Devices consisting of 3D components are always desired for their far more controllable degrees of freedom compared with their planar counterparts; however, the limitations on the fabrication of 3D nanostructures have severely restricted their applications. Here, a focused ion beam (FIB) defined rapid bending origami method is reported to fabricate 3D micro/nanoscale architectures, by relying on ion irradiation induced 2D structure bending mechanism based on the residual stress formation in metal/dielectric film. Regulated by ions irradiation dose and energy, a large‐scale programmable 2D patterns can be controllably bended to configure versatile 3D micro/nanostructures with scalable bending capacity and feature sizes down to 175 nm. The benefit of this method is, a 3D bended metasurface is designed and fabricated as an asymmetric mirror, showing a very simple strategy to realize high‐efficiency unidirectional reflectionless effect. This FIB‐defined bending origami proves to be a rapid fabrication approach of varied 3D configuration in micro/nanoscale with extremely flexible controllability of spatial orientation, providing more opportunities and options for various functional devices based on 3D configurations, especially for 3D metasurfaces.

中文翻译：

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微型/纳米级的快速折纸折纸朝向多功能的3D超曲面

与平面同类产品相比，由3D组件组成的设备始终具有更可控的自由度，这是人们一直希望的。但是，3D纳米结构制造的局限性严重限制了它们的应用。在此，据报道，聚焦离子束（FIB）定义的快速弯曲折纸方法是依靠金属/介电膜中残余应力的形成，依靠离子辐照诱发的2D结构弯曲机制来制造3D微米/纳米尺度的结构。受离子辐照剂量和能量的调节，可以对大型可编程2D图案进行可控弯曲，以配置通用的3D微米/纳米结构，具有可扩展的弯曲能力，并且特征尺寸小至175 nm。这种方法的好处是，将3D弯曲的超曲面设计和制造为非对称镜，展示了一种非常简单的策略来实现高效的单向无反射效果。这种FIB定义的折纸折纸被证明是一种在微米/纳米尺度上具有多种3D配置的快速制造方法，并且具有非常灵活的空间方向可控性，从而为基于3D配置的各种功能设备（尤其是3D超表面）提供了更多的机会和选择。