Abstract Hybridly polarized beam is a new type of vector beam different from conventional cylindrical vector beam. In our work, we present a simple and effective method to generate hybridly polarized beams by using a cascade of a super structured polarization converter and a quarter-wave plate. The transformation of light field was analyzed by using Jones vector and Jones matrix, and the Stokes parameters of the generated vector beams were measured to verify the states of polarization. Various novel multiscale micro-/nanostructures were fabricated on surfaces of 4H-SiC by using the hybrid vector beams, which are different from that induced by linearly polarized beam or conventional cylindrical vector beam. Experimental results show that the multiscale characteristics can be adjusted with a high degree of freedom by designing states of polarization. This research provides a new idea for preparation of multiscale micro-/nanostructures that may be useful in the fields of nano-/micro-electromechanical systems, thermal photovoltaics, and thermal management.

中文翻译：

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混合偏振飞秒激光制备的单晶 SiC 上的多尺度微/纳米结构

摘要 混合偏振光束是一种不同于传统圆柱矢量光束的新型矢量光束。在我们的工作中，我们提出了一种简单有效的方法，通过使用超结构偏振转换器和四分之一波片的级联来产生混合偏振光束。利用琼斯矢量和琼斯矩阵对光场的变换进行了分析，并通过测量产生的矢量光束的斯托克斯参数来验证偏振态。使用混合矢量光束在 4H-SiC 表面制造了各种新型多尺度微/纳米结构，这与线偏振光束或传统圆柱矢量光束不同。实验结果表明，通过设计偏振态可以高度自由地调整多尺度特性。