制微丝的张力和运行速度。采用机械加工方法，可以提高槽壁的表面平整度和尺寸精度。实验结果发现，精切削阶段的送丝速度可以比粗切削阶段的速度大。得到的金刚石微结构阵列具有高一致性和1:22的纵横比，表明电磁阻尼控制的水平切割机构可以精确稳定地控制微丝的张力和运行速度。采用机械加工方法，可以提高槽壁的表面平整度和尺寸精度。实验结果发现，精切削阶段的送丝速度可以比粗切削阶段的速度大。得到的金刚石微结构阵列具有高一致性和1:22的纵横比，表明电磁阻尼控制的水平切割机构可以精确稳定地控制微丝的张力和运行速度。