The mid-infrared (MIR) wavelength region is attracting more and more research for applications such as medical diagnostics, environmental monitoring, and free space communications. In the MIR, thermal detectors play an important role because they can operate over a large wavelength range, can be fabricated using CMOS compatible processes, and do not require cooling. Today, no other MIR detector technology is able to fill this gap. We demonstrate the first uncooled silicon waveguide-based bolometers, in the Silicon-on-Insulator (SOI) and suspended silicon waveguide platforms. The bolometers comprise gold plasmonic antennas on the waveguide surface that heat up when they absorb light, and amorphous silicon thermometers (formed by ion implantation), whose electrical resistance changes by 0.90 ± 0.26% K^–1 when they are heated. We show that suspending the bolometers improves their performance, and achieve sensitivities of up to 1.13 ± 0.04% change in resistance per milliwatt of input power, with a noise equivalent power of 66 μW/. Calculations suggest the NEP could, in future, be further reduced by 4 orders of magnitude.

中文翻译：

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中红外纳米金属天线辅助硅波导的测振仪

在医疗诊断，环境监测和自由空间通信等应用中，中红外（MIR）波长区域吸引了越来越多的研究。在MIR中，热探测器起着重要的作用，因为它们可以在较大的波长范围内工作，可以使用CMOS兼容工艺制造，并且不需要冷却。如今，没有其他MIR探测器技术能够填补这一空白。我们在绝缘体上硅（SOI）和悬浮式硅波导平台中演示了首个未冷却的基于硅波导的辐射热计。辐射热计包括波导表面上的金等离子天线，它们在吸收光时会变热，以及非晶硅温度计（由离子注入形成），其电阻变化为0.90±0.26％K ^–1当它们加热时。我们证明，悬挂测辐射热计可改善其性能，并实现每毫瓦输入功率的电阻变化高达1.13±0.04％的灵敏度，而噪声等效功率为66μW/ 。计算表明，NEP将来可能会进一步降低4个数量级。