A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of width-tapered microcantilevers for a wide range of the taper ratio and tip mass ratios. Closed form expressions are presented, which could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.

中文翻译：

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具有尖端质量的均匀和锥形微悬臂梁的较高共振模式的动态弹簧常数。

提出了一个综合的数据集，该数据集涵盖了宽锥度比和尖端质量比范围宽的锥形微悬臂梁的特征值和动态刚度。提出了封闭形式的表达式，可以帮助一般MEMS领域的设计人员和研究人员，尤其是原子力显微镜。