A new capacitive‐type humidity sensor is proposed using novel materials and fabrication process for practical applications in sensitive environments and cost‐effective functional devices that require ultrasensing performances. Metal halide perovskites (CsPbBr₃ and CsPb₂Br₅) combined with diverse ceramics (Al₂O₃, TiO₂, and BaTiO₃) are selected as sensing materials for the first time, and nanocomposite powders are deposited by aerosol deposition (AD) process. A state‐of‐the‐art CsPb₂Br₅/BaTiO₃ nanocomposite humidity sensor prepared by AD process exhibits a significant increase in humidity sensing compared with CsPbBr₃/Al₂O₃ and CsPbBr₃/TiO₂ sensors. An outstanding humidity sensitivity (21426 pF RH%⁻¹) with superior linearity (0.991), fast response/recovery time (5 s), low hysteresis of 1.7%, and excellent stability in a wide range of relative humidity is obtained owing to a highly porous structure, effective charge separation, and water‐resistant characteristics of CsPb₂Br₅. Notably, this unprecedented result is obtained via a simple one‐step AD process within a few minutes at room temperature without any auxiliary treatment. The synergetic combination of AD technique and perovskite‐based nanocomposite can be potentially applied toward the development of multifunctional sensing devices.

中文翻译：

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钙钛矿诱导的超敏和高度稳定的湿度传感器系统，通过在室温下进行气溶胶沉积制备

提出了一种新的电容式湿度传感器，该传感器采用新颖的材料和制造工艺，可用于敏感环境中的实际应用以及需要超传感性能的经济高效的功能器件。首次选择金属卤化物钙钛矿（CsPbBr ₃和CsPb ₂ Br ₅）与各种陶瓷（Al ₂ O ₃，TiO ₂和BaTiO ₃）组合作为传感材料，并通过气溶胶沉积（AD）沉积纳米复合粉末过程。最新的CsPb ₂ Br ₅ / BaTiO ₃与CsPbBr ₃ / Al ₂ O ₃和CsPbBr ₃ / TiO ₂传感器相比，通过AD工艺制备的纳米复合湿度传感器在湿度感测上有显着提高。优异的湿度灵敏度（21426 pF RH％^-1）具有出色的线性（0.991），快速的响应/恢复时间（5 s），1.7％的低滞后性以及在宽范围的相对湿度下的出色稳定性，这是由于CsPb ₂ Br _5的高孔隙结构，有效的电荷分离和耐水特性。值得注意的是，这种无与伦比的结果是在室温下几分钟内通过简单的一步式AD处理获得的，无需任何辅助处理。AD技术和基于钙钛矿的纳米复合材料的协同结合可以潜在地应用于多功能传感设备的开发。